Development Of Nanoimprint Lithography And Its Applications In Device Fabrication
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Development Of Nanoimprint Lithography And Its Applications In Device Fabrication
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Author : Xing Cheng
language : en
Publisher:
Release Date : 2005
Development Of Nanoimprint Lithography And Its Applications In Device Fabrication written by Xing Cheng and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005 with categories.
Nanoimprint Lithography
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Author : Hongbo Lan
language : en
Publisher: Nova Science Publishers
Release Date : 2011
Nanoimprint Lithography written by Hongbo Lan and has been published by Nova Science Publishers this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011 with Microlithography categories.
Lithography, the fundamental fabrication process of semiconductor devices, has been playing a critical role in micro-nanofabrication technologies and manufacturing of Integrated Circuits (IC). Traditional optical lithography including contact and project photolithography has contributed significantly to the semiconductor device advancements. Currently, maintaining the rapid pace of half-pitch reduction requires overcoming the challenge of improving and extending the incumbent optical projection lithography technology while simultaneously developing alternative, next generation lithography (NGL) technologies to be used when optical projection lithography is no longer more economical than the alternatives. Furthermore, NIL is also one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures as this highly technical book will give new insight to.
Nanofabrication
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Author : Maria Stepanova
language : en
Publisher: Springer Science & Business Media
Release Date : 2011-11-08
Nanofabrication written by Maria Stepanova and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-11-08 with Technology & Engineering categories.
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Nanolithography
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Author : M Feldman
language : en
Publisher: Woodhead Publishing
Release Date : 2014-02-13
Nanolithography written by M Feldman and has been published by Woodhead Publishing this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-02-13 with Technology & Engineering categories.
Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, "What comes next? and "How do we get there?Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the resists used in lithography, the masks (or lack thereof), the metrology needed for nano-features, modeling, and the limitations caused by feature edge roughness. In addition emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics.This book is intended as a guide to the researcher new to this field, reading related journals or facing the complexities of a technical conference. Its goal is to give enough background information to enable such a researcher to understand, and appreciate, new developments in nanolithography, and to go on to make advances of his/her own. - Outlines the current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions - Covers lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography - Describes the emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics
Nanoimprint Lithography An Enabling Process For Nanofabrication
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Author : Weimin Zhou
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-01-04
Nanoimprint Lithography An Enabling Process For Nanofabrication written by Weimin Zhou and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-01-04 with Technology & Engineering categories.
Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It provides the exciting, multidisciplinary field, offering a wide range of topics covering: principles, process, material and application. This book would be of specific interest for researchers and graduate students in the field of nanoscience, nanotechnology and nanofabrication, material, physical, chemical, electric engineering and biology. Dr. Weimin Zhou is an associate professor at Shanghai Nanotechnology Promotion Center, China.
Nanofabrication
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Author : Ampere A. Tseng
language : en
Publisher: World Scientific
Release Date : 2008
Nanofabrication written by Ampere A. Tseng and has been published by World Scientific this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008 with Science categories.
Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students.Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices.
Dissertation Abstracts International
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Author :
language : en
Publisher:
Release Date : 2009
Dissertation Abstracts International written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009 with Dissertations, Academic categories.
Annual Review Of Nano Research
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Author : C. Jeffrey Brinker
language : en
Publisher: World Scientific
Release Date : 2010
Annual Review Of Nano Research written by C. Jeffrey Brinker and has been published by World Scientific this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010 with Science categories.
Annual Review of Nano Research, Volume 3 focuses mainly on nanofabrication, nanomaterials and nanostructures, and energy application of nanomaterials. All the review chapters are contributed by well-published scientists and bring the most recent advancement in selected topics to the readers. This review volume will serve dual purposes: either as an excellent introduction to scientists whose expertise lie in different fields but who are interested in learning about nanotechnology, or as a quick reference for experts active in the field of nanoscience and nanotechnology. Sample Chapter(s). Chapter 1: Nanoscale Biosensors and Biochips (64 KB). Contents: Nanoscale Biosensors and Biochips (W R Leifert et al.); Surface Modifications and Applications of Magnetic and Selective Nonmagnetic Nanoparticles (R Shen & H Yang); Progress in Bionanocomposite Materials (E Ruiz-Hitzky et al.); Mesoporous Silica Nanoparticles: Synthesis and Applications (J L Vivero-Escoto et al.); Nanostructured Mesoporous Materials as Drug Delivery Systems (I Izquierdo-Barba et al.); Chemical Synthesis, Self-Assembly and Applications of Magnetic Nanoparticles (S Peng et al.); Recent Development and Applications of Nanoimprint Technology (X Cheng & L J Guo); Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical-Vapor-Deposition (S Matsui); Dye-Sensitized Solar Cells Based on Nanostructured Zinc Oxide (Q-F Zhang & G-Z Cao); Nanocomposites as High Efficiency Thermoelectric Materials (S J Thiagarajan et al.); Nanostructured Materials for Hydrogen Storage (S Sepehri & G-Z Cao); Recent Advances in the Characterization of Mesoporous Materials by Physical Adsorption (M Thommes). Readership: Research scientists and engineers in academia, research institutes and industry, as well as graduate students and upper-level undergraduate students in the physical sciences and engineering.
New Trends In Alloy Development Characterization And Application
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Author : Zaki Ahmad
language : en
Publisher: BoD – Books on Demand
Release Date : 2015-09-24
New Trends In Alloy Development Characterization And Application written by Zaki Ahmad and has been published by BoD – Books on Demand this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-09-24 with Technology & Engineering categories.
The book explores the new developments that have taken place in recent years in the processing and application of aluminium alloys. The chapter on self diffusion shows a complete detail of the mechanism of diffusion in aluminium alloys and how it affects the strength. The chapter on native oxide films gives useful information on the films developed on commercial magnesium alloys. On the analytical side, the details of Mossbauer spectroscopy related to aluminium alloys fully described. One recent development in aluminium alloys is the controlling of pitting corrosion by the application of superhydrophobic coatings. Complete details of the theory and application of hydrophobicity related to aluminium alloys is shown in the two chapters related to hydrophobicity. It is hoped that this book will be found useful by researchers and general readers in the areas described in the book.
Nanomanufacturing Handbook
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Author : Ahmed Busnaina
language : en
Publisher: CRC Press
Release Date : 2017-12-19
Nanomanufacturing Handbook written by Ahmed Busnaina and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-12-19 with Technology & Engineering categories.
Breakthroughs in nanotechnology have been coming at a rapid pace over the past few years. This was fueled by significant worldwide investments by governments and industry. But if these promising young technologies cannot begin to show commercial viability soon, that funding is in danger of disappearing as investors lose their appetites and the economic and scientific promise of nanotechnology may not be realized. Scrutinizing the barriers to commercial scale-up of nanotechnologies, the Nanomanufacturing Handbook presents a broad survey of the research being done to bring nanotechnology out of the laboratory and into the factory. Current research into nanotechnology focuses on the underlying science, but as this forward-looking handbook points out, the immediate need is for research into scale-up, process robustness, and system integration issues. Taking that message to heart, this book collects cutting-edge research from top experts who examine such topics as surface-programmed assembly, fabrication and applications of single-walled carbon nanotubes (SWNTs) including nanoelectronics, manufacturing nanoelectrical contacts, room-temperature nanoimprint and nanocontact technologies, nanocontacts and switch reliability, defects and surface preparation, and other innovative, application-driven initiatives. In addition to these technical issues, the author provides a survey of the current state of nanomanufacturing in the United States—the first of its kind—and coverage also reaches into patenting nanotechnologies as well as regulatory and societal issues. With timely, authoritative coverage accompanied by numerous illustrations, the Nanomanufacturing Handbook clarifies the current challenges facing industrial-scale nanotechnologies and outlines advanced tools and strategies that will help overcome them.