Low Dielectric Constant Materials Synthesis And Applications In Microelectronics
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Low Dielectric Constant Materials Synthesis And Applications In Microelectronics
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Author : Toh-Ming Lu
language : en
Publisher:
Release Date : 1995
Low Dielectric Constant Materials Synthesis And Applications In Microelectronics written by Toh-Ming Lu and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Technology & Engineering categories.
Low Dielectric Constant Materials
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Author :
language : en
Publisher:
Release Date : 1998
Low Dielectric Constant Materials written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998 with Electric insulators and insulation categories.
Chemical Mechanical Polishing Of Low Dielectric Constant Polymers And Organosilicate Glasses
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Author : Christopher Lyle Borst
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-11-27
Chemical Mechanical Polishing Of Low Dielectric Constant Polymers And Organosilicate Glasses written by Christopher Lyle Borst and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-11-27 with Technology & Engineering categories.
As semiconductor manufacturers implement copper conductors in advanced interconnect schemes, research and development efforts shift toward the selection of an insulator that can take maximum advantage of the lower power and faster signal propagation allowed by copper interconnects. One of the main challenges to integrating a low-dielectric constant (low-kappa) insulator as a replacement for silicon dioxide is the behavior of such materials during the chemical-mechanical planarization (CMP) process used in Damascene patterning. Low-kappa dielectrics tend to be softer and less chemically reactive than silicon dioxide, providing significant challenges to successful removal and planarization of such materials. The focus of this book is to merge the complex CMP models and mechanisms that have evolved in the past decade with recent experimental results with copper and low-kappa CMP to develop a comprehensive mechanism for low- and high-removal-rate processes. The result is a more in-depth look into the fundamental reaction kinetics that alter, selectively consume, and ultimately planarize a multi-material structure during Damascene patterning.
Handbook Of Semiconductor Manufacturing Technology
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Author : Yoshio Nishi
language : en
Publisher: CRC Press
Release Date : 2000-08-09
Handbook Of Semiconductor Manufacturing Technology written by Yoshio Nishi and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000-08-09 with Technology & Engineering categories.
The Handbook of Semiconductor Manufacturing Technology describes the individual processes and manufacturing control, support, and infrastructure technologies of silicon-based integrated-circuit manufacturing, many of which are also applicable for building devices on other semiconductor substrates. Discussing ion implantation, rapid thermal processing, photomask fabrication, chip testing, and plasma etching, the editors explore current and anticipated equipment, devices, materials, and practices of silicon-based manufacturing. The book includes a foreword by Jack S. Kilby, cowinner of the Nobel Prize in Physics 2000 "for his part in the invention of the integrated circuit."
Low Dielectric Constant Materials Synthesis And Applications In Microelectronics
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Author : T. M. Lu
language : en
Publisher:
Release Date : 1995
Low Dielectric Constant Materials Synthesis And Applications In Microelectronics written by T. M. Lu and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Technology & Engineering categories.
Proceedings Of The Thirteenth International Conference On Chemical Vapor Deposition
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Author : Theodore M. Besmann
language : en
Publisher: The Electrochemical Society
Release Date : 1996
Proceedings Of The Thirteenth International Conference On Chemical Vapor Deposition written by Theodore M. Besmann and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 1996 with Science categories.
First International Congress On Adhesion Science And Technology Invited Papers
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Author : van Ooij
language : en
Publisher: CRC Press
Release Date : 2023-03-08
First International Congress On Adhesion Science And Technology Invited Papers written by van Ooij and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2023-03-08 with Science categories.
This Festschrift documents the Proceedings of the First International Congress on Adhesion Science and Technology, held in honor of Dr. Kash Mittal on the occasion of his 50 birthday, in Amsterdam, The Netherlands, October 16-20, 1995. It contains the full accounts of the plenary and invited lectures, which are divided into the following seven part
Low Dielectric Constant Materials Iii Volume 476
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Author : Carlye Case
language : en
Publisher:
Release Date : 1997
Low Dielectric Constant Materials Iii Volume 476 written by Carlye Case and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997 with Technology & Engineering categories.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Dielectric Films For Advanced Microelectronics
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Author : Mikhail Baklanov
language : en
Publisher: John Wiley & Sons
Release Date : 2007-03-19
Dielectric Films For Advanced Microelectronics written by Mikhail Baklanov and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007-03-19 with Science categories.
The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials. This book presents an in-depth overview of the novel developments made by the scientific leaders in the area of modern dielectric films for advanced microelectronic applications. It contains clear, concise explanations of material science of dielectric films and their problem for device operation, including high-k, low-k, medium-k dielectric films and also specific features and requirements for dielectric films used in the packaging technology. A broad range of related topics are covered, from physical principles to design, fabrication, characterization, and applications of novel dielectric films.
Advanced And Emerging Polybenzoxazine Science And Technology
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Author : Hatsuo Ishida
language : en
Publisher: Elsevier
Release Date : 2017-01-18
Advanced And Emerging Polybenzoxazine Science And Technology written by Hatsuo Ishida and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-01-18 with Technology & Engineering categories.
Advanced and Emerging Polybenzoxazine Science and Technology introduces advanced topics of benzoxazine resins and polybenzoxazines as presented through the collaboration of leading experts in the benzoxazine community, representing the authoritative introduction to the subjects. Broad topics covered include the recent development and improved understanding of the subjects, including low temperature cure, aerogels and carbon aerogels, smart chemistry in fire retarding materials and coatings, metal containing benzoxazines, rational design of advanced properties, and materials from natural renew. In the past twenty years, the number of papers on polybenzoxazine has continuously increased at an exponential rate. During the past three years, the number of papers published is more than the previous 17 years combined. The material is now part of only a few successfully commercialized polymers in the past 35 years. Therefore, interest in this material in both academia and industry is very strong. - Includes the latest advancements in benzoxazine chemistry - Describes advanced materials, such as aerogels, carbons, smart coatings, nanofibers, and shape memory materials - Includes additional characterization data and techniques, such as FT-IR, Raman, NMR, DSC, and TGA analyses