Micromachining And Microfabrication Process Technology
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Micromachining And Microfabrication Process Technology
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Author :
language : en
Publisher:
Release Date : 2005
Micromachining And Microfabrication Process Technology written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005 with Micromechanics categories.
Micromachining And Microfabrication Process Technology And Devices
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Author : Norman C. Tien
language : en
Publisher: SPIE-International Society for Optical Engineering
Release Date : 2001
Micromachining And Microfabrication Process Technology And Devices written by Norman C. Tien and has been published by SPIE-International Society for Optical Engineering this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001 with Technology & Engineering categories.
Micromachining Techniques For Fabrication Of Micro And Nano Structures
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Author : Mojtaba Kahrizi
language : en
Publisher: BoD – Books on Demand
Release Date : 2012-02-03
Micromachining Techniques For Fabrication Of Micro And Nano Structures written by Mojtaba Kahrizi and has been published by BoD – Books on Demand this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-02-03 with Science categories.
Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry.
Fundamentals Of Microfabrication And Nanotechnology Three Volume Set
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Author : Marc J. Madou
language : en
Publisher: CRC Press
Release Date : 2018-12-14
Fundamentals Of Microfabrication And Nanotechnology Three Volume Set written by Marc J. Madou and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-12-14 with Technology & Engineering categories.
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
Microfabricated Systems And Mems
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Author :
language : en
Publisher:
Release Date : 2000
Microfabricated Systems And Mems written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with Microelectronics categories.
Micromachining And Microfabrication Process Technology And Devices
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Author : Norman C. Tien
language : en
Publisher:
Release Date : 2001
Micromachining And Microfabrication Process Technology And Devices written by Norman C. Tien and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001 with Electromechanical devices categories.
Materials Process Integration For Mems
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Author : Francis E. H. Tay
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-06-29
Materials Process Integration For Mems written by Francis E. H. Tay and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-06-29 with Technology & Engineering categories.
The field of materials and process integration for MEMS research has an extensive past as well as a long and promising future. Researchers, academicians and engineers from around the world are increasingly devoting their efforts on the materials and process integration issues and opportunities in MEMS devices. These efforts are crucial to sustain the long-term growth of the MEMS field. The commercial MEMS community is heavily driven by the push for profitable and sustainable products. In the course of establishing high volume and low-cost production processes, the critical importance of materials properties, behaviors, reliability, reproducibility, and predictability, as well as process integration of compatible materials systems become apparent. Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures. One of the most common techniques is bulk micromachining, by which micromechanical structures are created by etching into the bulk of the substrates with either anisotropic etching with strong alk:ali solution or deep reactive-ion etching (DRIB). The second common technique is surface micromachining, by which planar microstructures are created by sequential deposition and etching of thin films on the surface of the substrate, followed by a fmal removal of sacrificial layers to release suspended structures. Other techniques include deep lithography and plating to create metal structures with high aspect ratios (LIGA), micro electrodischarge machining (J.
Hybrid Micro Machining Processes
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Author : Sumit Bhowmik
language : en
Publisher: Springer
Release Date : 2019-02-09
Hybrid Micro Machining Processes written by Sumit Bhowmik and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-02-09 with Technology & Engineering categories.
This book presents some of the recent hybrid micro-machining processes used to manufacture miniaturized products with micro level precision. The current developed technologies to manufacture the micro dimensioned products while meeting the desired precision level are described within the text. The authors especially highlight research that focuses on the development of new micro machining platforms while integrating the different technologies to manufacture the micro components in a high throughput and cost effective manner.
Microfabricated Systems And Mems V
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Author :
language : en
Publisher: The Electrochemical Society
Release Date : 2000
Microfabricated Systems And Mems V written by and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with Technology & Engineering categories.
Micromachining And Microfabrication Process Technology Vi
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Author : Jean-Michel Karam
language : en
Publisher: SPIE-International Society for Optical Engineering
Release Date : 2000
Micromachining And Microfabrication Process Technology Vi written by Jean-Michel Karam and has been published by SPIE-International Society for Optical Engineering this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with Technology & Engineering categories.