Piezoelectric Aluminum Nitride Vibrating Rf Mems For Radio Front End Technology
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Piezoelectric Aluminum Nitride Vibrating Rf Mems For Radio Front End Technology
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Author : Gianluca Piazza
language : en
Publisher:
Release Date : 2005
Piezoelectric Aluminum Nitride Vibrating Rf Mems For Radio Front End Technology written by Gianluca Piazza and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005 with categories.
Understanding Mems
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Author : Luis Castañer
language : en
Publisher: John Wiley & Sons
Release Date : 2015-10-02
Understanding Mems written by Luis Castañer and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-10-02 with Technology & Engineering categories.
The continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding graduate population with state-of-the-art expertise. Understanding MEMS: Principles and Applications provides a comprehensive introduction to this complex and multidisciplinary technology that is accessible to senior undergraduate and graduate students from a range of engineering and physical sciences backgrounds. Fully self-contained, this textbook is designed to help students grasp the key principles and operation of MEMS devices and to inspire advanced study or a career in this field. Moreover, with the increasing application areas, product categories and functionality of MEMS, industry professionals will also benefit from this consolidated overview, source of relevant equations and extensive solutions to problems. Key features: Details the fundamentals of MEMS, enabling readers to understand the basic governing equations and know how they apply at the micron scale. Strong pedagogical emphasis enabling students to understand the fundamentals of MEMS devices. Self-contained study aid featuring problems and solutions. Book companion website hosts Matlab and PSpice codes and viewgraphs.
Advanced Functional Piezoelectric Materials And Applications
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Author : Inamuddin
language : en
Publisher: Materials Research Forum LLC
Release Date : 2022-10-05
Advanced Functional Piezoelectric Materials And Applications written by Inamuddin and has been published by Materials Research Forum LLC this book supported file pdf, txt, epub, kindle and other format this book has been release on 2022-10-05 with Technology & Engineering categories.
The book reviews our current knowledge of piezoelectric materials, including their history, developments, properties, process design, and technical applications in such areas as sensors, actuators, power sources, motors, environmental and biomedical domains. Piezoelectric materials will play a crucial role in the development of sustainable energy systems. Keywords: Piezoelectric Materials, Piezo-crystals, Nanogenerators, Phototronics, Piezoelectric Composites, Biomedical Applications, Energy Harvesting, Piezoelectric Thin Films, Piezoelectric Perovskites, Sensor Applications, Piezoelectric Ceramics, Piezoelectric Semiconductors, Piezoelectric Polymers.
Dissertation Abstracts International
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Author :
language : en
Publisher:
Release Date : 2006
Dissertation Abstracts International written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006 with Dissertations, Academic categories.
Solid State Sensors Actuators And Microsystems Workshop 2010
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Author :
language : en
Publisher:
Release Date : 2010
Solid State Sensors Actuators And Microsystems Workshop 2010 written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010 with Actuators categories.
Piezoelectric Mems Resonators
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Author : Harmeet Bhugra
language : en
Publisher: Springer
Release Date : 2017-01-18
Piezoelectric Mems Resonators written by Harmeet Bhugra and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-01-18 with Technology & Engineering categories.
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
High Q Aluminum Nitride Rf Mems Lamb Wave Resonators And Narrowband Filters
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Author : TING-TA YEN
language : en
Publisher:
Release Date : 2012
High Q Aluminum Nitride Rf Mems Lamb Wave Resonators And Narrowband Filters written by TING-TA YEN and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012 with categories.
The increasing demands for higher performance, advanced wireless and mobile communication systems have continuously driven device innovations and system improvements. In order to reduce power consumption and integration complexity, radio frequency (RF) microelectromechanical systems (MEMS) resonators and filters have been considered as direct replacements for off-chip passive components. In this dissertation, a new radio architecture for direct channel selection is explored. The primary elements in this new architecture include a multitude of closely-spaced narrowband filters (i.e., a filter bank) and an array of low-loss RF switches. This work addresses a number of issues related to this modern channel-select RF front end and explores the potential of utilizing piezoelectric aluminum nitride (AlN) resonator technology to fulfill these technical challenges. Characteristic studies of acoustic waves propagating in a piezoelectric thin film suggest the use of high-phase-velocity Lamb wave mode vibration for higher frequency applications. The lowest-order symmetric modes (S0 modes) can be efficiently excited, via the d31 (e31) piezoelectric coefficient, by utilizing interdigital transducer (IDT) electrodes, enabling co-fabrication of devices operating from tens of megahertz up to a few gigahertz on the same chip. An AlN "overhang" fine frequency selection technique is experimentally studied, allowing precise relative frequency control of an array of Lamb wave resonators (LWR) to 0.1%. Experimental results suggest the resonance frequency of Lamb wave resonators can be linearly adjusted by up to 5% with no significant effects on other resonator parameters. The first high temperature testing of AlN Lamb wave resonators above 600°C verifies its potential of being used in a harsh environment sensing telemetry. With a correct AlN/SiO2 thickness ratio, the first-order temperature coefficient of frequency (TCF) of a LWR can be reduced from -25 ppm/K to 3.9 ppm/K. In addition, increasing the input power level from -15 dBm to 10 dBm causes no bifurcation instability or frequency hysteresis on AlN Lamb wave resonators and only 0.05% frequency drift is recorded, showing an excellent power handling capability. A number of different resonator topologies are studied and demonstrated in this work as possible candidates for the filter bank. Mechanically-coupled filters utilize quarter-wavelength coupling beams to eliminate the mass-loading effect to adjoining resonators, and the bandwidths are determined by the equivalent stiffness of the coupling beam and the resonator itself. Numbers of identical resonators are mechanically-coupled as a filter with center frequency at 710 MHz and 0.4% fractional bandwidth (FBW). Furthermore, by introducing AlN overhang selection technique, an array of electrically self-coupled filters are fabricated with evenly-spaced center frequencies around 735 MHz and 500 kHz bandwidths (0.07% FBW). An array of ladder filters with center frequencies around 440 MHz and 2 MHz bandwidths (0.5% FBW) are also demonstrated, without post-process trimming. These closely and evenly spaced AlN Lamb wave filters demonstrate the potential to realize a purely mechanical, high performance, yet low-power RF front-end system. To further improve filter performance, capacitive-piezoelectric Lamb wave resonators, featuring sub-micron air gaps between piezoelectric structural layer and electrodes, are demonstrated with the aim of reducing interface energy dissipation. Quality factors of these capacitive-piezo Lamb wave resonators are measured over 5,000 at 940 MHz, posting the highest reported Q for single AlN resonators using d31 (e31) transduction. The Q * f products above 4.7×10^12 exceed those of commercialized FBAR and SAW resonators. Although the motional impedance of these devices inevitably rises to 1 kilo-ohm; when electrodes are separated from the AlN, this value is still much lower than conventional electrostatic resonators and can be easily terminated with on-chip matching networks. While designing the surface micromachining fabrication process dedicated to these capacitive-piezo devices, a thorough AlN etch rate table including commonly encountered cleaning and wet/dry etch steps is established. Although a large part of this dissertation concerns Lamb wave resonators, the last part of this dissertation focuses on a special corrugated cantilever beam design to improve conversion efficacy of a piezoelectric energy harvester. These vibration-sensitive piezoelectric AlN energy harvesters utilize corrugated cross-section cantilevers to achieve the same energy conversion effectiveness as that in a bimorph beam design, yet using a simple fabrication process similar to that of a unimorph beam. Due to the opposite signs of strains, the generated electric fields above and below the neutral plane have opposite polarities, and the generated energy can be extracted separately without the common cancellation issues encountered in a single piezoelectric beam design. This approach provides superior performance while simultaneously simplifying the fabrication process. A prototype multi-fold device resonating at 853 Hz with output power of 0.17 microwatt under a 1 G acceleration is recorded. Based on superb material properties and the 600°C thermal testing performed on RF resonators, these AlN energy harvesters offer a promising solution to scavenge vibration energies from harsh environments for advanced microsensor systems.
Piezoelectric Energy Harvesting
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Author : Alper Erturk
language : en
Publisher: John Wiley & Sons
Release Date : 2011-04-04
Piezoelectric Energy Harvesting written by Alper Erturk and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-04-04 with Technology & Engineering categories.
The transformation of vibrations into electric energy through the use of piezoelectric devices is an exciting and rapidly developing area of research with a widening range of applications constantly materialising. With Piezoelectric Energy Harvesting, world-leading researchers provide a timely and comprehensive coverage of the electromechanical modelling and applications of piezoelectric energy harvesters. They present principal modelling approaches, synthesizing fundamental material related to mechanical, aerospace, civil, electrical and materials engineering disciplines for vibration-based energy harvesting using piezoelectric transduction. Piezoelectric Energy Harvesting provides the first comprehensive treatment of distributed-parameter electromechanical modelling for piezoelectric energy harvesting with extensive case studies including experimental validations, and is the first book to address modelling of various forms of excitation in piezoelectric energy harvesting, ranging from airflow excitation to moving loads, thus ensuring its relevance to engineers in fields as disparate as aerospace engineering and civil engineering. Coverage includes: Analytical and approximate analytical distributed-parameter electromechanical models with illustrative theoretical case studies as well as extensive experimental validations Several problems of piezoelectric energy harvesting ranging from simple harmonic excitation to random vibrations Details of introducing and modelling piezoelectric coupling for various problems Modelling and exploiting nonlinear dynamics for performance enhancement, supported with experimental verifications Applications ranging from moving load excitation of slender bridges to airflow excitation of aeroelastic sections A review of standard nonlinear energy harvesting circuits with modelling aspects.
Printed Flexible Sensors
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Author : Anindya Nag
language : en
Publisher: Springer
Release Date : 2019-03-11
Printed Flexible Sensors written by Anindya Nag and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-03-11 with Technology & Engineering categories.
This book presents recent advances in the design, fabrication and implementation of flexible printed sensors. It explores a range of materials for developing the electrode and substrate parts of the sensors, on the basis of their electrical and mechanical characteristics. The sensors were processed using laser cutting and 3D printing techniques, and the sensors developed were employed in a number of healthcare, environmental and industrial applications, including: monitoring of physiological movements, respiration, salinity and nitrate measurement, and tactile sensing. The type of sensor selected for each application depended on its dimensions, robustness and sensitivity. The sensors fabricated were also embedded in an IoT-based system, allowing them to be integrated into real-time applications.
Internet Of Things And Data Analytics Handbook
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Author : Hwaiyu Geng
language : en
Publisher: John Wiley & Sons
Release Date : 2017-01-10
Internet Of Things And Data Analytics Handbook written by Hwaiyu Geng and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-01-10 with Technology & Engineering categories.
This book examines the Internet of Things (IoT) and Data Analytics from a technical, application, and business point of view. Internet of Things and Data Analytics Handbook describes essential technical knowledge, building blocks, processes, design principles, implementation, and marketing for IoT projects. It provides readers with knowledge in planning, designing, and implementing IoT projects. The book is written by experts on the subject matter, including international experts from nine countries in the consumer and enterprise fields of IoT. The text starts with an overview and anatomy of IoT, ecosystem of IoT, communication protocols, networking, and available hardware, both present and future applications and transformations, and business models. The text also addresses big data analytics, machine learning, cloud computing, and consideration of sustainability that are essential to be both socially responsible and successful. Design and implementation processes are illustrated with best practices and case studies in action. In addition, the book: Examines cloud computing, data analytics, and sustainability and how they relate to IoT overs the scope of consumer, government, and enterprise applications Includes best practices, business model, and real-world case studies Hwaiyu Geng, P.E., is a consultant with Amica Research (www.AmicaResearch.org, Palo Alto, California), promoting green planning, design, and construction projects. He has had over 40 years of manufacturing and management experience, working with Westinghouse, Applied Materials, Hewlett Packard, and Intel on multi-million high-tech projects. He has written and presented numerous technical papers at international conferences. Mr. Geng, a patent holder, is also the editor/author of Data Center Handbook (Wiley, 2015).