Semiconductor Manufacturing Technology
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Handbook Of Semiconductor Manufacturing Technology
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Author : Yoshio Nishi
language : en
Publisher: CRC Press
Release Date : 2017-12-19
Handbook Of Semiconductor Manufacturing Technology written by Yoshio Nishi and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-12-19 with Technology & Engineering categories.
Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.
Semiconductor Manufacturing Technology
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Author : Chue San Yoo
language : en
Publisher: World Scientific Publishing Company
Release Date : 2008-03-03
Semiconductor Manufacturing Technology written by Chue San Yoo and has been published by World Scientific Publishing Company this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-03-03 with categories.
This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format.
Semiconductor Manufacturing Technology
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Author : Michael Quirk
language : en
Publisher: Pearson
Release Date : 2001
Semiconductor Manufacturing Technology written by Michael Quirk and has been published by Pearson this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001 with Electronic industries categories.
In this book, Quirk and Serda introduce the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra large scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications. Topics include copper interconnect; dual damascene additive process for metallization; deep UV sub-micron photolithography (.18 micron and below); low-k dielectric processing; chemical mechanical planarization; a comprehensive model of manufacturing process; chemical-mechanical polish (CMP); and maintenance and troubleshooting. For practicing semiconductor manufacturing technicians or those interested in semiconductor manufacturing technology and processes.
Semiconductor Manufacturing Technology
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Author :
language : en
Publisher:
Release Date : 1996
Semiconductor Manufacturing Technology written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1996 with categories.
Introduction To Semiconductor Manufacturing Technology
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Author : Hong Xiao
language : en
Publisher:
Release Date : 2001
Introduction To Semiconductor Manufacturing Technology written by Hong Xiao and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001 with Semiconductor industry categories.
For courses in Semiconductor Manufacturing Technology, IC Fabrication Technology, and Devices: Conventional Flow. This up-to-date text on semiconductor manufacturing processes takes into consideration the rapid development of the industry's technology. It thoroughly describes the complicated and new IC chip fabrication processes in detail with minimum mathematics, physics, and chemistry. Advanced technologies are covered along with older ones to assist students in understanding the development processes from a historic point of view.
Fundamentals Of Semiconductor Manufacturing And Process Control
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Author : Gary S. May
language : en
Publisher: John Wiley & Sons
Release Date : 2006-05-26
Fundamentals Of Semiconductor Manufacturing And Process Control written by Gary S. May and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-05-26 with Technology & Engineering categories.
A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.
Introduction To Semiconductor Technology
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Author : Hong Xiao
language : en
Publisher: SPIE-International Society for Optical Engineering
Release Date : 2012
Introduction To Semiconductor Technology written by Hong Xiao and has been published by SPIE-International Society for Optical Engineering this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012 with Integrated circuits categories.
IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. Introduction to Semiconductor Manufacturing Technologies, Second Edition thoroughly describes the complicated processes with minimal mathematics, chemistry, and physics; it covers advanced concepts while keeping the contents accessible to readers without advanced degrees. Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology. The text focuses on current fabrication technologies, but older technologies are discussed for historical context.
Introduction To Semiconductor Manufacturing Technology International Edition
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Author : Hong Xiao
language : en
Publisher:
Release Date : 2000-12-01
Introduction To Semiconductor Manufacturing Technology International Edition written by Hong Xiao and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000-12-01 with categories.
Semiconductor Manufacturing Technology Workshop
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Author :
language : en
Publisher:
Release Date : 1995
Semiconductor Manufacturing Technology Workshop written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Manufacturing processes categories.
Semiconductor Manufacturing Technology International Edition
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Author : Julian Serda
language : en
Publisher: Prentice Hall
Release Date : 2000-11
Semiconductor Manufacturing Technology International Edition written by Julian Serda and has been published by Prentice Hall this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000-11 with categories.
For the introductory course in Semiconductor Manufacturing Technology. This text introduces the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra-large-scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications.