Sputtering Materials For Vlsi And Thin Film Devices

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Sputtering Materials For Vlsi And Thin Film Devices
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Author : Jaydeep Sarkar
language : en
Publisher: William Andrew
Release Date : 2010-12-13
Sputtering Materials For Vlsi And Thin Film Devices written by Jaydeep Sarkar and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010-12-13 with Technology & Engineering categories.
An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps that require sputtering of thin films, the properties of thin films and the role of sputtering target performance on overall productivity of various processes. Two unique chapters of this book deal with productivity and troubleshooting issues. The content of the book has been divided into two sections: (a) the first section (Chapter 1 to Chapter 3) has been prepared for the readers from a range of disciplines (e.g. electrical, chemical, chemistry, physics) trying to get an insight into use of sputtered films in various devices (e.g. semiconductor, display, photovoltaic, data storage), basic of sputtering and performance of sputtering target in relation to productivity, and (b) the second section (Chapter 4 to Chapter 8) has been prepared for readers who already have background knowledge of sputter deposition of thin films, materials science principles and interested in the details of sputtering target manufacturing methods, sputtering behavior and thin film properties specific to semiconductor, liquid crystal display, photovoltaic and magnetic data storage applications. In Chapters 5 to 8, a general structure has been used, i.e. a description of the applications of sputtered thin films, sputtering target manufacturing methods (including flow charts), sputtering behavior of targets (e.g. current - voltage relationship, deposition rate) and thin film properties (e.g. microstructure, stresses, electrical properties, in-film particles). While discussing these topics, attempts have been made to include examples from the actual commercial processes to highlight the increased complexity of the commercial processes with the growth of advanced technologies. In addition to personnel working in industry setting, university researchers with advanced knowledge of sputtering would also find discussion of such topics (e.g. attributes of target design, chamber design, target microstructure, sputter surface characteristics, various troubleshooting issues) useful. . - Unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirements - Practical information on technology trends, role of sputtering and major OEMs - Discussion on properties of a wide variety of thin films which include silicides, conductors, diffusion barriers, transparent conducting oxides, magnetic films etc. - Practical case-studies on target performance and troubleshooting - Essential technological information for students, engineers and scientists working in the semiconductor, display, data storage and photovoltaic industry
The Foundations Of Vacuum Coating Technology
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Author : Donald M. Mattox
language : en
Publisher: William Andrew
Release Date : 2018-08-21
The Foundations Of Vacuum Coating Technology written by Donald M. Mattox and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-08-21 with Technology & Engineering categories.
The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries. - History and detailed descriptions of Vacuum Deposition Technologies - Review of Enabling Technologies and their importance to current applications - Extensively referenced text - Patents are referenced as part of the history - Historical Timelines for Vacuum Coating Technology and Vacuum/Plasma Technology - Glossary of Terms for vacuum coating
Coating Materials
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Author : Akarsh Verma
language : en
Publisher: Springer Nature
Release Date : 2023-07-12
Coating Materials written by Akarsh Verma and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2023-07-12 with Technology & Engineering categories.
This book comprehensively reviews assorted types of coatings, their applications, and various strategies employed by several scientists and researchers to fabricate them. Exclusively, the recent progress in computational strategies that are helpful to optimize the best suitable coating formulation before one goes for the real-time fabrication has been discussed in detail. And this book is also intended to shed light on the computational modeling techniques that are used in the characterization of various coating materials. It covers mechanisms, salient features, formulations, important aspects, and case studies of coatings utilized for various applications. The latest research in this area as well as possible avenues of future research is also highlighted to encourage the researchers.
Springer Handbook Of Electronic And Photonic Materials
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Author : Safa Kasap
language : en
Publisher: Springer
Release Date : 2017-10-04
Springer Handbook Of Electronic And Photonic Materials written by Safa Kasap and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-10-04 with Technology & Engineering categories.
The second, updated edition of this essential reference book provides a wealth of detail on a wide range of electronic and photonic materials, starting from fundamentals and building up to advanced topics and applications. Its extensive coverage, with clear illustrations and applications, carefully selected chapter sequencing and logical flow, makes it very different from other electronic materials handbooks. It has been written by professionals in the field and instructors who teach the subject at a university or in corporate laboratories. The Springer Handbook of Electronic and Photonic Materials, second edition, includes practical applications used as examples, details of experimental techniques, useful tables that summarize equations, and, most importantly, properties of various materials, as well as an extensive glossary. Along with significant updates to the content and the references, the second edition includes a number of new chapters such as those covering novel materials and selected applications. This handbook is a valuable resource for graduate students, researchers and practicing professionals working in the area of electronic, optoelectronic and photonic materials.
Electronic Materials Handbook
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Author :
language : en
Publisher: ASM International
Release Date : 1989-11-01
Electronic Materials Handbook written by and has been published by ASM International this book supported file pdf, txt, epub, kindle and other format this book has been release on 1989-11-01 with Technology & Engineering categories.
Volume 1: Packaging is an authoritative reference source of practical information for the design or process engineer who must make informed day-to-day decisions about the materials and processes of microelectronic packaging. Its 117 articles offer the collective knowledge, wisdom, and judgement of 407 microelectronics packaging experts-authors, co-authors, and reviewers-representing 192 companies, universities, laboratories, and other organizations. This is the inaugural volume of ASMAs all-new ElectronicMaterials Handbook series, designed to be the Metals Handbook of electronics technology. In over 65 years of publishing the Metals Handbook, ASM has developed a unique editorial method of compiling large technical reference books. ASMAs access to leading materials technology experts enables to organize these books on an industry consensus basis. Behind every article. Is an author who is a top expert in its specific subject area. This multi-author approach ensures the best, most timely information throughout. Individually selected panels of 5 and 6 peers review each article for technical accuracy, generic point of view, and completeness.Volumes in the Electronic Materials Handbook series are multidisciplinary, to reflect industry practice applied in integrating multiple technology disciplines necessary to any program in advanced electronics. Volume 1: Packaging focusing on the middle level of the electronics technology size spectrum, offers the greatest practical value to the largest and broadest group of users. Future volumes in the series will address topics on larger (integrated electronic assemblies) and smaller (semiconductor materials and devices) size levels.
Vlsi Science And Technology 1984
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Author : Kenneth E. Bean
language : en
Publisher:
Release Date : 1984
Vlsi Science And Technology 1984 written by Kenneth E. Bean and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1984 with Technology & Engineering categories.
Advances In Smart Coatings And Thin Films For Future Industrial And Biomedical Engineering Applications
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Author : Abdel Salam Hamdy Makhlouf
language : en
Publisher: Elsevier
Release Date : 2019-10-25
Advances In Smart Coatings And Thin Films For Future Industrial And Biomedical Engineering Applications written by Abdel Salam Hamdy Makhlouf and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-10-25 with Technology & Engineering categories.
Advances In Smart Coatings And Thin Films For Future Industrial and Biomedical Engineering Applications discusses in detail, the recent trends in designing, fabricating and manufacturing of smart coatings and thin films for future high-tech. industrial applications related to transportation, aerospace and biomedical engineering. Chapters cover fundamental aspects and diverse approaches used to fabricate smart self-healing anti-corrosion coatings, shape-memory coatings, polymeric and nano-bio-ceramic cotings, bio-inspired and stimuli-responsive coatings for smart surfaces with antibacterial activkity and controlled wettability, and electrically conductive coatings and their emerging applications. With the emphasis on advanced methodologies and recent emerging applications of smart multifunctional coatings and thin films, this book is essential reading for materials scientists and rsearchers working in chemical sciences, advanced materials, sensors, pharmaceutical and biomedical engineering. - Discusses the most recent advances and innovations in smart multifunctional coatings and thin films in the transportation, aerospace and biomedical engineering industries - Highlights the synthesis methods, processing, testing and characterization of smart coatings and thin films - Reviews the current prospects and future trends within the industry
Ceramic Thick Films For Mems And Microdevices
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Author : Robert A. Dorey
language : en
Publisher: William Andrew
Release Date : 2011-09-26
Ceramic Thick Films For Mems And Microdevices written by Robert A. Dorey and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-09-26 with Technology & Engineering categories.
The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation and telecommunications – forming the nerve center of products including airbag crash sensors, pressure sensors, biosensors and ink jet printer heads. Part of the MEMS cluster within the Micro & Nano Technologies Series, this book covers the fabrication techniques and applications of thick film piezoelectric micro electromechanical systems (MEMS). It includes examples of applications where the piezoelectric thick films have been used, illustrating how the fabrication process relates to the properties and performance of the resulting device. Other topics include: top-down and bottom-up fabrication of thick film MEMS, integration of thick films with other materials, effect of microstructure on properties, device performance, etc. - Provides detailed guidance on the fabrication techniques and applications of thick film MEMS, for engineers and R&D groups - Written by a single author, this book provides a clear, coherently written guide to this important emerging technology - Covers materials, fabrication and applications in one book
Metal Oxide Nanocomposite Thin Films For Optoelectronic Device Applications
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Author : Rayees Ahmad Zargar
language : en
Publisher: John Wiley & Sons
Release Date : 2023-10-10
Metal Oxide Nanocomposite Thin Films For Optoelectronic Device Applications written by Rayees Ahmad Zargar and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2023-10-10 with Technology & Engineering categories.
METAL OXIDE NANOCOMPOSITE THIN FILMS FOR OPTOELECTRONIC DEVICE APPLICATIONS The book provides insight into the fundamental aspects, latest research, synthesis route development, preparation, and future applications of metal oxide nanocomposite thin films. The fabrication of thin film-based materials is important to the future production of safe, efficient, and affordable energy as the devices convert sunlight into electricity. Thin film devices allow excellent interface engineering for high-performance printable solar cells as their structures are highly reliable and stand-alone systems can provide the required megawatts. They have been used as power sources in solar home systems, remote buildings, water pumping, megawatt-scale power plants, satellites, communications, and space vehicles. Metal Oxide Nanocomposite Thin Films for Optoelectronic Device Applications covers the basics of advanced nanometal oxide-based materials, their synthesis, characterization, and applications, and all the updated information on optoelectronics. Topics discussed include the implications of metal oxide thin films, which are critical for device fabrications. It provides updated information on the economic aspect and toxicity, with great focus paid to display applications, and covers some core areas of nanotechnology, which are particularly concerned with optoelectronics and the available technologies. The book concludes with insights into the role of nanotechnology and the physics behind photovoltaics. Audience The book will be an important volume for electronics and electrical engineers, nanotechnologists, materials scientists, inorganic chemists in academic research, and those in industries, exploring the applications of nanoparticles in semiconductors, power electronics, and more.
Gu As Educativas
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Author : Donald M Mattox
language : es
Publisher: Universidad del Valle
Release Date : 2019-03-26
Gu As Educativas written by Donald M Mattox and has been published by Universidad del Valle this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-03-26 with Technology & Engineering categories.
"Este texto recoge y discute la información, muchas veces dispersa, sobre una serie de cuestiones relativas al desarrollo de recubrimientos-capas delgadas, como son los fundamentos físicos de las técnicas de preparación; sus ventajas e inconvenientes para la preparación de un material determinado en forma de recubrimiento-capa delgada; la influencia de los parámetros del proceso de deposición en los mecanismos de crecimiento y parámetros más críticos a controlar; la influencia de los mecanismos de crecimiento en las propiedades microscópicas de las capas delgadas (composición, morfología, estructura, etc.); el efecto del substrato en las propiedades de crecimiento, y las aplicaciones más importantes de los recubrimientos-capas delgadas. Los capítulos, subdivididos en guías, se desarrollan en torno a cuatro temáticas. Inicialmente se describen los aspectos más generales relacionados con las técnicas de vacío utilizadas en la deposición de capas delgadas, y los fundamentos de las descargas eléctricas en gases, introduciendo el concepto de plasma, recurrente tanto en las técnicas de deposición como en la caracterización de las capas. Asimismo, se tratan los mecanismos de formación de películas continuas. Seguidamente se aborda el estudio de las diversas técnicas de deposición, iniciando con las técnicas de vapor, físicas y químicas, y los parámetros que determinan el crecimiento. La tercera temática tiene que ver con las técnicas de caracterización más comunes utilizadas en el estudio de las propiedades de las capas delgadas, las cuales se utilizan también en el estudio de los materiales masivos, que plantea a su vez otros problemas no tratados aquí. Especial atención merecen las técnicas físico-químicas de caracterización estructural, ya que constituyen herramientas básicas para la investigación de los materiales en capas delgadas. Finalmente, se resume un amplio abanico de aplicaciones de los recubrimientos-capas delgadas en diferentes sectores de la tecnología: mecánico, químico, eléctrico y electrónico, magnético y óptico. En los últimos años, este abanico se ha ido extendiendo de tal manera que puede decirse que no hay campo de actividad donde los recubrimientos-capas delgadas no jueguen cierto papel. Abordar todas estas aplicaciones resulta casi imposible en un tratado de esta naturaleza, por lo que solo se han incluido aquellas de mayor relevancia. Con relación a aplicaciones en alta tecnología, en varias guías se detallan los materiales-capas delgadas y procesos en la manufactura del disco duro (Hard Disk Drive, HDD)."