Mems And Microsystems
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Mems And Microsystems
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Author : Tai-Ran Hsu
language : en
Publisher: John Wiley & Sons
Release Date : 2020-07-16
Mems And Microsystems written by Tai-Ran Hsu and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-07-16 with Technology & Engineering categories.
Technology/Engineering/Mechanical A bestselling MEMS text...now better than ever. An engineering design approach to Microelectromechanical Systems, MEMS and Microsystems remains the only available text to cover both the electrical and the mechanical aspects of the technology. In the five years since the publication of the first edition, there have been significant changes in the science and technology of miniaturization, including microsystems technology and nanotechnology. In response to the increasing needs of engineers to acquire basic knowledge and experience in these areas, this popular text has been carefully updated, including an entirely new section on the introduction of nanoscale engineering. Following a brief introduction to the history and evolution of nanotechnology, the author covers the fundamentals in the engineering design of nanostructures, including fabrication techniques for producing nanoproducts, engineering design principles in molecular dynamics, and fluid flows and heat transmission in nanoscale substances. Other highlights of the Second Edition include: * Expanded coverage of microfabrication plus assembly and packaging technologies * The introduction of microgyroscopes, miniature microphones, and heat pipes * Design methodologies for thermally actuated multilayered device components * The use of popular SU-8 polymer material Supported by numerous examples, case studies, and applied problems to facilitate understanding and real-world application, the Second Edition will be of significant value for both professionals and senior-level mechanical or electrical engineering students.
Mems And Microsystems
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Author : Tai-Ran Hsu
language : en
Publisher: McGraw-Hill Science, Engineering & Mathematics
Release Date : 2002
Mems And Microsystems written by Tai-Ran Hsu and has been published by McGraw-Hill Science, Engineering & Mathematics this book supported file pdf, txt, epub, kindle and other format this book has been release on 2002 with Computers categories.
Microsystems and MEMS technology is one of the biggest breakthroughs in the area of mechanical and electronic technology in recent years. This is the technology of extremely small and powerful devices, and systems built around them, which have mechanical and electrical components. MEMS technology is expanding rapidly, with major application areas being telecommunications, biomedical technology, manufacturing and robotic systems, transportation and aerospace. Academics are desperate for texts to familiarise future engineers with this broad-ranging technology. This text provides an engineering design approach to MEMS and microsystems which is appropriate for professionals and senior level students. This design approach is conveyed through good examples, cases and applied problems. The book is appropriate for mechanical and aerospace engineers, since it carefully explains the electrical/electronic aspects of the subject. Electrical engineering students will be given strong coverage of the mechanical side of MEMS, something they may not receive elsewhere.
Mems Microsystems
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Author : Tai-Ran Hsu
language : en
Publisher:
Release Date : 2002
Mems Microsystems written by Tai-Ran Hsu and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2002 with Microelectromechanical systems categories.
Microsystems and MEMS technology is one of the biggest breakthroughs in the area of mechanical and electronic technology in recent years. This is the technology of extremely small and powerful devices, and systems built around them, which have mechanical and electrical components. MEMS technology is expanding rapidly, with major application areas being telecommunications, biomedical technology, manufacturing and robotic systems, transportation and aerospace. This text provides an engineering design approach to MEMS and microsystems which is appropriate for professionals and senior level students. This design approach is conveyed through good examples, cases and applied problems. The book is appropriate for mechanical and aerospace engineers, since it carefully explains the electrical/electronic aspects of the subject, while electrical engineering students are given strong coverage of the mechanical side of MEMS.
Mechanics Of Microsystems
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Author : Alberto Corigliano
language : en
Publisher: John Wiley & Sons
Release Date : 2018-04-02
Mechanics Of Microsystems written by Alberto Corigliano and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-04-02 with Technology & Engineering categories.
Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.
Mems Microsystems Design Manufacture
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Author : Hsu
language : en
Publisher: Tata McGraw-Hill Education
Release Date : 2002-08
Mems Microsystems Design Manufacture written by Hsu and has been published by Tata McGraw-Hill Education this book supported file pdf, txt, epub, kindle and other format this book has been release on 2002-08 with Microelectromechanical systems categories.
Optimal Synthesis Methods For Mems
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Author : S.G.K. Ananthasuresh
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
Optimal Synthesis Methods For Mems written by S.G.K. Ananthasuresh and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Technology & Engineering categories.
The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "enabling technology" supporting a variety of products in such diverse areas as mechanical and inertial sensors, optical projection displays, telecommunications equipment, and biology and medicine. Critical to the success of these products is the ability to design them, and this invariably involves detailed modeling of proposed designs. Over the past twenty years, such modeling has become increasingly sophisticated, with full suites of MEMS-oriented computer-aided-design tools now available worldwide. But there is another equally important side to the design process In my own book, Microsystem figuring out what to build in the first place. Design, I chose to emphasize the modeling aspect of design. The task of figuring out what to build was defined by a vague step called "creative thinking." I used practical product examples to illustrate the many subtle characteristics of successful designs, but I made no attempt to systematize the generation ofdesign proposals or optimized designs. That systemization is called "synthesis," which is the subjectofthis book.
Microsystem Design
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Author : Stephen D. Senturia
language : en
Publisher: Springer Science & Business Media
Release Date : 2007-05-08
Microsystem Design written by Stephen D. Senturia and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007-05-08 with Technology & Engineering categories.
It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.
Process Variations In Microsystems Manufacturing
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Author : Michael Huff
language : en
Publisher: Springer Nature
Release Date : 2020-04-09
Process Variations In Microsystems Manufacturing written by Michael Huff and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-04-09 with Technology & Engineering categories.
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.
Smart Sensors And Mems
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Author : S Nihtianov
language : en
Publisher: Woodhead Publishing
Release Date : 2018-03-09
Smart Sensors And Mems written by S Nihtianov and has been published by Woodhead Publishing this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-03-09 with Technology & Engineering categories.
Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS Presents the only book to discuss both smart sensors and MEMS for industrial applications
Mems Packaging
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Author : Tai-Ran Hsu
language : en
Publisher: IET
Release Date : 2004
Mems Packaging written by Tai-Ran Hsu and has been published by IET this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with Technology & Engineering categories.
This book covers the entire spectrum of assembly, packaging and testing of MEMs (microelectro-mechanical systems) and microsystems, from essential enabling technologies to applications in key industries of life sciences, telecommunications and aerospace engineering.