Atomic Layer Deposition Ald
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Atomic Layer Deposition For Semiconductors
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Author : Cheol Seong Hwang
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-10-18
Atomic Layer Deposition For Semiconductors written by Cheol Seong Hwang and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-10-18 with Science categories.
Offering thorough coverage of atomic layer deposition (ALD), this book moves from basic chemistry of ALD and modeling of processes to examine ALD in memory, logic devices and machines. Reviews history, operating principles and ALD processes for each device.
Atomic Layer Deposition Ald
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Author : Jeannie Valdez
language : en
Publisher:
Release Date : 2015
Atomic Layer Deposition Ald written by Jeannie Valdez and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015 with TECHNOLOGY & ENGINEERING categories.
Atomic layer deposition (ALD) is a thin film deposition technique used in the mass production of microelectronics. In this book, novel nonvolatile memory devices are discussed. The chapters examine the low-temperature fabrication process of single-crystal platinum non-thin films using plasma-enhanced atomic layer deposition (PEALD). A comprehensive review of ALD surface coatings for battery systems is provided, as well as a theoretical calculation on the mechanism of thermal and plasma-enhanced atomic layer deposition of SiO2; and fluorine doping behavior in Zn-based conducting oxide film grown by ALD.
Atomic Layer Deposition
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Author : Tommi Kääriäinen
language : en
Publisher: John Wiley & Sons
Release Date : 2013-05-28
Atomic Layer Deposition written by Tommi Kääriäinen and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-05-28 with Technology & Engineering categories.
Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.
Chemical Vapor Deposition For Nanotechnology
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Author : Pietro Mandracci
language : en
Publisher: BoD – Books on Demand
Release Date : 2019-01-10
Chemical Vapor Deposition For Nanotechnology written by Pietro Mandracci and has been published by BoD – Books on Demand this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-01-10 with Technology & Engineering categories.
Chemical vapor deposition (CVD) techniques have played a major role in the development of modern technology, and the rise of nanotechnology has further increased their importance, thanks to techniques such as atomic layer deposition (ALD) and vapor liquid solid growth, which are able to control the growth process at the nanoscale. This book aims to contribute to the knowledge of recent developments in CVD technology and its applications. To this aim, important process innovations, such as spatial ALD, direct liquid injection CVD, and electron cyclotron resonance CVD, are presented. Moreover, some of the most recent applications of CVD techniques for the growth of nanomaterials, including graphene, nanofibers, and diamond-like carbon, are described in the book.
Handbook Of Manufacturing Engineering And Technology
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Author : Andrew Y. C. Nee
language : en
Publisher: Springer
Release Date : 2014-10-31
Handbook Of Manufacturing Engineering And Technology written by Andrew Y. C. Nee and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-10-31 with Technology & Engineering categories.
The Springer Reference Work Handbook of Manufacturing Engineering and Technology provides overviews and in-depth and authoritative analyses on the basic and cutting-edge manufacturing technologies and sciences across a broad spectrum of areas. These topics are commonly encountered in industries as well as in academia. Manufacturing engineering curricula across universities are now essential topics covered in major universities worldwide.
Chemical Vapour Deposition
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Author : Anthony C. Jones
language : en
Publisher: Royal Society of Chemistry
Release Date : 2009
Chemical Vapour Deposition written by Anthony C. Jones and has been published by Royal Society of Chemistry this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009 with Science categories.
"The book is one of the most comprehensive overviews ever written on the key aspects of chemical vapour deposition processes and it is more comprehensive, technically detailed and up-to-date than other books on CVD. The contributing authors are all practising CVD technologists and are leading international experts in the field of CVD. It presents a logical and progressive overview of the various aspects of CVD processes. Basic concepts, such as the various types of CVD processes, the design of CVD reactors, reaction modelling and CVD precursor chemistry are covered in the first few"--Jacket
Surface Modification Of Polymers
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Author : Jean Pinson
language : en
Publisher: John Wiley & Sons
Release Date : 2020-02-18
Surface Modification Of Polymers written by Jean Pinson and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-02-18 with Technology & Engineering categories.
A guide to modifying and functionalizing the surfaces of polymers Surface Modification of Polymers is an essential guide to the myriad methods that can be employed to modify and functionalize the surfaces of polymers. The functionalization of polymer surfaces is often required for applications in sensors, membranes, medicinal devices, and others. The contributors?noted experts on the topic?describe the polymer surface in detail and discuss the internal and external factors that influence surface properties. This comprehensive guide to the most important methods for the introduction of new functionalities is an authoritative resource for everyone working in the field. This book explores many applications, including the plasma polymerization technique, organic surface functionalization by initiated chemical vapor deposition, photoinduced functionalization on polymer surfaces, functionalization of polymers by hydrolysis, aminolysis, reduction, oxidation, surface modification of nanoparticles, and many more. Inside, readers will find information on various applications in the biomedical field, food science, and membrane science. This important book: -Offers a range of polymer functionalization methods for biomedical applications, water filtration membranes, and food science -Contains discussions of the key surface modification methods, including plasma and chemical techniques, as well as applications for nanotechnology, environmental filtration, food science, and biomedicine -Includes contributions from a team of international renowned experts Written for polymer chemists, materials scientists, plasma physicists, analytical chemists, surface physicists, and surface chemists, Surface Modification of Polymers offers a comprehensive and application-oriented review of the important functionalization methods with a special focus on biomedical applications, membrane science, and food science.
Organometallic Chemistry
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Author : Nathan J. Patmore
language : en
Publisher: Royal Society of Chemistry
Release Date : 2018-11-28
Organometallic Chemistry written by Nathan J. Patmore and has been published by Royal Society of Chemistry this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-11-28 with Science categories.
With the increase in volume, velocity and variety of information, researchers can find it difficult to keep up to date with the literature in their field. Providing an invaluable resource, this volume contains analysed, evaluated and distilled information on the latest in organometallic chemistry research and emerging fields. The reviews range in scope and include π-coordinated arene metal complexes and catalysis by arene exchange, rylenes as chromophores in catalysts for CO2 photoreduction, metal nodes and metal sites in metal–organic frameworks, developments in molecular precursors for CVD and ALD, and multiphoton luminescence processes in f-element containing compounds.
Precursor Chemistry Of Advanced Materials
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Author : Roland A. Fischer
language : en
Publisher: Springer Science & Business Media
Release Date : 2005-09-29
Precursor Chemistry Of Advanced Materials written by Roland A. Fischer and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-09-29 with Science categories.
Material synthesis by the transformation of organometallic compounds (precursors) by vapor deposition techniques such as chemical vapor deposition (CVD) and atomic layer deposition (ALD) has been in the forefront of modern day research and development of new materials. There exists a need for new routes for designing and synthesizing new precursors as well as the application of established molecular precursors to derive tuneable materials for technological demands. With regard to the precursor chemistry, a most detailed understanding of the mechanistic complexity of materials formation from molecular precursors is very important for further development of new processes and advanced materials. To emphasize and stimulate research in these areas, this volume comprises a selection of case studies covering various key-aspects of the interplay of precursor chemistry with the process conditions of materials formation, particularly looking at the similarities and differences of CVD, ALD and nanoparticle synthesis, e.g. colloid chemistry, involving tailored molecular precursors.
Physics And Chemistry Of Interfaces
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Author : Hans-Jürgen Butt
language : en
Publisher: John Wiley & Sons
Release Date : 2006-03-06
Physics And Chemistry Of Interfaces written by Hans-Jürgen Butt and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-03-06 with Science categories.
Serving as a general introduction to surface and interface science, this book focuses on basic concepts rather than specific details, and on intuitive understanding rather than merely learning facts. The text reflects the fact that the physics and chemistry of surfaces is a diverse area of research that involves classical scientific and engineering disciplines. As such, it discusses fundamental subjects, such as thermodynamics of interfaces, as well as applied topics including wetting, friction, and lubrication. Following an introduction to the most important techniques and methods, readers will be able to apply simple models to their own scientific problems. Furthermore, manifold high end technological applications are shown together with the basic scientific treatment, for example AFM, surface technology, biotechnology, microelectronics, and biomaterials. The book is written with advanced students of chemistry, physics, materials science, chemical engineering and related subjects who have a basic knowledge of natural sciences and mathematics in mind. In addition, scientists and engineers who are not yet specialists in surface science but want to learn more about this important subject will equally benefit.