Micro And Nano Fabrication Technology
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Micro And Nano Fabrication Technology
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Author : Jiwang Yan
language : en
Publisher: Springer
Release Date : 2018-07-16
Micro And Nano Fabrication Technology written by Jiwang Yan and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-07-16 with Technology & Engineering categories.
This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/material science, optics, physics, chemistry, and more.
Micro And Nano Fabrication
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Author : Hans H. Gatzen
language : en
Publisher: Springer
Release Date : 2015-01-02
Micro And Nano Fabrication written by Hans H. Gatzen and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-01-02 with Technology & Engineering categories.
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
The Physics Of Micro Nano Fabrication
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Author : Ivor Brodie
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-06-29
The Physics Of Micro Nano Fabrication written by Ivor Brodie and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-06-29 with Science categories.
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
Micro Nanofabrication
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Author : Zheng Cui
language : en
Publisher: Springer
Release Date : 2006-03-14
Micro Nanofabrication written by Zheng Cui and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-03-14 with Technology & Engineering categories.
The book is a collection of the author’s years of experience and research findings, as well as the latest development, in micro-nanofabrication technologies. It gives a detailed introduction on the basics of micro-nanofabrication, including optical lithography, electron beam lithography, focused ion beam technique, X-ray lithography, various etching and replication techniques. For each of the fabrication technology it introduces, the emphasis is on clear explanation of the basic principle, the essential steps in the processes, various process conditions and typical process parameters. The advantages and disadvantages of each technique are also analysed. The applications of micro-nanofabrication technologies focus on manufacturing of very large scale integrated circuits (VLSI), nanoelectronics, optoelectronics, high density magnetic storage, micro-electro-mechanical system or MEMS, biochip or lab-on-chip and nanotechnology. Each of the applications is accompanied by practical examples to demonstrate how particular fabrication techniques are applied. There is an extensive list of references following each chapter for readers to explore further. The book is not only a good supplementary reading material for university undergraduates or postgraduates who are novices in this field, but also a good reference book for experienced engineering professionals who wish to know other fabrication techniques outside their own field.
Manufacturing Techniques For Microfabrication And Nanotechnology
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Author : Marc J. Madou
language : en
Publisher: CRC Press
Release Date : 2011-06-13
Manufacturing Techniques For Microfabrication And Nanotechnology written by Marc J. Madou and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-06-13 with Technology & Engineering categories.
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Nano And Microfabrication For Industrial And Biomedical Applications
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Author : Regina Luttge
language : en
Publisher: William Andrew
Release Date : 2016-06-12
Nano And Microfabrication For Industrial And Biomedical Applications written by Regina Luttge and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2016-06-12 with Technology & Engineering categories.
Nano- and Microfabrication for Industrial and Biomedical Applications, Second Edition, focuses on the industrial perspective on micro- and nanofabrication methods, including large-scale manufacturing, the transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. The book gives a history of miniaturization and micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. In this second edition, a new focus area is nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems. In addition, new material covers lithographic mould fabrication for soft-lithography, nanolithography techniques, corner lithography, advances in nanosensing, and the developing field of advanced functional materials. Luttge also explores the view that micro- and nanofabrication will be the key driver for a "tech-revolution" in biology and medical research that includes a new case study that covers the developing organ-on-chip concept. Presents an interdisciplinary approach that makes micro/nanofabrication accessible equally to engineers and those with a life science background, both in academic settings and commercial R&D Provides readers with guidelines for assessing the commercial potential of any new technology based on micro/nanofabrication, thus reducing the investment risk Updated edition presents nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems
Advanced Micro And Nano Manufacturing Technologies
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Author : Shrikrishna Nandkishor Joshi
language : en
Publisher: Springer Nature
Release Date : 2021-10-01
Advanced Micro And Nano Manufacturing Technologies written by Shrikrishna Nandkishor Joshi and has been published by Springer Nature this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021-10-01 with Technology & Engineering categories.
This volume focuses on the fundamentals and advancements in micro and nanomanufacturing technologies applied in the biomedical and biochemical domain. The contents of this volume provide comprehensive coverage of the physical principles of advanced manufacturing technologies and the know-how of their applications in the fabrication of biomedical devices and systems. The book begins by documenting the journey of miniaturization and micro-and nano-fabrication. It then delves into the fundamentals of various advanced technologies such as micro-wire moulding, 3D printing, lithography, imprinting, direct laser machining, and laser-induced plasma-assisted machining. It also covers laser-based technologies which are a promising option due to their flexibility, ease in control and application, high precision, and availability. These technologies can be employed to process several materials such as glass, polymers: polycarbonate, polydimethylsiloxane, polymethylmethacrylate, and metals such as stainless steel, which are commonly used in the fabrication of biomedical devices, such as microfluidic technology, optical and fiber-optic sensors, and electro-chemical bio-sensors. It also discusses advancements in various MEMS/NEMS based technologies and their applications in energy conversion and storage devices. The chapters are written by experts from the fields of micro- and nano-manufacturing, materials engineering, nano-biotechnology, and end-users such as clinicians, engineers, academicians of interdisciplinary background. This book will be a useful guide for academia and industry alike.
Micro And Nanomanufacturing Volume Ii
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Author : Mark J. Jackson
language : en
Publisher: Springer
Release Date : 2017-10-28
Micro And Nanomanufacturing Volume Ii written by Mark J. Jackson and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-10-28 with Technology & Engineering categories.
This book is a comprehensive treatment of micro and nanofabrication techniques, and applies established and research laboratory manufacturing techniques to a wide variety of materials. It is a companion volume to “Micro and Nanomanufacturing” (2007) and covers new topics such as aligned nanowire growth, molecular dynamics simulation of nanomaterials, atomic force microscopy for microbial cell surfaces, 3D printing of pharmaceuticals, microvascular coaptation methods, and more. The chapters also cover a wide variety of applications in areas such as surgery, auto components, living cell detection, dentistry, nanoparticles in medicine, and aerospace components. This is an ideal text for professionals working in the field, and for graduate students in micro and nanomanufacturing courses.
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Author : 崔铮
language : en
Publisher:
Release Date : 2005
written by 崔铮 and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005 with Microtechnology categories.
Talks about the developments in micro-nanofabrication technologies. This book gives an introduction on the basics of micro-nanofabrication, including optical lithography, electron beam lithography, focused ion beam technique, X-ray lithography, various etching and replication techniques. It serves as a reference book for engineering professionals.
Micro Nano Integrated Fabrication Technology And Its Applications In Microenergy Harvesting
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Author : Xiao-Sheng Zhang
language : en
Publisher: Springer
Release Date : 2015-12-01
Micro Nano Integrated Fabrication Technology And Its Applications In Microenergy Harvesting written by Xiao-Sheng Zhang and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-12-01 with Technology & Engineering categories.
This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem.