Soviet Radio Frequency Discharge Research
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Soviet Radio Frequency Discharge Research
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Author : Valery A. Godyak
language : en
Publisher:
Release Date : 1986
Soviet Radio Frequency Discharge Research written by Valery A. Godyak and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1986 with Science categories.
Physics Of Radio Frequency Plasmas
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Author : Pascal Chabert
language : en
Publisher: Cambridge University Press
Release Date : 2011-02-24
Physics Of Radio Frequency Plasmas written by Pascal Chabert and has been published by Cambridge University Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-02-24 with Science categories.
Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.
Principles Of Plasma Discharges And Materials Processing
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Author : Michael A. Lieberman
language : en
Publisher: John Wiley & Sons
Release Date : 2024-10-15
Principles Of Plasma Discharges And Materials Processing written by Michael A. Lieberman and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2024-10-15 with Technology & Engineering categories.
A new edition of this industry classic on the principles of plasma processing Plasma-based technology and materials processes have been central to the revolution of the last half-century in micro- and nano-electronics. From anisotropic plasma etching on microprocessors, memory, and analog chips, to plasma deposition for creating solar panels and flat-panel displays, plasma-based materials processes have reached huge areas of technology. As key technologies scale down in size from the nano- to the atomic level, further developments in plasma materials processing will only become more essential. Principles of Plasma Discharges and Materials Processing is the foundational introduction to the subject. It offers detailed information and procedures for designing plasma-based equipment and analyzing plasma-based processes, with an emphasis on the abiding fundamentals. Now fully updated to reflect the latest research and data, it promises to continue as an indispensable resource for graduate students and industry professionals in a myriad of technological fields. Readers of the third edition of Principles of Plasma Discharges and Materials Processing will also find: Extensive figures and tables to facilitate understanding A new chapter covering the recent development of processes involving high-pressure capacitive discharges New subsections on discharge and processing chemistry, physics, and diagnostics Principles of Plasma Discharges and Materials Processing is ideal for professionals and process engineers in the field of plasma-assisted materials processing with experience in the field of science or engineering. It is the premiere world-wide basic text for graduate courses in the field.
Radio Frequency Capacitive Discharges
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Author : Yuri P. Raizer
language : en
Publisher: CRC Press
Release Date : 2017-12-14
Radio Frequency Capacitive Discharges written by Yuri P. Raizer and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-12-14 with Science categories.
The first publication of its kind in the field, this book describes comprehensively and systematically radio-frequency (rf) capacitive gas discharges of intermediate and low pressure and their application to gas laser excitation and to plasma processing. Text presents the physics underlying rf discharges along with techniques for obtaining such discharges, experimental methods and results, and theoretical and numerical modeling findings. Radio-Frequency Capacitive Discharges is written by well-known specialists in the field, authors of many theoretical and experimental works. They provide simple and clear discussions of complicated physical phenomena. A complete review on the state of the art is included. This interesting new book can be used as a textbook for students and postgraduates and as a comprehensive guidebook by specialists.
Electron Kinetics And Applications Of Glow Discharges
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Author : Uwe Kortshagen
language : en
Publisher: Springer
Release Date : 2006-04-11
Electron Kinetics And Applications Of Glow Discharges written by Uwe Kortshagen and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-04-11 with Science categories.
This book resulted from the NATO Advanced Research Workshop on “Electron Kinetics and Applications of Glow Discharges,” held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in na- technology, to the traditional fields of gas lasers, and discharge lamps. Consequently, the interest in the physics of glow discharges has experienced yet another resurgence of interest. While the non-equilibrium character of glow discharges is widely accepted, the opinion still prevails that the main features can be captured by fluid models, and that kinetic treatments are only required for the understanding of subtle details. The erroneousness of this belief is demonstrated by the failure of fluid models to describe many basic features of glow discharges such as, for instance, electrode phenomena, striations, and collisionless heating effects. An adequate description of glow discharges thus has to be of kinetic nature.
Encyclopedia Of Plasma Technology Two Volume Set
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Author : J. Leon Shohet
language : en
Publisher: CRC Press
Release Date : 2016-12-12
Encyclopedia Of Plasma Technology Two Volume Set written by J. Leon Shohet and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2016-12-12 with Technology & Engineering categories.
Technical plasmas have a wide range of industrial applications. The Encyclopedia of Plasma Technology covers all aspects of plasma technology from the fundamentals to a range of applications across a large number of industries and disciplines. Topics covered include nanotechnology, solar cell technology, biomedical and clinical applications, electronic materials, sustainability, and clean technologies. The book bridges materials science, industrial chemistry, physics, and engineering, making it a must have for researchers in industry and academia, as well as those working on application-oriented plasma technologies. Also Available Online This Taylor & Francis encyclopedia is also available through online subscription, offering a variety of extra benefits for researchers, students, and librarians, including: Citation tracking and alerts Active reference linking Saved searches and marked lists HTML and PDF format options Contact Taylor and Francis for more information or to inquire about subscription options and print/online combination packages. US: (Tel) 1.888.318.2367; (E-mail) [email protected] International: (Tel) +44 (0) 20 7017 6062; (E-mail) [email protected]
Numerical Simulation Of Radio Frequency Gas Discharges
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Author : Timothy Eric Nitschke
language : en
Publisher:
Release Date : 1995
Numerical Simulation Of Radio Frequency Gas Discharges written by Timothy Eric Nitschke and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with categories.
Sheath Heating In Low Pressure Capacitive Radio Frequency Discharges
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Author : Blake Philip Wood
language : en
Publisher:
Release Date : 1991
Sheath Heating In Low Pressure Capacitive Radio Frequency Discharges written by Blake Philip Wood and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1991 with categories.
Microwave Discharges
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Author : Carlos M. Ferreira
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-11-21
Microwave Discharges written by Carlos M. Ferreira and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-11-21 with Science categories.
Proceedings of a NATO ARW held in Vimeiro, Portugal, May 11-15, 1992
A Plasma Chemistry Study On Global Model For Argon Gas As A Propellant To Electrostatic Gridded Ion Thruster
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Author : Bernardo Vieira Magaldi
language : en
Publisher: Editora Dialética
Release Date : 2024-07-31
A Plasma Chemistry Study On Global Model For Argon Gas As A Propellant To Electrostatic Gridded Ion Thruster written by Bernardo Vieira Magaldi and has been published by Editora Dialética this book supported file pdf, txt, epub, kindle and other format this book has been release on 2024-07-31 with Business & Economics categories.
Electric propulsion optimizes propellant mass and meets new propulsion device demands. These devices adjust satellite orbits and enable long missions. Among various thrusters, electrostatic ones have well-defined physics, simplifying operational parameter optimization. This study developed a global model for an Inductively Coupled Plasma (ICP) cylindrical ion thruster with an output polarized grid system. Argon propellant is injected into the chamber, and ICP plasma is generated by a radiofrequency current. Neutral and excited species are accelerated out by diffusion, while ionized species are accelerated via the polarized grids' electric field. The polarized grid system was optimized for better plasma sheath use. The model considers single and multi-step ionization, the Electron Energy Distribution Function (EEDF), neutral gas, and electron power balance equations. Excited species influence ionization energy, but not ionic density. However, the ion substitution rate increases, essential for thrust and specific impulse. The model determines the neutral gas temperature by considering the power balance and interactions with other species.