Micromachining And Microfabrication Process Technology Vi
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Micromachining And Microfabrication Process Technology
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Author :
language : en
Publisher:
Release Date : 2005
Micromachining And Microfabrication Process Technology written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005 with Micromechanics categories.
Micromachining And Microfabrication Process Technology Vi
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Author : Jean-Michel Karam
language : en
Publisher: SPIE-International Society for Optical Engineering
Release Date : 2000
Micromachining And Microfabrication Process Technology Vi written by Jean-Michel Karam and has been published by SPIE-International Society for Optical Engineering this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with Technology & Engineering categories.
Materials Process Integration For Mems
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Author : Francis E. H. Tay
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-06-29
Materials Process Integration For Mems written by Francis E. H. Tay and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-06-29 with Technology & Engineering categories.
The field of materials and process integration for MEMS research has an extensive past as well as a long and promising future. Researchers, academicians and engineers from around the world are increasingly devoting their efforts on the materials and process integration issues and opportunities in MEMS devices. These efforts are crucial to sustain the long-term growth of the MEMS field. The commercial MEMS community is heavily driven by the push for profitable and sustainable products. In the course of establishing high volume and low-cost production processes, the critical importance of materials properties, behaviors, reliability, reproducibility, and predictability, as well as process integration of compatible materials systems become apparent. Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures. One of the most common techniques is bulk micromachining, by which micromechanical structures are created by etching into the bulk of the substrates with either anisotropic etching with strong alk:ali solution or deep reactive-ion etching (DRIB). The second common technique is surface micromachining, by which planar microstructures are created by sequential deposition and etching of thin films on the surface of the substrate, followed by a fmal removal of sacrificial layers to release suspended structures. Other techniques include deep lithography and plating to create metal structures with high aspect ratios (LIGA), micro electrodischarge machining (J.
Microfabricated Systems And Mems Vi
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Author : Peter J. Hesketh
language : en
Publisher: The Electrochemical Society
Release Date : 2002
Microfabricated Systems And Mems Vi written by Peter J. Hesketh and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2002 with Microelectromechanical systems categories.
Microfabricated Systems And Mems
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Author :
language : en
Publisher:
Release Date : 2000
Microfabricated Systems And Mems written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with Microelectronics categories.
Hybrid Micro Machining Processes
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Author : Sumit Bhowmik
language : en
Publisher: Springer
Release Date : 2019-02-09
Hybrid Micro Machining Processes written by Sumit Bhowmik and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-02-09 with Technology & Engineering categories.
This book presents some of the recent hybrid micro-machining processes used to manufacture miniaturized products with micro level precision. The current developed technologies to manufacture the micro dimensioned products while meeting the desired precision level are described within the text. The authors especially highlight research that focuses on the development of new micro machining platforms while integrating the different technologies to manufacture the micro components in a high throughput and cost effective manner.
Micro And Nano Fabrication
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Author : Hans H. Gatzen
language : en
Publisher: Springer
Release Date : 2015-01-02
Micro And Nano Fabrication written by Hans H. Gatzen and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-01-02 with Technology & Engineering categories.
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Wafer Bonding
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Author : Marin Alexe
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-03-09
Wafer Bonding written by Marin Alexe and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-03-09 with Science categories.
During the past decade direct wafer bonding has developed into a mature materials integration technology. This book presents state-of-the-art reviews of the most important applications of wafer bonding written by experts from industry and academia. The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.
Springer Handbook Of Nanotechnology
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Author : Bharat Bhushan
language : en
Publisher: Springer Science & Business Media
Release Date : 2004-01-19
Springer Handbook Of Nanotechnology written by Bharat Bhushan and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004-01-19 with Technology & Engineering categories.
This major work has established itself as the definitive reference in the nanoscience and nanotechnology area in one volume. In presents nanostructures, micro/nanofabrication, and micro/nanodevices. Special emphasis is on scanning probe microscopy, nanotribology and nanomechanics, molecularly thick films, industrial applications and microdevice reliability, and on social aspects. Reflecting further developments, the new edition has grown from six to eight parts. The latest information is added to fields such as bionanotechnology, nanorobotics, and NEMS/MEMS reliability. This classic reference book is orchestrated by a highly experienced editor and written by a team of distinguished experts for those learning about the field of nanotechnology.
Initiatives Of Precision Engineering At The Beginning Of A Millennium
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Author : Ichiro Inasaki
language : en
Publisher: Springer Science & Business Media
Release Date : 2007-05-08
Initiatives Of Precision Engineering At The Beginning Of A Millennium written by Ichiro Inasaki and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007-05-08 with Science categories.
Faced with ever-increasing market demands, manufacturing industry is forced to seek innovation and technological breakthrough. This state-of-the-art text aims to integrate broad aspects of precision and production engineering to cope with rapid changes in market needs and technological developments as we enter the 21st century. It addresses basic theory, extensive research in advanced topics, industrial applications, and relevant surveys in related fields. Major subjects covered by this book include: Advanced manufacturing systems; Ultra-precision machining and micro machining; Nanotechnology for fabrication and measurement; Chemo-mechanical processes; Rapid prototyping technology; New materials and advanced processes; Computer-aided production engineering; Manufacturing process control; Planning. This volume contains the proceedings of the 10th International Conference on Precision Engineering (ICPE), which was held in July 2001, in Yokohama, Japan. ICPE is a well-established conference in the field of production and precision engineering, covering a wide range of topics for future-oriented manufacturing systems and processes; it is organized by the Japan Society for Precision Engineering (JSPE). This book can be used as a reference for graduate and undergraduate courses in precision and production engineering, and also for researchers and industrial engineers to capture current trends in this field.