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Submicron Lithography I

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The Physics Of Submicron Lithography

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Author : Kamil A. Valiev
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06

The Physics Of Submicron Lithography written by Kamil A. Valiev and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Science categories.

This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. The need for this book results from the following considerations. The astonishing achievements in microelectronics are in large part connected with successfully applying the relatively new technology of processing (changing the prop erties of) a material into a device whose component dimensions are submicron, called photolithography. In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer. The smallest dimensions of the device components are limited by the diffraction of the light when the pattern is transferred and are approximately the same as the wavelength of the light. Photolithography by light having a wavelength of A ~ 0.4 flm has made it possible to serially produce integrated circuits having devices whose minimal size is 2-3 flm in the 4 pattern and having 10-105 transistors per circuit.

Submicron Lithography

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Author : Phillip D. Blais
language : en
Publisher:
Release Date : 1982

Submicron Lithography written by Phillip D. Blais and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1982 with Integrated circuits categories.

Submicron Lithography

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Author :
language : en
Publisher:
Release Date : 1982

Submicron Lithography written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1982 with Photolithography categories.

The Physics Of Submicron Lithography

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Author : K.A. Valiev
language : it
Publisher:
Release Date :

The Physics Of Submicron Lithography written by K.A. Valiev and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on with categories.

Lithography For Submicron Structures

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Author :
language : en
Publisher:
Release Date : 1990

Lithography For Submicron Structures written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1990 with Ion beam lithography categories.

Patterning Of Material Layers In Submicron Region

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Author : U. S. Tandon
language : en
Publisher: John Wiley & Sons
Release Date : 1993

Patterning Of Material Layers In Submicron Region written by U. S. Tandon and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 1993 with Technology & Engineering categories.

It invokes the interests of the reader into the wonderland of nanominiaturization for industrial, biological and fundamental applications. Its contents portray the advent and relevance of submicron structures and proffer a perception of materials, modules and schemes for preparing them.