Ellipsometry And Polarized Light By R M A Azzam And N M Bashara
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Ellipsometry And Polarized Light
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Author : R. M. A. Azzam
language : en
Publisher: North-Holland
Release Date : 1977
Ellipsometry And Polarized Light written by R. M. A. Azzam and has been published by North-Holland this book supported file pdf, txt, epub, kindle and other format this book has been release on 1977 with Science categories.
Ellipsometry is a unique optical technique of great sensitivity for in situ non-destructive characterization of surface (inter-facial) phenomena (reactions) utilizing the change in the state of polarization of a light-wave probe. Although known for almost a century, the use of ellipsometry has increased rapidly in the last two decades. Among the most significant recent developments are new applications, novel and automated instrumentation and techniques for error-free data analysis. This book provides the necessary analytical and experimental tools needed for competent understanding and use of these developments. It is directed to those who are already working in the field and, more importantly, to the newcomer who would otherwise have to sift through several hundred published papers. The authors first present a comprehensive study of the different mathematical representations of polarized light and how such light is processed by optical systems, going on to show how these tools are applied to the analysis of ellipsometer systems. To relate ellipsometric measurements to surface properties, use is then made of electromagnetic theory. Experimental techniques and apparatus are described and the many interesting applications of ellipsometry to surface and thin-film phenomena are reviewed. This reference work is addressed to researchers and students with a strong interest in surface and thin-film physics and optics and their applications. It is a must for libraries in the fields of solid state physics, physical chemistry, electro-chemistry, metallurgy and optical engineering.
Ellipsometry And Polarized Light By R M A Azzam And N M Bashara
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Author : Rasheed M. A. Azzam
language : en
Publisher:
Release Date : 1979
Ellipsometry And Polarized Light By R M A Azzam And N M Bashara written by Rasheed M. A. Azzam and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1979 with categories.
Handbook Of Deposition Technologies For Films And Coatings
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Author : Rointan Framroze Bunshah
language : en
Publisher: William Andrew
Release Date : 1994
Handbook Of Deposition Technologies For Films And Coatings written by Rointan Framroze Bunshah and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994 with Science categories.
This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.
A User S Guide To Ellipsometry
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Author : Harland G. Tompkins
language : en
Publisher: Academic Press
Release Date : 2012-12-02
A User S Guide To Ellipsometry written by Harland G. Tompkins and has been published by Academic Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-02 with Science categories.
This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth. - Allows the user to optimize turn-key operation of ellipsometers and move beyond limited turn-key applications - Provides comprehensive discussion of the measurement of film thickness and optical constants in film - Discusses the trajectories of the ellipsometric parameters Del and Psi and how changes in the materials affect the parameter - Includes 14 case studies to reinforce specific applications - Includes three appendices for helpful references
Ellipsometry At The Nanoscale
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Author : Maria Losurdo
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-03-12
Ellipsometry At The Nanoscale written by Maria Losurdo and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-03-12 with Technology & Engineering categories.
This book presents and introduces ellipsometry in nanoscience and nanotechnology making a bridge between the classical and nanoscale optical behaviour of materials. It delineates the role of the non-destructive and non-invasive optical diagnostics of ellipsometry in improving science and technology of nanomaterials and related processes by illustrating its exploitation, ranging from fundamental studies of the physics and chemistry of nanostructures to the ultimate goal of turnkey manufacturing control. This book is written for a broad readership: materials scientists, researchers, engineers, as well as students and nanotechnology operators who want to deepen their knowledge about both basics and applications of ellipsometry to nanoscale phenomena. It starts as a general introduction for people curious to enter the fields of ellipsometry and polarimetry applied to nanomaterials and progresses to articles by experts on specific fields that span from plasmonics, optics, to semiconductors and flexible electronics. The core belief reflected in this book is that ellipsometry applied at the nanoscale offers new ways of addressing many current needs. The book also explores forward-looking potential applications.
Spectroscopic Ellipsometry
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Author : Hiroyuki Fujiwara
language : en
Publisher: John Wiley & Sons
Release Date : 2007-09-27
Spectroscopic Ellipsometry written by Hiroyuki Fujiwara and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007-09-27 with Technology & Engineering categories.
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
Physical Optics And Light Measurements
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Author :
language : en
Publisher: Academic Press
Release Date : 1989-02-01
Physical Optics And Light Measurements written by and has been published by Academic Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 1989-02-01 with Science categories.
Physical Optics and Light Measurements
Handbook Of Ellipsometry
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Author : Harland Tompkins
language : en
Publisher: William Andrew
Release Date : 2005-01-06
Handbook Of Ellipsometry written by Harland Tompkins and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-01-06 with Science categories.
The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.
Optical Characterization Of Epitaxial Semiconductor Layers
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Author : Günther Bauer
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
Optical Characterization Of Epitaxial Semiconductor Layers written by Günther Bauer and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Science categories.
The characterization of epitaxial layers and their surfaces has benefitted a lot from the enormous progress of optical analysis techniques during the last decade. In particular, the dramatic improvement of the structural quality of semiconductor epilayers and heterostructures results to a great deal from the level of sophistication achieved with such analysis techniques. First of all, optical techniques are nondestructive and their sensitivity has been improved to such an extent that nowadays the epilayer analysis can be performed on layers with thicknesses on the atomic scale. Furthermore, the spatial and temporal resolution have been pushed to such limits that real time observation of surface processes during epitaxial growth is possible with techniques like reflectance difference spectroscopy. Of course, optical spectroscopies complement techniques based on the inter action of electrons with matter, but whereas the latter usually require high or ultrahigh vacuum conditions, the former ones can be applied in different environments as well. This advantage could turn out extremely important for a rather technological point of view, i.e. for the surveillance of modern semiconductor processes. Despite the large potential of techniques based on the interaction of electromagnetic waves with surfaces and epilayers, optical techniques are apparently moving only slowly into this area of technology. One reason for this might be that some prejudices still exist regarding their sensitivity.
Handbook Of Deposition Technologies For Films And Coatings
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Author : Rointan F. Bunshah
language : en
Publisher: William Andrew
Release Date : 1994-12-31
Handbook Of Deposition Technologies For Films And Coatings written by Rointan F. Bunshah and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994-12-31 with Science categories.
This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.