Secondary Ion Mass Spectrometry Sims Iii
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Secondary Ion Mass Spectrometry Sims Iii
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Author : A. Benninghoven
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
Secondary Ion Mass Spectrometry Sims Iii written by A. Benninghoven and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Science categories.
Following the biannual meetings in MUnster (1977) and Stanford (1979) the Third International Conference on Secondary Ion Mass Spectroscopy was held in Budapest from August 31 to September 5, 1981. The Conference was attended by about 250 participants. The success of the 1981 Conference in Budapest was especially due to the excellent preparation and organization by the Local Organizing Committee. We would also like to acknowledge the generous hospitality and cooperation of the Hungarian Academy of Sciences. Japan was chosen to be the location for the next conference in 1983. SIMS conferences are devoted to two main issues: improving the application of SIMS in different and especially new fields, and understanding the ion formation process. Needless to say, there is a very strong interaction be tween these two issues. The major reason for the rapid increase in SIMS activities in the last few years is the fact that SIMS is a powerful tool for bulk, thin-film, and surface analysis. Today it is extensively and successfully applied in such different fields as depth profiling and imaging of semiconductor devices, in isotope analysis of minerals, in imaging biological tissues, in the study of catalysts and catalytic reactions, in oxide-layer analysis on metals in drug detection, and in the analysis of body fluids.
Secondary Ion Mass Spectrometry Sims Iii
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Author : A. Benninghoven
language : en
Publisher:
Release Date : 2014-09-01
Secondary Ion Mass Spectrometry Sims Iii written by A. Benninghoven and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-09-01 with categories.
Secondary Ion Mass Spectrometry
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Author :
language : en
Publisher:
Release Date : 1982
Secondary Ion Mass Spectrometry written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1982 with categories.
Secondary Ion Mass Spectrometry Sims Proceedings Of The International Conference On Secondary Ion Mass Spectrometry Sims 3 Technical University Budapest Hungary August 30 September 5 1981
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Author :
language : en
Publisher:
Release Date : 1982
Secondary Ion Mass Spectrometry Sims Proceedings Of The International Conference On Secondary Ion Mass Spectrometry Sims 3 Technical University Budapest Hungary August 30 September 5 1981 written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1982 with categories.
Secondary Ion Mass Spectrometry
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Author : A. Benninghoven
language : en
Publisher: Springer
Release Date : 1982
Secondary Ion Mass Spectrometry written by A. Benninghoven and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 1982 with Science categories.
Secondary Ion Mass Spectrometry
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Author : Paul van der Heide
language : en
Publisher: John Wiley & Sons
Release Date : 2014-08-19
Secondary Ion Mass Spectrometry written by Paul van der Heide and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-08-19 with Science categories.
Serves as a practical reference for those involved in Secondary Ion Mass Spectrometry (SIMS) • Introduces SIMS along with the highly diverse fields (Chemistry, Physics, Geology and Biology) to it is applied using up to date illustrations • Introduces the accepted fundamentals and pertinent models associated with elemental and molecular sputtering and ion emission • Covers the theory and modes of operation of the instrumentation used in the various forms of SIMS (Static vs Dynamic vs Cluster ion SIMS) • Details how data collection/processing can be carried out, with an emphasis placed on how to recognize and avoid commonly occurring analysis induced distortions • Presented as concisely as believed possible with All sections prepared such that they can be read independently of each other
Secondary Ion Mass Spectrometry Sims Ii
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Author : A. Benninghoven
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-11-11
Secondary Ion Mass Spectrometry Sims Ii written by A. Benninghoven and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-11-11 with Science categories.
Quantitative Secondary Ion Mass Spectrometry Sims Of Iii V Materials
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Author : P. van Lierde
language : en
Publisher:
Release Date : 2002
Quantitative Secondary Ion Mass Spectrometry Sims Of Iii V Materials written by P. van Lierde and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2002 with categories.
Secondary ion mass spectrometry (SIMS) provides direct methods to characterize the chemical composition of II-V materials at major, minor and trace level concentrations as a function of layer depth. SIMS employs keV primary ions to sputter the surface and sensitive mass spectrometry techniques to mass analyze and detect sputtered secondary ions which are characteristic of the sample composition. In-depth compositional analysis of these materials by SIMS relies on a number of its unique features including: (1) keV primary ion sputtering yielding nanometer depth resolutions, (2) the use of MCs(+) detection techniques for quantifying major and minor constituents, and (3) ion implant standards for quantifying trace constituents like dopants and impurities. Nanometer depth resolution in SIMS sputtering provides accurate detection of diffusion of dopants, impurities and major constituents. MCs(+) refers to the detection of molecular & ' ions of an element (M) and the Cs(+) primary beam. MCs(+) minimizes SIMS matrix effects in analysis for major and minor constituents, thus providing good quantification. This paper presents a SIMS study of Al(x)Ga(1-x)As structures with three different x values. MCs(+) (M = Al or Ga) data are presented for the accurate determination of major and minor components. Rutherford backscattering spectrometry (RBS) and x-ray diffraction (XRD) data were cross-correlated with the MCs(+) results. Three specimens with different x values were ion implanted with H, C, O, Mg, Si, Zn and Se to study quantification of trace levels. SIMS data acquired on a double focusing instrument (CAMECA IMS-4f) and a quadrupole instrument (PHI ADEPT 1010) are also compared. Lastly, we discuss our efforts to improve the analysis precision for p- and n-type dopants in AlGaAs which currently is +/- 3% (1 sigma).
Secondary Ion Mass Spectrometry Sims V
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Author : Alfred Benninghoven
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
Secondary Ion Mass Spectrometry Sims V written by Alfred Benninghoven and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Science categories.
This volume contains the proceedings of the Fifth International Confer ence on Secondary Ion Mass Spectrometry (SIMS V), held at the Capitol Holiday Inn, Washington, DC, USA, from September 30 to October 4, 1985. The conference was the fifth in a series of conferences held bienni ally. Previous conferences were held in Miinster (1977), Stanford (1979), Budapest (1981), and Osaka (1983). SIMS V was organized by Dr. R.J. Colton of the Nayal Research Lab oratory and Dr. D.S. Simons of the National Bureau of Standards un der the auspices of the International Organizing Committee chaired by Prof. A. Benninghoven of the Universitat Miinster. Dr. Richard F.K. Herzog served as the honorary chairman of SIMS V. While Dr. Herzog is best known to the mass spectrometry community for his theoretical development of a mass spectrometer design, known as the Mattauch-Herzog geometry, he also made several early and impor tant contributions to SIMS. In 1949, Herzog and Viehbock published a description of the first instrument designed to study secondary ions pro duced by bombardment from a beam of ions generated in a source that was separated from the sample by a narrow tube. Later at the GCA Cor poration, he brought together a team of researchers including H.J. Liebl, F.G. Riidenauer, W.P. Poschenrieder and F.G. Satkiewicz, who designed and built, and carried out applied research with the first commercial ion microprobe.
Secondary Ion Mass Spectrometry
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Author : A. Benninghoven
language : en
Publisher:
Release Date : 1979
Secondary Ion Mass Spectrometry written by A. Benninghoven and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1979 with categories.