Mems Silicon Oscillating Accelerometers And Readout Circuits
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Mems Silicon Oscillating Accelerometers And Readout Circuits
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Author : Xu, Yong Ping
language : en
Publisher: River Publishers
Release Date : 2019-02-12
Mems Silicon Oscillating Accelerometers And Readout Circuits written by Xu, Yong Ping and has been published by River Publishers this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-02-12 with Technology & Engineering categories.
Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.
Mems Silicon Oscillating Accelerometers And Readout Circuits
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Author : Yong Ping Xu
language : en
Publisher: CRC Press
Release Date : 2022-09-01
Mems Silicon Oscillating Accelerometers And Readout Circuits written by Yong Ping Xu and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2022-09-01 with Technology & Engineering categories.
Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.
Low Noise Readout Circuit For Automotive Mems Accelerometers
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Author : Alice Lanniel
language : en
Publisher:
Release Date : 2023
Low Noise Readout Circuit For Automotive Mems Accelerometers written by Alice Lanniel and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2023 with categories.
Mems Accelerometers
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Author : Mahmoud Rasras
language : en
Publisher: MDPI
Release Date : 2019-05-27
Mems Accelerometers written by Mahmoud Rasras and has been published by MDPI this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-05-27 with Technology & Engineering categories.
Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.
Readout Circuit And Chip Design For A Piezoelectric Mems Accelerometer
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Author : 翁睿佟
language : en
Publisher:
Release Date : 2020
Readout Circuit And Chip Design For A Piezoelectric Mems Accelerometer written by 翁睿佟 and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020 with categories.
The Silicon Oscillating Accelerometer A Mems Inertial Instrument For Strategic Missile Guidance
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Author :
language : en
Publisher:
Release Date : 1998
The Silicon Oscillating Accelerometer A Mems Inertial Instrument For Strategic Missile Guidance written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998 with categories.
The intercontinental ballistic missile (ICBM) and submarine-launched ballistic missiles (SLBM) developed over the past 50 years have employed successive generations of increasingly accurate inertial guidance systems. The comparatively short time of guided flight and high acceleration levels characteristic of the ballistic missile application place a premium on accelerometer performance to achieve desired weapon system accuracy. To date, the accelerometer design of choice for strategic missiles has been the Pendulous Integrating Gyroscopic Accelerometer (PIGA) instrument, an accelerometer whose origins trace back to the German V2 rocket, and has been refined through several generations of development to achieve unsurpassed performance. The specialized technologies of PIGA accelerometers, such as gas bearing wheels, ultra-stable ball bearings, precision electromagnetic components, and "designer chemical" flotation fluids require a costly support infrastructure for production and system life-cycle maintenance. The Draper Laboratory is currently in the process of developing the Silicon Oscillating Accelerometer (SOA) a MEMS-based sensor that has the potential to achieve the ppm/ug performance stability required of the strategic missile application. The Microelectromechanical System (MEMS) technology is inherently low cost and offers a rapidly expanding commercial business base to leverage and sustain accelerometer production and deployment in next generation guidance systems.
Design Manufacturing And Mechatronics Proceedings Of The International Conference On Design Manufacturing And Mechatronics Icdmm2016
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Author : A Mehran Shahhosseini
language : en
Publisher: World Scientific
Release Date : 2016-12-29
Design Manufacturing And Mechatronics Proceedings Of The International Conference On Design Manufacturing And Mechatronics Icdmm2016 written by A Mehran Shahhosseini and has been published by World Scientific this book supported file pdf, txt, epub, kindle and other format this book has been release on 2016-12-29 with Technology & Engineering categories.
The 3rd Annual International Conference on Design, Manufacturing and Mechatronics (ICDMM2016) was successfully held in Wuhan, China in 2016.The ICDMM2016 covers a wide range of fundamental studies, technical innovations and industrial applications in industry design, manufacturing and mechatronics. The ICDMM2016 program consists of 4 keynote speeches, 96 oral and poster presentations. We were pleased to have more than 80 participants from China, South Korea, Taiwan, Japan, Malaysia, and Saudi Arabia. However, finally, only 83 articles were selected after peer review to be included in this proceedings.
Sensing And Control Of Mems Accelerometers Using Kalman Filter
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Author : Kai Zhang
language : en
Publisher:
Release Date : 2010
Sensing And Control Of Mems Accelerometers Using Kalman Filter written by Kai Zhang and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010 with Accelerometers categories.
Surface micromachined low-capacitance MEMS capacitive accelerometers which integrated CMOS readout circuit generally have a noise above 0.02g. Force-to-rebalance feedback control that is commonly used in MEMS accelerometers can improve the performances of accelerometers such as increasing their stability, bandwidth and dynamic range. However, the controller also increases the noise floor. There are two major sources of the noise in MEMS accelerometer. They are electronic noise from the CMOS readout circuit and thermal-mechanical Brownian noise caused by damping. Kalman filter is an effective solution to the problem of reducing the effects of the noises through estimating and canceling the states contaminated by noise. The design and implementation of a Kalman filter for a MEMS capacitive accelerometer is presented in the thesis in order to filter out the noise mentioned above while keeping its good performance under feedback control. The dynamic modeling of the MEMS accelerometer system and the controller design based on the model are elaborated in the thesis. Simulation results show the Kalman filter gives an excellent noise reduction, increases the dynamic range of the accelerometer, and reduces the displacement of the mass under a closed-loop structure.
Mems
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Author : Mohamed Gad-el-Hak
language : en
Publisher: CRC Press
Release Date : 2005-11-29
Mems written by Mohamed Gad-el-Hak and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-11-29 with Technology & Engineering categories.
As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection
A Low Power Readout Circuit For A Tri Axial Piezoelectric Mems Accelerometer
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Author :
language : en
Publisher:
Release Date : 2022
A Low Power Readout Circuit For A Tri Axial Piezoelectric Mems Accelerometer written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2022 with categories.