Erosion And Growth Of Solids Stimulated By Atom And Ion Beams
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Erosion And Growth Of Solids Stimulated By Atom And Ion Beams
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Author : G. Kiriakidis
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
Erosion And Growth Of Solids Stimulated By Atom And Ion Beams written by G. Kiriakidis and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Technology & Engineering categories.
The members of the organising Committee and their colleagues have, for many years been investigating the evol ution of the fas'cinating surface features which develop during sputtering erosion of solids. Such experimental, theoretical and computational studies have also been carried out in many international laboratories and, as well as much cow~onality and agreement, substantial disagreements were unresolved. In view of the increasing importance of such processes in technological applications such as microlitho graphic etching for the patterning of solid state devices and in fusion technology it was felt opportune to hold a meeting in this area. Furthermore the use of energetic atomic and ion fluxes is also becoming of increasing importance in assisting or modifying the growth of thin films in a number of important industrial processes and it was therefore rational to combine the, study of both erosional and growth processes in a single meeting. These proceedings include 16 invited review and 15 oral or poster presented contributions to the NATO Advanced Study Institute on the "Erosion and Growth of Solids Stimulated by Atom and Ion Beams". The review contributions span the range from the fundamental concepts of ballistic sputtering, and how this influences surface morphology evolution, through processes involving entrapment of incident species to mechanisms involved in'the use of chemically reactive ion species. Further reviews outline the influence of energetic irradiation upon surface growth by atomic deposition whilst others discuss technologkal applications of both areas of growth and erosion.
Materials Modification By High Fluence Ion Beams
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Author : Roger Kelly
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
Materials Modification By High Fluence Ion Beams written by Roger Kelly and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Technology & Engineering categories.
Proceedings of the NATO Advanced Study Institute on Materials Modification by High-Fluence Ion Beams, Viana do Castelo, Portugal, August 24-September 4, 1987
Low Energy Ion Irradiation Of Materials
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Author : Bernd Rauschenbach
language : en
Publisher: Springer Nature
Release Date : 2022-08-19
Low Energy Ion Irradiation Of Materials written by Bernd Rauschenbach and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2022-08-19 with Technology & Engineering categories.
This book provides a comprehensive introduction to all aspects of low-energy ion–solid interaction from basic principles to advanced applications in materials science. It features a balanced and insightful approach to the fundamentals of the low-energy ion–solid surface interaction, focusing on relevant topics such as interaction potentials, kinetics of binary collisions, ion range, radiation damages, and sputtering. Additionally, the book incorporates key updates reflecting the latest relevant results of modern research on topics such as topography evolution and thin-film deposition under ion bombardment, ion beam figuring and smoothing, generation of nanostructures, and ion beam-controlled glancing angle deposition. Filling a gap of almost 20 years of relevant research activity, this book offers a wealth of information and up-to-date results for graduate students, academic researchers, and industrial scientists working in these areas.
Fundamental Aspects Of Inert Gases In Solids
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Author : S.E. Donnelly
language : en
Publisher: Springer
Release Date : 2013-12-20
Fundamental Aspects Of Inert Gases In Solids written by S.E. Donnelly and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-12-20 with Science categories.
The NATO Advanced Research Workshop on Fundamental Aspects of Inert Gases in Solids, held at Bonas, France from 16-22 September 1990, was the fifth in a series of meetings that have been held in this topic area since 1979. The Consultants' Meeting in that year at Harwell on Rare Gas Behaviour in Metals and Ionic Solids was followed in 1982 by the Jiilich Inter national Symposium on Fundamental Aspects of Helium in Metals. Two smaller meetings have followed-a CECAM organised workshop on Helium Bubbles in Metals was held at Orsay, France in 1986 while in February 1989, a Topical Symposium on Noble Gases in Metals was held in Las Vegas as part of the large TMS/AIME Spring Meeting. As is well known, the dominating feature of inert gas atoms in most solids is their high heat of solution, leading in most situations to an essentially zero solubility and gas-atom precipita tion. In organising the workshop, one particular aim was to target the researchers in the field of inert-gas/solid interactions from three different areas--namely metals, tritides and nuclear fuels-in order to encourage and foster the cross-fertilisation of approaches and ideas. In these three material classes, the behaviour of inert gases in metals has probably been most studied, partly from technological considerations-the effects of helium production via (n, a) reac tions during neutron irradiation are of importance, particularly in a fusion reactor environ ment-and partly from a more fundamental viewpoint.
Beam Processing Technologies
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Author : Norman G. Einspruch
language : en
Publisher: Academic Press
Release Date : 2014-12-01
Beam Processing Technologies written by Norman G. Einspruch and has been published by Academic Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-12-01 with Technology & Engineering categories.
Beam Processing Technologies is a collection of papers that deals with the miniaturization of devices that will be faster, consume less power, and cost less per operation or fabrication. One paper discusses metal oxide semiconductor (MOS) integrated circuit technology including the operation of devices whose lateral and vertical dimensions are scaled down. If the devices' silicon doping profiles are increased by the same scale factor, they can operate on lower voltages and currents, with the same performance. Another paper describes laser beam processing and wafer-scale integration as techniques to increase the number of devices on a silicon chip. Electron beam technologies can be used in many fabrication processes such as in microlithography, selective oxidation, doping, metrology. Ion beam applications depend on the presence of the ion introduced into the device (e.g. implantation doping), on pseudoelastic collisions (e.g. physical sputtering or crystal damage), and on inelastic scattering (e.g. polymer resist exposure). Silicon molecular beam epitaxy (SiMBE) can also grow high-quality layers at low temperature, particularly concerning germanium, especially as reagrds the growth system design and utilization of n- and p-type doping. Chemical beam epitaxy (CBE) is another epitaxial growth technique that can surpass MBE and metal organic chemical vapor deposition (MO-CVD). The collection is suitable chemical engineers, industrial physicists, and researchers whose work involve micro-fabrication and development of integrated circuits.
Chemical Physics Of Thin Film Deposition Processes For Micro And Nano Technologies
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Author : Y. Pauleau
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
Chemical Physics Of Thin Film Deposition Processes For Micro And Nano Technologies written by Y. Pauleau and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Technology & Engineering categories.
An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes. A handbook for engineers and scientists and an introduction for students of microelectronics.
Inis Atomindex
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Author :
language : en
Publisher:
Release Date : 1988
Inis Atomindex written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1988 with Nuclear energy categories.
Proceedings Of The Royal Society Of London
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Author : Royal Society (Great Britain)
language : en
Publisher:
Release Date : 1986
Proceedings Of The Royal Society Of London written by Royal Society (Great Britain) and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1986 with Electronic journals categories.
Publishes research papers in the mathematical and physical sciences. Continued by: Proceedings. Mathematical and physical sciences; and, Proceedings. Mathematical, physical, and engineering sciences.
Kinetics Of Ordering And Growth At Surfaces
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Author : Max G. Lagally
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
Kinetics Of Ordering And Growth At Surfaces written by Max G. Lagally and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Science categories.
This volume contains the papers presented at the NATO Advanced Research Workshop on "Kinetics of Ordering and Growth at Surfaces", held in Acquafredda di Maratea, Italy, September 18-22, 1989. The workshop's goal was to bring together theorists and experimentalists from two related fields, surface science and thin-film growth, to highlight their common interests and overcome a lack of communication between these two communities. Typically surface scientists are only concerned with the microscopic (atomic) description of solids within one monolayer of the surface. Thin-film growers are usually considered more empirical in their approach, concerned primarily with the "quality of their product", and have not necessarily found it useful to incorporate surface science understanding into their art. This workshop aimed to counter at least in some measure these stereotypes. Its focus was on generating dialogue on the fundamental structural and kinetic processes that lead to the initial stages of film growth, from both the surface science and crystal growth perspectives. To achieve this, alternate days emphasized the view of surface science and thin-film growth, with considerable time for discussion, a format that appeared to succeed well. The success of the workshop is in large measure due to the efforts of the organizing committee, L. C. Feldman, P. K. Larsen, J. A. Venables, and J. Villain, whose advice on the constitution of the program was invaluable.
Ion Beam And Annealing Induced Effects In Solid Materials Detected By Nuclear Methods
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Author : Marja Erola
language : en
Publisher:
Release Date : 1988
Ion Beam And Annealing Induced Effects In Solid Materials Detected By Nuclear Methods written by Marja Erola and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1988 with Annealing of metals categories.