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Structure And Evolution Of Surfaces Volume 440

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Structure And Evolution Of Surfaces Volume 440

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Author : Robert C. Cammarata
language : en
Publisher:
Release Date : 1997-11-13

Structure And Evolution Of Surfaces Volume 440 written by Robert C. Cammarata and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997-11-13 with Science categories.

This book brings together an interdisciplinary group of surface physicists, chemists and materials scientists to present the most current advances in the area of surface science. Both scientific and technological issues are addressed. Topics include: surface and step structure; morphology, roughness and instabilities; kinetic processes; nucleation on surfaces and interfaces; mechanics of surfaces; self-assembled and Langmuir-Blodgett films; thin-film surfaces and growth; chemistry and modification of surfaces and metal-semiconductor interfaces.

Science And Technology Of Semiconductor Surface Preparation Volume 477

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Author : Gregg S. Hagashi
language : en
Publisher:
Release Date : 1997-09-30

Science And Technology Of Semiconductor Surface Preparation Volume 477 written by Gregg S. Hagashi and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997-09-30 with Technology & Engineering categories.

The focus of semiconductor wafer processing is rapidly changing. Pure device performance is no longer sufficient to ensure a technology's success as IC chips approach 1GB. Yield, reliability, cost and manufacturability are principal drivers of the industry. Great strides have been made in understanding the science and impact of front-end (pre-metal) chemical surface preparations and are beginning to influence the 'real' technology and its evolution. Efforts in understanding particle and metals removal, along with Si surface etching and microroughness are prime examples of areas where work is beginning to pay off together with processes related to the back-end (post-metal). The focus of this book is to report new findings and to discuss surface preparation with an emphasis on gaining a mechanistic understanding of the underlying science upon which the technology is based. Topics include: megasonic cleaning; SC1 technology; surface preparation and gate oxide reliability; CMP/CMP cleaning; post-etch processing; surface microroughness; wet chemical cleaning and gate oxide integrity; analytical studies of surfaces; wet chemical cleaning/etching; dry wafer cleaning; and environmentally friendly processing.

Specimen Preparation For Transmission Electron Microscopy Of Materials Iv

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Author : Ron M. Anderson
language : en
Publisher:
Release Date : 1997

Specimen Preparation For Transmission Electron Microscopy Of Materials Iv written by Ron M. Anderson and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997 with Science categories.

Successful transmission electron microscopy (TEM) experimentation depends on many things, one being specimen preparation. Whereas TEM samples of bulk metallic or ceramic materials can be prepared in a straightforward manner, the need to examine nonbulk and/or other classes of materials creates a need for more specialized preparation methods. This book from MRS, the fourth in a successful series, pioneers novel methods or ways of characterizing the specimen preparation process. Contributions to the book are tutorial in nature, and therefore somewhat longer than usual. Papers cover both general and materials-specific specimen preparation methods. Metallic, polymer, plastic, semiconducting, ceramic and magnetic materials as found in bulk, thin-film, dispersed and powdered forms are discussed.