Semiconductor Process And Product Quality Assurance Techniques
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Semiconductor Process And Product Quality Assurance Techniques
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Author : Semyra Vasquez-Borucki
language : en
Publisher: Independently Published
Release Date : 2021-03-05
Semiconductor Process And Product Quality Assurance Techniques written by Semyra Vasquez-Borucki and has been published by Independently Published this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021-03-05 with categories.
The text book "Semiconductor Process and Product Quality Assurance Techniques" provides an overview of quality assurance approaches as well as techniques which are required to evaluate and determine relevant quality related parameters. It covers- Physical Front End Process and Product Monitoring- Electrical Front End Process and Product Monitoring- Front End Defect and Contamination Engineering- Semiconductor Back End Test Methods and Product Reliability Monitoring
Fundamentals Of Semiconductor Manufacturing And Process Control
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Author : Gary S. May
language : en
Publisher: John Wiley & Sons
Release Date : 2006-05-26
Fundamentals Of Semiconductor Manufacturing And Process Control written by Gary S. May and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-05-26 with Technology & Engineering categories.
A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.
Introduction To Quality Management In The Semiconductor Industry
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Author : Juergen Wittmann
language : en
Publisher: Createspace Independent Publishing Platform
Release Date : 2018-05
Introduction To Quality Management In The Semiconductor Industry written by Juergen Wittmann and has been published by Createspace Independent Publishing Platform this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-05 with categories.
The "Students' Version is a "black and white" only version with a slightly reduced number of pages as compared to the full version of this text book. The primary purpose of our book is to provide the "fast lane" to practical quality engineering and management in the semi-conductor industries. In line with this objective, this book is meant to be more a guide to practical quality engineering and management, rather than a scientific treatise. Although it has been written for the semiconductor technology community, it goes without saying that it is useful for almost all other industrial areas, since in a way semiconductor technology (in particular micro-electronics) is a good model case how 100% stringent QM can be implemented in practice.
Manufacturing In Process Control And Measuring Techniques For Semiconductors
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Author :
language : en
Publisher:
Release Date : 1966*
Manufacturing In Process Control And Measuring Techniques For Semiconductors written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1966* with Electronic measurements categories.
Describes nondestructive measurement techniques for modern semiconductor processes and the application of these techniques to provide meaninful information about final electrical characteristics and quality. Cf. Foreword.
Introduction To Quality Management In The Semiconductor Industry
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Author : Juergen Wittmann
language : en
Publisher: Createspace Independent Publishing Platform
Release Date : 2016-08-26
Introduction To Quality Management In The Semiconductor Industry written by Juergen Wittmann and has been published by Createspace Independent Publishing Platform this book supported file pdf, txt, epub, kindle and other format this book has been release on 2016-08-26 with categories.
Based on many years of practical experience of both authors in the semiconductor industry (semiconductor material and technology as well as quality management) this book provides a general overview of methods and tools in quality management in connection with and with special emphasis on semiconductor specifig topics related to quality. It also contains many generic technical and business processes which have to be detailed and adjusted according to particular company, product or business segment requirements. So, the primary purpose of our book is to provide the "fast lane" to practical quality engineering and management in the semiconductor industries. In line with this objective, this book is meant to be more a guide to practical quality engineering and management, rather than a scientific treatise. Although it has been written for the semiconductor technology community, it goes without saying that it is useful for almost all other industrial areas, since in a way semiconductor technology (in particular microelectronics) is a good model case how 100% stringent QM can be implemented in practice.
Manufacturing In Process Control And Measuring Techniques For Semiconductors
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Author :
language : en
Publisher:
Release Date : 1966
Manufacturing In Process Control And Measuring Techniques For Semiconductors written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1966 with Electronic measurements categories.
Describes nondestructive measurement techniques for modern semiconductor processes and the application of these techniques to provide meaninful information about final electrical characteristics and quality. Cf. Foreword.
Contamination Free Manufacturing For Semiconductors And Other Precision Products
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Author : Robert P. Donovan
language : en
Publisher: CRC Press
Release Date : 2018-10-08
Contamination Free Manufacturing For Semiconductors And Other Precision Products written by Robert P. Donovan and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-10-08 with Technology & Engineering categories.
Recognizing the need for improved control measures in the manufacturing process of highly sensitized semiconductor technology, this practical reference provides in-depth and advanced treatment on the origins, procedures, and disposal of a variety of contaminants. It uses contemporary examples based on the latest hardware and processing apparatus to illustrate previously unavailable results and insights along with experimental and theoretical developments. Ensures the proper methods necessary to meet the standards established in the 1997 National Technology Roadmap for Semiconductors (NTRS)! Summarizing up-to-date control practices in the industry, Contamination-Free Manufacturing for Semiconductors and Other Precision Products: Details the physics and chemistry behind the mechanisms leading to contamination-induced failures Considers particles and molecular contaminants, including the entire spectrum of mass-based contaminants Outlines primary contamination problems and target control levels Reveals and offers solutions to inadequate areas of measurement capability and control technology Clarifies significant problems and decisions facing the industry by analyzing NTRS standards and contamination mechanisms Containing over 700 literature references, drawings, photographs, equations, and tables, Contamination-Free Manufacturing for Semiconductors and Other Precision Products is an essential reference for electrical and electronics, instrumentation, process, manufacturing, development, contamination control and quality engineers; physicists; and upper-level undergraduate and graduate students in these disciplines.
Advanced Process Control And Optimal Sampling In Semiconductor Manufacturing
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Author : Hyung Joo Lee
language : en
Publisher:
Release Date : 2008
Advanced Process Control And Optimal Sampling In Semiconductor Manufacturing written by Hyung Joo Lee and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008 with Process control categories.
Semiconductor manufacturing is characterized by a dynamic, varying environment and the technology to produce integrated circuits is always shifting in response to the demand for faster and new products, and the time between the development of a new profitable method of manufacturing and its transfer to tangible production is very short. The semiconductor industry has adopted the use of advanced process control (APC), namely a set of automated methodologies to reach desired process goals in operating individual process steps. That is because the ultimate motivation for APC is improved device yield and a typical semiconductor manufacturing process can have several hundred unit processes, any of which could be a yield limiter if a given unit procedure is out of control. APC uses information about the materials to be processed, metrology data, and the desired output results to choose which model and control plan to employ. The current focus of APC for semiconductor manufacturers is run-to-run control. Many metrology applications have become key enablers for the conventionally labeled "value-added" processing steps in lithography and etch and are now integral parts of these processes. The economic advantage of effective metrology applications increases with the difficulty of the manufacturing process. Frequent measurement facilitates products reaching its target but it increases the cost and cycle time. If lots of measurements are skipped, the product quality does not be guaranteed due to process error from uncompensated drift and step disturbance. Thus, it is necessary to optimize the sampling plan in order to quickly identify the sources of prediction errors and decrease the metrology cost and cycle time. The goal of this research intend to understand the relationship between metrology and advanced process control (APC) in semiconductor manufacturing and develop an enhanced sampling strategy in order to maximize the value of metrology and control for critical wafer features.
Run To Run Control In Semiconductor Manufacturing
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Author : James Moyne
language : en
Publisher: CRC Press
Release Date : 2018-10-08
Run To Run Control In Semiconductor Manufacturing written by James Moyne and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-10-08 with Technology & Engineering categories.
Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
Handbook Of Emerging Materials For Semiconductor Industry
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Author : Young Suh Song
language : en
Publisher: Springer Nature
Release Date :
Handbook Of Emerging Materials For Semiconductor Industry written by Young Suh Song and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on with categories.