Internal Electrostatic Transduction Of Micromechanical Resonators

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Internal Electrostatic Transduction Of Micromechanical Resonators

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Author : Maryam Ziaei-Moayyed
language : en
Publisher:
Release Date : 2009

Internal Electrostatic Transduction Of Micromechanical Resonators written by Maryam Ziaei-Moayyed and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009 with categories.

Micromechanical signal processors have a great potential to revolutionize the wireless system architectures by offering a pathway toward full system integration, miniaturization, and lower power consumption. Laterally driven electrostatic micromechanical resonators with high quality factors and frequencies beyond 1GHz have been previously demonstrated. One of the major challenges in the integration of electrostatic MEMS resonators with integrated circuits has been their high motional resistance. Internal electrostatic transduction is introduced as a solution to achieve micromechanical resonators in the radio and microwave frequencies, with low motional resistances, and high quality factors in air. A manufacturable double nanogap process introduced in this thesis allows for fabrication of many high aspect-ratio nano-scale dielectric "gaps" within a single resonator using a combination of lithography and dielectric deposition. Quartz is introduced as a desirable substrate for MEMS resonators, allowing for direct two-port measurements at RF and microwave frequencies. Higher-order mode internally transduced ring resonators are designed, fabricated, and tested in this work. A fifth order dielectrically transduced ring resonator at 1.95GHz is measured on a quartz substrate using direct two-port transmission measurement. The proper placement of dielectric within the resonating structure allowed for a Q of greater than 9000 in air. The concept of serpentine internal electrostatic transduction is introduced, which allows for many capacitances to be transduced in parallel, resulting in a lower motional resistance. The 41st radial bulk mode of a two-port serpentine ring resonator was demonstrated at 2.74 GHz, with a quality factor of 7000 in air. This resonator has a high f x Q product of 1.93x1013, with a low motional resistance of less than 500W. This is the highest f x Q product demonstrated for a polysilicon MEMS resonator in air. This resonator also exhibited the lowest motional resistance demonstrated for an electrostatic polysilicon MEMS resonator in the GHz frequency range. These results demonstrate that internal electrostatic transduction is suitable for the efficient, selective excitation of higher-order lateral bulk modes in resonators. The concept of parallel internal electrostatic transduction is introduced, where a Lamé-mode resonator with integrated electrodes was designed, fabricated, and tested successfully. The integrated electrodes were placed within the resonating plate to efficiently couple to the Lamé mode of resonance, which allows for a fully differential drive/sense scheme. This measurement method allows for lower ohmic losses and helps to suppress the feedthrough significantly. This resonator demonstrated a high quality factor of> 12000 in air at 128.15MHz. Such a high quality factor makes this resonator attractive for different applications. These results validate internal electrostatic transduction of bulk-mode resonators as a viable method for efficient transduction of MEMS resonators in RF and microwave regime. The resonators in this thesis demonstrate the capacity of internal electrostatic transduction to achieve high quality factor, high frequency microresonators with low motional resistance that can be integrated with CMOS technology to achieve fully integrated communication systems.

Electrostatic Transduction For Mems Resonators

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Author : Sunil Ashok Bhave
language : en
Publisher:
Release Date : 2004

Electrostatic Transduction For Mems Resonators written by Sunil Ashok Bhave and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with categories.

The Physics Of Semiconductor Devices

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Author : Rajendra Singh
language : en
Publisher: Springer Nature
Release Date : 2024-05-30

The Physics Of Semiconductor Devices written by Rajendra Singh and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2024-05-30 with Science categories.

This book includes proceedings of the 21st International Workshop on Physics of Semiconductor Devices. The workshop is jointly organized by the Indian Institute of Technology, Delhi, and Solid State Physics Laboratory, Delhi, in collaboration with the Society for Semiconductor Devices and Semiconductor Society of India. This book disseminates the current knowledge of semiconductor physics and its applications across the scientific community. It is based on a biennial workshop that provides the participating research groups with a stimulating platform for interaction and collaboration with colleagues from the same scientific community. The book discusses the latest developments in III-nitrides; materials and devices, compound semiconductors, VLSI technology, optoelectronics, sensors, photovoltaics, crystal growth, epitaxy, and characterization, graphene, and other 2D materials and organic semiconductors. The research articles included in this book are contributed by various eminent scientists from all over the world. The book serves as a reference resource for researchers and practitioners in academia and industry.

Piezoelectric Aluminum Nitride Mems Resonators For Rf Signal Processing

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Author : Philip Jason Stephanou
language : en
Publisher:
Release Date : 2006

Piezoelectric Aluminum Nitride Mems Resonators For Rf Signal Processing written by Philip Jason Stephanou and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006 with categories.

Piezoelectric Aluminum Nitride Vibrating Rf Mems For Radio Front End Technology

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Author : Gianluca Piazza
language : en
Publisher:
Release Date : 2005

Piezoelectric Aluminum Nitride Vibrating Rf Mems For Radio Front End Technology written by Gianluca Piazza and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005 with categories.

Resonant Mems

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Author : Oliver Brand
language : en
Publisher: John Wiley & Sons
Release Date : 2015-06-08

Resonant Mems written by Oliver Brand and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-06-08 with Technology & Engineering categories.

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Mems Mechanical Sensors

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Author : Stephen Beeby
language : en
Publisher: Artech House
Release Date : 2004

Mems Mechanical Sensors written by Stephen Beeby and has been published by Artech House this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with Technology & Engineering categories.

Annotation Engineers and researchers can turn to this reference time and time again when they need to overcome challenges in design, simulation, fabrication, and application of MEMS (microelectromechanical systems) sensors.

Mechanical Design Of Microresonators

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Author : Nicolae Lobontiu
language : en
Publisher: McGraw-Hill Companies
Release Date : 2006

Mechanical Design Of Microresonators written by Nicolae Lobontiu and has been published by McGraw-Hill Companies this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006 with Science categories.

It said to microelectromechanical systems which is design and construction, electric resonators and vibrators.

Biomems

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Author : Simona Badilescu
language : en
Publisher: CRC Press
Release Date : 2016-04-19

Biomems written by Simona Badilescu and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2016-04-19 with Medical categories.

Written to cover often overlooked areas in the field of bioMEMS, this volume bridges topics related to biomolecules and complex biological entities with those directly related to the design, fabrication, and characterization of the devices. Unlike other references, this text aids with the fundamental physicochemical understanding of biological processes relevant to the performance of various biosensing devices. Accessible to seniors and graduate students enrolled in engineering programs, the book includes problems in each chapter as well as case studies to provide real-life examples.

Wireless Telemetry For Gas Turbine Applications

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Author :
language : en
Publisher:
Release Date : 2000

Wireless Telemetry For Gas Turbine Applications written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with categories.

Wireless telemetry technology for transmitting power and data to and from sensors located inside a gas-turbine engine is reviewed. Two scenarios are considered: a rotating sensor hardwired to a shaft-mounted, inductively-coupled system; and a stationary or rotating microsensor telemetry module. Applications of these telemetry scenarios in the gas-turbine operating environment, the types of sensor measurements, the principles of telemetry, and a review of the current state of microfabricated components for telemetry systems are given. Inductive coupling for both data and power transmission is emphasized in the first scenario. The microsensor telemetry module discussed in the second scenario would need battery power or an alternative power source. These technologies are emerging and do not represent available products. A brief list of alternative technologies for providing power is presented at the end.