Solid State Sensors Actuators And Microsystems Workshop 2010

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Solid State Sensors Actuators And Microsystems Workshop 2010
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Author :
language : en
Publisher:
Release Date : 2010
Solid State Sensors Actuators And Microsystems Workshop 2010 written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010 with Actuators categories.
Resonant Mems
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Author : Oliver Brand
language : en
Publisher: John Wiley & Sons
Release Date : 2015-04-28
Resonant Mems written by Oliver Brand and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-04-28 with Technology & Engineering categories.
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
Piezoelectric Mems Resonators
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Author : Harmeet Bhugra
language : en
Publisher: Springer
Release Date : 2017-01-09
Piezoelectric Mems Resonators written by Harmeet Bhugra and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-01-09 with Technology & Engineering categories.
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
Silicon Compatible Materials Processes And Technologies For Advanced Integrated Circuits And Emerging Applications
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Author : F. Roozeboom
language : en
Publisher: The Electrochemical Society
Release Date : 2011-04-25
Silicon Compatible Materials Processes And Technologies For Advanced Integrated Circuits And Emerging Applications written by F. Roozeboom and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-04-25 with Science categories.
This issue of ECS Transactions covers emerging materials, process and technology options for large-area silicon wafers to enhance advanced IC performance or to enable revolutionary device structures with entirely new functionalities. Topics : high-mobility channel materials, (e.g. strained Si/Ge, compound semiconductors and graphene), high-performance gate stacks and low-resistivity junctions and contacts on new, Si-compatible materials; new materials and processes for 3-D (TSV) integration ; synthesis of nano-structures including wires, pores and membranes of Si-compatible materials; novel MEMS/NEMS structures and their integration with the mainstream Si-IC technology.
Implantable Biomedical Microsystems
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Author : Swarup Bhunia
language : en
Publisher: Elsevier
Release Date : 2015-01-28
Implantable Biomedical Microsystems written by Swarup Bhunia and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-01-28 with Technology & Engineering categories.
Research and innovation in areas such as circuits, microsystems, packaging, biocompatibility, miniaturization, power supplies, remote control, reliability, and lifespan are leading to a rapid increase in the range of devices and corresponding applications in the field of wearable and implantable biomedical microsystems, which are used for monitoring, diagnosing, and controlling the health conditions of the human body. This book provides comprehensive coverage of the fundamental design principles and validation for implantable microsystems, as well as several major application areas. Each component in an implantable device is described in details, and major case studies demonstrate how these systems can be optimized for specific design objectives. The case studies include applications of implantable neural signal processors, brain-machine interface (BMI) systems intended for both data recording and treatment, neural prosthesis, bladder pressure monitoring for treating urinary incontinence, implantable imaging devices for early detection and diagnosis of diseases as well as electrical conduction block of peripheral nerve for chronic pain management. Implantable Biomedical Microsystems is the first comprehensive coverage of bioimplantable system design providing an invaluable information source for researchers in Biomedical, Electrical, Computer, Systems, and Mechanical Engineering as well as engineers involved in design and development of wearable and implantable bioelectronic devices and, more generally, teams working on low-power microsystems and their corresponding wireless energy and data links. - First time comprehensive coverage of system-level and component-level design and engineering aspects for implantable microsystems. - Provides insight into a wide range of proven applications and application specific design trade-offs of bioimplantable systems, including several major case studies - Enables Engineers involved in development of implantable electronic systems to optimize applications for specific design objectives.
Microelectronics To Nanoelectronics
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Author : Anupama B. Kaul
language : en
Publisher: CRC Press
Release Date : 2017-12-19
Microelectronics To Nanoelectronics written by Anupama B. Kaul and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-12-19 with Science categories.
Composed of contributions from top experts, Microelectronics to Nanoelectronics: Materials, Devices and Manufacturability offers a detailed overview of important recent scientific and technological developments in the rapidly evolving nanoelectronics arena. Under the editorial guidance and technical expertise of noted materials scientist Anupama B. Kaul of California Institute of Technology’s Jet Propulsion Lab, this book captures the ascent of microelectronics into the nanoscale realm. It addresses a wide variety of important scientific and technological issues in nanoelectronics research and development. The book also showcases some key application areas of micro-electro-mechanical-systems (MEMS) that have reached the commercial realm. Capitalizing on Dr. Kaul’s considerable technical experience with micro- and nanotechnologies and her extensive research in prestigious academic and industrial labs, the book offers a fresh perspective on application-driven research in micro- and nanoelectronics, including MEMS. Chapters explore how rapid developments in this area are transitioning from the lab to the market, where new and exciting materials, devices, and manufacturing technologies are revolutionizing the electronics industry. Although many micro- and nanotechnologies still face major scientific and technological challenges and remain within the realm of academic research labs, rapid advances in this area have led to the recent emergence of new applications and markets. This handbook encapsulates that exciting recent progress by providing high-quality content contributed by international experts from academia, leading industrial institutions—such as Hewlett-Packard—and government laboratories including the U.S. Department of Energy’s Sandia National Laboratory. Offering something for everyone, from students to scientists to entrepreneurs, this book showcases the broad spectrum of cutting-edge technologies that show significant promise for electronics and related applications in which nanotechnology plays a key role.
Mems
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Author : Vikas Choudhary
language : en
Publisher: CRC Press
Release Date : 2017-12-19
Mems written by Vikas Choudhary and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-12-19 with Medical categories.
The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.
Mechanical Sciences
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Author : Uday S. Dixit
language : en
Publisher: Springer Nature
Release Date : 2020-07-23
Mechanical Sciences written by Uday S. Dixit and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-07-23 with Technology & Engineering categories.
This book consists of review articles by experts on recent developments in mechanical engineering sciences. The book has been composed to commemorate the Silver Jubilee of the Mechanical Engineering Department, Indian Institute of Technology Guwahati. It includes articles on modern mechanical sciences subjects of advanced simulation techniques and molecular dynamics, microfluidics and microfluidic devices, energy systems, intelligent fabrication, microscale manufacturing, smart materials, computational techniques, robotics and their allied fields. It presents the upcoming and emerging areas in mechanical sciences which will help in formulation of new courses and updating existing curricula. This book will help the academicians and policy makers in the field of engineering education to chart out the desired path for the development of technical education.
Toward Inertial Navigation On Chip
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Author : Haoran Wen
language : en
Publisher: Springer Nature
Release Date : 2019-09-14
Toward Inertial Navigation On Chip written by Haoran Wen and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-09-14 with Technology & Engineering categories.
This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes. Firstly, theoretical and experimental studies of physical phenomena including mode localization, nonlinear behavior, and energy dissipation provide new insights into challenges like quadrature errors and flicker noise in resonator gyroscope systems. Secondly, advanced designs and micro/nano-fabrication methods developed in this work demonstrate valuable applications to a wide range of MEMS/NEMS devices. In particular, the HARPSS+ process platform established in this thesis features a novel slanted nano-gap transducer, which enabled the first wafer-level-packaged single-chip IMU prototype with co-fabricated high-frequency resonant triaxial gyroscopes and high-bandwidth triaxial micro-gravity accelerometers. This prototype demonstrates performance amongst the highest to date, with unmatched robustness and potential for flexible substrate integration and ultra-low-power operation. This thesis shows a path toward future low-power IMU-based applications including wearable inertial sensors, health informatics, and personal inertial navigation.
Whole Angle Mems Gyroscopes
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Author : Doruk Senkal
language : en
Publisher: John Wiley & Sons
Release Date : 2020-06-16
Whole Angle Mems Gyroscopes written by Doruk Senkal and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-06-16 with Technology & Engineering categories.
Presents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which are used in high-precision navigation applications. It explores various energy loss mechanisms and the effect of structural imperfections, along with requirements for continuous rate integrating gyroscope operation. It also provides information on the fabrication of MEMS whole-angle gyroscopes and the best methods of sustaining oscillations. Whole-Angle Gyroscopes: Challenges and Opportunities begins with a brief overview of the two main types of Coriolis Vibratory Gyroscopes (CVGs): non-degenerate mode gyroscopes and degenerate mode gyroscopes. It then introduces readers to the Foucault Pendulum analogy and a review of MEMS whole angle mode gyroscope development. Chapters cover: dynamics of whole-angle coriolis vibratory gyroscopes; fabrication of whole-angle coriolis vibratory gyroscopes; energy loss mechanisms of coriolis vibratory gyroscopes; and control strategies for whole-angle coriolis vibratory gyro- scopes. The book finishes with a chapter on conventionally machined micro-machined gyroscopes, followed by one on micro-wineglass gyroscopes. In addition, the book: Lowers barrier to entry for aspiring scientists and engineers by providing a solid understanding of the fundamentals and control strategies of degenerate mode gyroscopes Organizes mode-matched mechanical gyroscopes based on three classifications: wine-glass, ring/disk, and mass spring mechanical elements Includes case studies on conventionally micro-machined and 3-D micro-machined gyroscopes Whole-Angle Gyroscopes is an ideal book for researchers, scientists, engineers, and college/graduate students involved in the technology. It will also be of great benefit to engineers in control systems, MEMS production, electronics, and semi-conductors who work with inertial sensors.