Handbook Of Physical Vapor Deposition Pvd Processing
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Handbook Of Physical Vapor Deposition Pvd Processing
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Author : D. M. Mattox
language : en
Publisher: Cambridge University Press
Release Date : 2014-09-19
Handbook Of Physical Vapor Deposition Pvd Processing written by D. M. Mattox and has been published by Cambridge University Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-09-19 with Technology & Engineering categories.
This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.
Handbook Of Physical Vapor Deposition Pvd Processing
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Author : D. M. Mattox
language : en
Publisher:
Release Date : 1998
Handbook Of Physical Vapor Deposition Pvd Processing written by D. M. Mattox and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998 with Physical vapor deposition categories.
This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum te.
The Foundations Of Vacuum Coating Technology
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Author : D. M. Mattox
language : en
Publisher: Springer Science & Business Media
Release Date : 2003
The Foundations Of Vacuum Coating Technology written by D. M. Mattox and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003 with Science categories.
Annotation applications of this technology. With its many references, this book provides a starting point for more in-depth surveys on what has been done as well as more recent work. The author draws comparisons and places the information in the proper context, which is particularly helpful for the patent literature where the terminology used is often not that used by the technical community. A "must" for materials scientists and engineers working with vacuum coating in the invention of new applications and researching patents, plus of special interest to those in the semiconductors field.
Handbook Of Deposition Technologies For Films And Coatings
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Author : Peter M. Martin
language : en
Publisher: William Andrew Pub
Release Date : 2009
Handbook Of Deposition Technologies For Films And Coatings written by Peter M. Martin and has been published by William Andrew Pub this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009 with Technology & Engineering categories.
Recent years have seen a rapid expansion in the applications of advanced thin film coatings in areas including photovoltaics, energy conversion, energy efficiency, biomedical engineering, telecommunications, pharmaceuticals and flat panel displays. In a tough economic climate, surface engineering remains a growth industry, because surface engineered products improve performance, increase energy efficiency, add functionality and reduce costs. This fully updated edition of Handbook of Deposition Technologies for Films and Coatings explores these new applications, and the major advances in deposition processes and technologies that have made them possible. The aim of this handbook is to provide scientists and engineers with detailed and practical information on: Deposition processes for thin film coatings Surface engineering Advanced thin film applications and structures Relationships between deposition process parameters and thin film microstructure Nucleation and thin film growth processes Sculpted thin films Characterization of composition, bonding, and microstructure The role of plasmas in thin film growth In this third edition, extensive new material has been added throughout the book, especially in the areas concerned with plasma assisted vapor deposition processes and metallurgical coating applications. Peter M. Martin gained his PhD in Solid State Physics from Ohio State University and was a Post Doctoral Fellow at Carnegie-Mellon University. Dr Martin has been instrumental in developing patterned optical coatings for optical filtering, microwave shielding, and non-linear optical applications. - Explains in depth the many recent improvements in deposition technologies and applications - Thoroughly explains deposition technologies and their current applications - Discusses the numerous 'frontier areas' for the applications of the products of deposition technology
Handbook Of Thin Film Deposition Processes And Techniques
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Author : Krishna Seshan
language : en
Publisher:
Release Date : 2002
Handbook Of Thin Film Deposition Processes And Techniques written by Krishna Seshan and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2002 with Chemical vapor deposition categories.
The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together physical vapor deposition techniques. Two entirely new areas are focused on: chemical mechanical polishing, which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.
Principles Of Chemical Vapor Deposition
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Author : Daniel Dobkin
language : en
Publisher: Springer Science & Business Media
Release Date : 2003-04-30
Principles Of Chemical Vapor Deposition written by Daniel Dobkin and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003-04-30 with Technology & Engineering categories.
Principles of Chemical Vapor Deposition provides a simple introduction to heat and mass transfer, surface and gas phase chemistry, and plasma discharge characteristics. In addition, the book includes discussions of practical films and reactors to help in the development of better processes and equipment. This book will assist workers new to chemical vapor deposition (CVD) to understand CVD reactors and processes and to comprehend and exploit the literature in the field. The book reviews several disparate fields with which many researchers may have only a passing acquaintance, such as heat and mass transfer, discharge physics, and surface chemistry, focusing on key issues relevant to CVD. The book also examines examples of realistic industrial reactors and processes with simplified analysis to demonstrate how to apply the principles to practical situations. The book does not attempt to exhaustively survey the literature or to intimidate the reader with irrelevant mathematical apparatus. This book is as simple as possible while still retaining the essential physics and chemistry. The book is generously illustrated to assist the reader in forming the mental images which are the basis of understanding.
Handbook Of Sputter Deposition Technology
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Author : Kiyotaka Wasa
language : en
Publisher: William Andrew
Release Date : 2012-12-31
Handbook Of Sputter Deposition Technology written by Kiyotaka Wasa and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-31 with Technology & Engineering categories.
This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. - A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available - All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique - 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere
Semiconductor Radiation Detectors
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Author : Alan Owens
language : en
Publisher: CRC Press
Release Date : 2019-05-31
Semiconductor Radiation Detectors written by Alan Owens and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-05-31 with Science categories.
Choice Recommended Title, July 2020 Bringing together material scattered across many disciplines, Semiconductor Radiation Detectors provides readers with a consolidated source of information on the properties of a wide range of semiconductors; their growth, characterization and the fabrication of radiation sensors with emphasis on the X- and gamma-ray regimes. It explores the promise and limitations of both the traditional and new generation of semiconductors and discusses where the future in semiconductor development and radiation detection may lie. The purpose of this book is two-fold; firstly to serve as a text book for those new to the field of semiconductors and radiation detection and measurement, and secondly as a reference book for established researchers working in related disciplines within physics and engineering. Features: The only comprehensive book covering this topic Fully up-to-date with new developments in the field Provides a wide-ranging source of further reference material
Heterogeneous Photocatalysis
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Author : Giuseppe Marcì
language : en
Publisher: Elsevier
Release Date : 2019-02-21
Heterogeneous Photocatalysis written by Giuseppe Marcì and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-02-21 with Technology & Engineering categories.
Heterogeneous Photocatalysis: Relationships with Heterogeneous Catalysis and Perspectives highlights the differences between thermal-catalysis and photo-catalysis and indicates borderlines, in particular, the possible synergism between them. The book outlines the basic aspect of thermal- and photo-catalysis, along with the most important characterization techniques. In addition, it presents case studies of thermal-catalytic and photo-catalytic or thermal-photo-catalytic reactions and includes a comparison between the results obtained using an inorganic solid as thermal catalyst and photocatalyst for the same reaction, and in the same setup. Final sections offer information on the preparation methods of (photo)catalysts, various techniques used for their characterization, engineering and economical aspects. This book will be a valuable reference source for students and researchers involved in heterogeneous photocatalysis and catalysis, chemistry, chemical engineering, materials science, materials engineering, environment engineering, nanotechnology and green chemistry. - Provides selective methods for the preparation of microcrystalline/nanocrystalline solids or films used in catalytic and photocatalytic processes - Describes (photo)reactions that can be carried out catalytically and/or photocatalytically - Outlines the different mechanisms, yields and experimental conditions under which photocatalytic reactions can take place - Describes various (photo)reactors and set ups under which the photacatalytic reactions can be carried out - Provides an economic assessment to understand the feasibility of some photocatalytic reactions
Labs On Chip
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Author : Eugenio Iannone
language : en
Publisher: CRC Press
Release Date : 2018-09-03
Labs On Chip written by Eugenio Iannone and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-09-03 with Medical categories.
Labs on Chip: Principles, Design and Technology provides a complete reference for the complex field of labs on chip in biotechnology. Merging three main areas— fluid dynamics, monolithic micro- and nanotechnology, and out-of-equilibrium biochemistry—this text integrates coverage of technology issues with strong theoretical explanations of design techniques. Analyzing each subject from basic principles to relevant applications, this book: Describes the biochemical elements required to work on labs on chip Discusses fabrication, microfluidic, and electronic and optical detection techniques Addresses planar technologies, polymer microfabrication, and process scalability to huge volumes Presents a global view of current lab-on-chip research and development Devotes an entire chapter to labs on chip for genetics Summarizing in one source the different technical competencies required, Labs on Chip: Principles, Design and Technology offers valuable guidance for the lab-on-chip design decision-making process, while exploring essential elements of labs on chip useful both to the professional who wants to approach a new field and to the specialist who wants to gain a broader perspective.