Micromachining And Microfabrication Process Technology And Devices
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Micromachining And Microfabrication Process Technology And Devices
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Author : Norman C. Tien
language : en
Publisher: SPIE-International Society for Optical Engineering
Release Date : 2001
Micromachining And Microfabrication Process Technology And Devices written by Norman C. Tien and has been published by SPIE-International Society for Optical Engineering this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001 with Technology & Engineering categories.
Micromachining And Microfabrication Process Technology
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Author :
language : en
Publisher:
Release Date : 2005
Micromachining And Microfabrication Process Technology written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005 with Micromechanics categories.
Micro Manufacturing Technologies And Their Applications
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Author : Irene Fassi
language : en
Publisher: Springer
Release Date : 2017-01-31
Micro Manufacturing Technologies And Their Applications written by Irene Fassi and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-01-31 with Technology & Engineering categories.
This book provides in-depth theoretical and practical information on recent advances in micro-manufacturing technologies and processes, covering such topics as micro-injection moulding, micro-cutting, micro-EDM, micro-assembly, micro-additive manufacturing, moulded interconnected devices, and microscale metrology. It is designed to provide complementary material for the related e-learning platform on micro-manufacturing developed within the framework of the Leonardo da Vinci project 2013-3748/542424: MIMAN-T: Micro-Manufacturing Training System for SMEs. The book is mainly addressed to technicians and prospective professionals in the sector and will serve as an easily usable tool to facilitate the translation of micro-manufacturing technologies into tangible industrial benefits. Numerous examples are included to assist readers in learning and implementing the described technologies. In addition, an individual chapter is devoted to technological foresight, addressing market analysis and business models for micro-manufacturers.
Micromachining And Microfabrication Process Technology And Devices
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Author : Norman C. Tien
language : en
Publisher:
Release Date : 2001
Micromachining And Microfabrication Process Technology And Devices written by Norman C. Tien and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001 with Electromechanical devices categories.
Handbook Of Microlithography Micromachining And Microfabrication Micromachining And Microfabrication
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Author : P. Rai-Choudhury
language : en
Publisher: SPIE Press
Release Date : 1997
Handbook Of Microlithography Micromachining And Microfabrication Micromachining And Microfabrication written by P. Rai-Choudhury and has been published by SPIE Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997 with Technology & Engineering categories.
Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
Microfabricated Systems And Mems
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Author :
language : en
Publisher:
Release Date : 2000
Microfabricated Systems And Mems written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with Microelectronics categories.
Handbook Of Silicon Based Mems Materials And Technologies
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Author : Markku Tilli
language : en
Publisher: Elsevier
Release Date : 2020-04-17
Handbook Of Silicon Based Mems Materials And Technologies written by Markku Tilli and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-04-17 with Technology & Engineering categories.
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. - Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits - Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures - Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements - Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
Advanced Materials And Technologies For Micro Nano Devices Sensors And Actuators
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Author : Evgeni Gusev
language : en
Publisher: Springer
Release Date : 2010-03-03
Advanced Materials And Technologies For Micro Nano Devices Sensors And Actuators written by Evgeni Gusev and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010-03-03 with Technology & Engineering categories.
A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.
Micromachining Techniques For Fabrication Of Micro And Nano Structures
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Author : Mojtaba Kahrizi
language : en
Publisher: BoD – Books on Demand
Release Date : 2012-02-03
Micromachining Techniques For Fabrication Of Micro And Nano Structures written by Mojtaba Kahrizi and has been published by BoD – Books on Demand this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-02-03 with Science categories.
Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry.
Introduction To Microfabrication
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Author : Sami Franssila
language : en
Publisher: Wiley
Release Date : 2004-06-14
Introduction To Microfabrication written by Sami Franssila and has been published by Wiley this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004-06-14 with Technology & Engineering categories.
Microfabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but the basic microstructures and processes of microfabrication are fairly simple. Introduction to Microfabrication shows how the common microfabrication concepts can be applied over and over again to create devices with a wide variety of structures and functions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than device physics * In-depth discussion on process integration showing how processes, materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems for students to familiarise themselves with micro-scale materials, dimensions, measurements, costs and scaling trends. Both research and manufacturing topics are covered, with an emphasis on silicon, which is the workhorse of microfabrication. This book will serve as an excellent first text for electrical engineers, chemists, physicists and materials scientists who wish to learn about microstructures and microfabrication techniques, whether in MEMS, microelectronics or emerging applications.