Integrated Circuit Metrology Inspection And Process Control Vi
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Integrated Circuit Metrology Inspection And Process Control Vi
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Author : Michael T. Postek
language : en
Publisher: SPIE-International Society for Optical Engineering
Release Date : 1992
Integrated Circuit Metrology Inspection And Process Control Vi written by Michael T. Postek and has been published by SPIE-International Society for Optical Engineering this book supported file pdf, txt, epub, kindle and other format this book has been release on 1992 with Technology & Engineering categories.
Integrated Circuit Metrology Inspection And Process Control
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Author :
language : en
Publisher:
Release Date : 1994
Integrated Circuit Metrology Inspection And Process Control written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994 with Electronic circuit design categories.
Metrology Inspection And Process Control For Microlithography
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Author :
language : en
Publisher:
Release Date : 1996
Metrology Inspection And Process Control For Microlithography written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1996 with Measurement categories.
Adaptive Computing In Design And Manufacture Vi
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Author : I.C. Parmee
language : en
Publisher: Springer Science & Business Media
Release Date : 2011-06-27
Adaptive Computing In Design And Manufacture Vi written by I.C. Parmee and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-06-27 with Computers categories.
The Adaptive Computing in Design and Manufacture conference series has become a well-established, largely application-oriented meeting recognised by several UK Engineering Institutions and the International Society of Genetic and Evolutionary Computing. The main theme of the series relates to the integration of evolutionary and adaptive computing technologies with design and manufacturing processes whilst also taking into account complementary advanced computing technologies. Evolutionary and adaptive computing techniques continue to increase their penetration of industrial and commercial practice as awareness of their powerful search, exploration and optimisation capabilities becomes ever more prevalent, and increasing desk-top computational capability renders stochastic population-based search a far more viable proposition. There has been a significant increase in the development and integration of commercial software tools utilising adaptive computing technologies and the emergence of related commercial research and consultancy organisations supporting the introduction of best practice in terms of industrial utilisation. The book is comprised of selected papers that cover a diverse set of industrial application areas including engineering design and design environments and manufacturing process design, scheduling and control. Various aspects of search, exploration and optimisation are investigated in the context of integration with industrial processes including multi-objective and constraint satisfaction, development and utilization of meta-models, algorithm and strategy development and human-centric evolutionary approaches. The role of agent-based and neural net technologies in terms of supporting search processes and providing an alternative simulation environment is also explored. This collection of papers will be of particular interest to both industrial researchers and practitioners in addition to the academic research communities across engineering, operational research and computer science.
Integrated Circuit Metrology Inspection And Process Control Ii
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Author : Kevin M. Monahan
language : en
Publisher:
Release Date : 1988
Integrated Circuit Metrology Inspection And Process Control Ii written by Kevin M. Monahan and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1988 with Mathematics categories.
Handbook Of Vlsi Microlithography
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Author : John N. Helbert
language : en
Publisher: William Andrew
Release Date : 2001-04-01
Handbook Of Vlsi Microlithography written by John N. Helbert and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001-04-01 with Technology & Engineering categories.
This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatingsùincluding optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely coveredùincluding an entire chapter on resist process defectivity and the potential yield limiting effect on device production.Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.
Handbook Of Vlsi Microlithography 2nd Edition
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Author : John N. Helbert
language : en
Publisher: Cambridge University Press
Release Date : 2001-04
Handbook Of Vlsi Microlithography 2nd Edition written by John N. Helbert and has been published by Cambridge University Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001-04 with Technology & Engineering categories.
This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatingsùincluding optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely coveredùincluding an entire chapter on resist process defectivity and the potential yield limiting effect on device production. Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.
Handbook Of Silicon Semiconductor Metrology
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Author : Alain C. Diebold
language : en
Publisher: CRC Press
Release Date : 2001-06-29
Handbook Of Silicon Semiconductor Metrology written by Alain C. Diebold and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001-06-29 with Technology & Engineering categories.
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay
Analytical And Diagnostic Techniques For Semiconductor Materials Devices And Processes
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Author : Bernd O. Kolbesen (Chemiker.)
language : en
Publisher: The Electrochemical Society
Release Date : 1999
Analytical And Diagnostic Techniques For Semiconductor Materials Devices And Processes written by Bernd O. Kolbesen (Chemiker.) and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999 with Technology & Engineering categories.
Proceedings Of The 4th International Conference On The Industry 4 0 Model For Advanced Manufacturing
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Author : Laszlo Monostori
language : en
Publisher: Springer
Release Date : 2019-04-30
Proceedings Of The 4th International Conference On The Industry 4 0 Model For Advanced Manufacturing written by Laszlo Monostori and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-04-30 with Technology & Engineering categories.
This book gathers the proceedings of the 4th International Conference on the Industry 4.0 Model for Advanced Manufacturing (AMP 2019), held in Belgrade, Serbia, on 3–6 June 2019. The event marks the latest in a series of high-level conferences that bring together experts from academia and industry to exchange knowledge, ideas, experiences, research findings, and information in the field of manufacturing. The book addresses a wide range of topics, including: design of smart and intelligent products, developments in CAD/CAM technologies, rapid prototyping and reverse engineering, multistage manufacturing processes, manufacturing automation in the Industry 4.0 model, cloud-based products, and cyber-physical and reconfigurable manufacturing systems. By providing updates on key issues and highlighting recent advances in manufacturing engineering and technologies, the book supports the transfer of vital knowledge to the next generation of academics and practitioners. Further, it will appealto anyone working or conducting research in this rapidly evolving field.