Helium Ion Microscopy
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Helium Ion Microscopy
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Author : David C. Joy
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-09-13
Helium Ion Microscopy written by David C. Joy and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-09-13 with Technology & Engineering categories.
Helium Ion Microscopy: Principles and Applications describes the theory and discusses the practical details of why scanning microscopes using beams of light ions – such as the Helium Ion Microscope (HIM) – are destined to become the imaging tools of choice for the 21st century. Topics covered include the principles, operation, and performance of the Gaseous Field Ion Source (GFIS), and a comparison of the optics of ion and electron beam microscopes including their operating conditions, resolution, and signal-to-noise performance. The physical principles of Ion-Induced Secondary Electron (iSE) generation by ions are discussed, and an extensive database of iSE yields for many elements and compounds as a function of incident ion species and its energy is included. Beam damage and charging are frequently outcomes of ion beam irradiation, and techniques to minimize such problems are presented. In addition to imaging, ions beams can be used for the controlled deposition, or removal, of selected materials with nanometer precision. The techniques and conditions required for nanofabrication are discussed and demonstrated. Finally, the problem of performing chemical microanalysis with ion beams is considered. Low energy ions cannot generate X-ray emissions, so alternative techniques such as Rutherford Backscatter Imaging (RBI) or Secondary Ion Mass Spectrometry (SIMS) are examined.
Helium Ion Microscopy
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Author : Gregor Hlawacek
language : en
Publisher: Springer
Release Date : 2016-10-04
Helium Ion Microscopy written by Gregor Hlawacek and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2016-10-04 with Science categories.
This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.
Scanning Ionoluminescence Microscopy With A Helium Ion Microscope
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Author : Thomas Franklin
language : en
Publisher:
Release Date : 2012
Scanning Ionoluminescence Microscopy With A Helium Ion Microscope written by Thomas Franklin and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012 with categories.
The ORIONR PLUS scanning helium ion microscope (HIM) images at sub nanometer resolution. Images of the secondary electron emission have superior resolution and depth of field compared to a scanning electron microscope (SEM). Ionoluminescent imaging is not an area that has been extensively explored by typical ion beam systems as they have large spot sizes in the region of microns, leading to poor spatial resolution. This thesis confirms that the ORIONR PLUS can form images from the ionoluminescent signal, resolutions of 20nm can be obtained for images of bright nanoparticles. Ionoluminescence spectra can also be obtained from some samples. The position of emission peaks in samples under the ORIONR PLUS does not deviate significantly from cathodoluminescence (CL) peaks under SEM. However, the relative heights of the emission peaks in a sample can vary between ionoluminescence (IL) and CL. In addition, It is found that there exists a proportional relationship between acceleration voltage and ionoluminescent signal in the ORIONR PLUS, this relationship is also exhibited in CL. However, when normalised for current and acceleration voltage there appears to be no samples that show greater luminescence under ionoluminescence than cathodoluminescence, with ionoluminescent intensities up to an order of magnitude lower. Ionoluminescence under the ORIONR PLUS is found to be a poor candidate for the analysis of direct band gap semiconductors, this is attributed to the smaller interaction volumes and achievable beam current of the ORIONR PLUS. It is also found that some direct band gap materials are very susceptible to beam damage under the ion beam at beam doses typically used for secondary electron (SE) imaging. It is possible to obtain simultaneous IL and SE images of organic fluorospores in a biological sample. However, the luminescence of the fluorospores was only just sufficient to form images with a 200nm resolution. Rare earth based nanoparticles show brighter luminescence and greater resistance to beam damage than organic fluorospores. If such particles could be utilised for immunofluorescence it would make combined secondary electron and immunofluorescence imaging under the ORIONR PLUS a viable technique.
Special Issue On Diverse Helium Ion Microscopy
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Author : David C. Bell
language : en
Publisher:
Release Date : 2012
Special Issue On Diverse Helium Ion Microscopy written by David C. Bell and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012 with categories.
Material Characterization And Modification Using Helium Ion Microscopy
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Author : Vasilisa Veligura
language : en
Publisher:
Release Date : 2014
Material Characterization And Modification Using Helium Ion Microscopy written by Vasilisa Veligura and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014 with categories.
Helium Ion Microscopy
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Author : Henning Vieker
language : en
Publisher:
Release Date : 2014
Helium Ion Microscopy written by Henning Vieker and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014 with categories.
Field Ion Microscopy
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Author : Erwin W. Müller
language : en
Publisher:
Release Date : 1969
Field Ion Microscopy written by Erwin W. Müller and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1969 with Science categories.
Scanning Ionoluminescence Microscopy With A Helium Ion Microscope
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Author : Thomas M. W. Franklin
language : en
Publisher:
Release Date : 2012
Scanning Ionoluminescence Microscopy With A Helium Ion Microscope written by Thomas M. W. Franklin and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012 with categories.
Imaging With Ions
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Author :
language : en
Publisher:
Release Date : 2014
Imaging With Ions written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014 with categories.
An Atom Probe Field Ion Microscope Study Of The Range And Diffusivity Of Helium In Tungsten
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Author : Alfred Wagner
language : en
Publisher:
Release Date : 1978
An Atom Probe Field Ion Microscope Study Of The Range And Diffusivity Of Helium In Tungsten written by Alfred Wagner and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1978 with Helium ions categories.