The Physics Of Micro Nano Fabrication
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The Physics Of Micro Nano Fabrication
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Author : Ivor Brodie
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-06-29
The Physics Of Micro Nano Fabrication written by Ivor Brodie and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-06-29 with Science categories.
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
The Physics Of Micro Nano Fabrication
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Author : Brodie
language : en
Publisher:
Release Date : 2009-10-01
The Physics Of Micro Nano Fabrication written by Brodie and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009-10-01 with categories.
Contributions To The Physics Of Micro Nano Fabrication
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Author : JULIUS J. MURAY
language : en
Publisher:
Release Date : 1989
Contributions To The Physics Of Micro Nano Fabrication written by JULIUS J. MURAY and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1989 with categories.
The Physics Of Microfabrication
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Author : Ivor Brodie
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-11-11
The Physics Of Microfabrication written by Ivor Brodie and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-11-11 with Technology & Engineering categories.
The Physical Electronics Department of SRI International (formerly Stanford Research Institute) has been pioneering the development of devices fabricated to submicron tolerances for well over 20 years. In 1961, a landmark paper on electron-beam lithography and its associated technologies was published by K. R. Shoulderst (then at SRI), which set the stage for our subsequent efforts in this field. He had the foresight to believe that the building of such small devices was actually within the range of human capabilities. As a result of this initial momentum, our experience in the technologies associated with microfabrication has become remarkably comprehensive, despite the relatively small size of our research activity. We have frequently been asked to deliver seminars or provide reviews on various aspects of micro fabrication. These activities made us aware of the need for a comprehensive overview of the physics of microfabrication. We hope that this book will fill that need.
Micro And Nanofabrication For Beginners
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Author : Eiichi Kondoh
language : en
Publisher: CRC Press
Release Date : 2022-06-13
Micro And Nanofabrication For Beginners written by Eiichi Kondoh and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2022-06-13 with Science categories.
In this book, the fundamentals of micro- and nanofabrication are described on the basis of the concept of “using gases as a fabrication tool.” Unlike other books available on the subject, this volume assumes only entry-level mathematics, physics, and chemistry of undergraduates or high-school students in science and engineering courses. Necessary theories are plainly explained to help the reader learn about this new attractive field and enable further reading of specialized books. The book is an attractive guide for students, young engineers, and anyone getting involved in micro- and nanofabrication from various fields including physics, electronics, chemistry, and materials sciences.
Micro And Nano Fabrication Technology
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Author : Jiwang Yan
language : en
Publisher: Springer
Release Date : 2018-07-16
Micro And Nano Fabrication Technology written by Jiwang Yan and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-07-16 with Technology & Engineering categories.
This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/material science, optics, physics, chemistry, and more.
Novel Optical Technologies For Nanofabrication
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Author : Qian Liu
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-10-29
Novel Optical Technologies For Nanofabrication written by Qian Liu and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-10-29 with Technology & Engineering categories.
Novel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors’ groups. It focuses on new techniques and methods as well as applications and development trends in laser nanofabrication, including super-resolution laser direct writing, surface structures composed of laser path-guided wrinkle, three-dimensional laser nanofabrication based on two-photon absorption, and nanofabrication by laser interference and surface plasmon polaritons. This book serves as a reference for academic researchers, engineers, technical professionals and graduate students in the fields of micro/nanotechnology, thin film materials, super-resolution optics and laser techniques. Qian Liu is a Professor at Laboratory for Nanodevice, National Center for Nanoscience and Technology, China. Xuanming Duan is a Professor at the Key Laboratory of Functional Crystals and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, China Changsi Peng is a Professor at the Institute of Information Optical Engineering, Soochow University, China.
Micro And Nano Fabrication
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Author : Hans H. Gatzen
language : en
Publisher: Springer
Release Date : 2015-01-02
Micro And Nano Fabrication written by Hans H. Gatzen and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-01-02 with Technology & Engineering categories.
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Laser Micro Nano Manufacturing And 3d Microprinting
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Author : Anming Hu
language : en
Publisher: Springer Nature
Release Date : 2020-11-28
Laser Micro Nano Manufacturing And 3d Microprinting written by Anming Hu and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-11-28 with Science categories.
This book provides a comprehensive overview of the latest advances in laser techniques for micro-nano-manufacturing and an in-depth analysis of applications, such as 3D printing and nanojoining. Lasers have gained increasing significance as a precise tool for advanced manufacturing. Written by world leading scientists, the first part of the book presents the fundamentals of laser interaction with materials at the micro- and nanoscale, including multiphoton excitation and nonthermal melting, and allows readers to better understand advanced processing. In the second part, the authors focus on various advanced fabrications, such as laser peening, surface nanoengineering, and plasmonic heating. Finally, case studies are devoted to special applications, such as 3D printing, microfluidics devices, energy devices, and plasmonic and photonic waveguides. This book integrates both theoretical and experimental analysis. The combination of tutorial chapters and concentrated case studies will be critically attractive to undergraduate and graduate students, researchers, and engineers in the relevant fields. Readers will grasp the full picture of the application of laser for micro-nanomanufacturing and 3D printing.
Nanofabrication
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Author : Zheng Cui
language : en
Publisher: Springer Science & Business Media
Release Date : 2009-01-01
Nanofabrication written by Zheng Cui and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009-01-01 with Technology & Engineering categories.
This book provides the reader with the most up-to-date information and development in the Nanofabrication area. It presents a one-stop description at the introduction level on most of the technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics involved. The book serves as a practical guide and first hand reference for those working in nanostructure fabrication.