Microsystem Dynamics
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Microsystems Dynamics
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Author : Vytautas Ostasevicius
language : en
Publisher: Springer Science & Business Media
Release Date : 2010-11-01
Microsystems Dynamics written by Vytautas Ostasevicius and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010-11-01 with Technology & Engineering categories.
In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added benefits of lightweight, miniature size and low energy consumption make MEMS commercialization very attractive. Modeling and simulation is an indispensable tool in the process of studying these new dynamic phenomena, development of new microdevices and improvement of the existing designs. MEMS technology is inherently multidisciplinary since operation of microdevices involves interaction of several energy domains of different physical nature, for example, mechanical, fluidic and electric forces. Dynamic behavior of contact-type electrostatic microactuators, such as a microswitches, is determined by nonlinear fluidic-structural, electrostatic-structural and vibro-impact interactions. The latter is particularly important: Therefore it is crucial to develop accurate computational models for numerical analysis of the aforementioned interactions in order to better understand coupled-field effects, study important system dynamic characteristics and thereby formulate guidelines for the development of more reliable microdevices with enhanced performance, reliability and functionality.
Microsystem Dynamics
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Author : Gang S. Chen
language : en
Publisher: Wiley
Release Date : 2018-05-21
Microsystem Dynamics written by Gang S. Chen and has been published by Wiley this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-05-21 with Technology & Engineering categories.
Microsystem Dynamics: Principles and Applications introduces the basic principles of microsystem dynamics, presenting a unified theoretical framework with focus on some of the most important engineering applications (including computer hard disk drives). This framework has been designed to advance the analysis, design and control of dynamical microsystems. This book presents cutting-edge methodologies of nonlinear science to address non-stationary, non-linear dynamics and control of the most critical dynamical microsystems in engineering and science. It introduces advanced tools including nonlinear signal processing, computational intelligence, and nonlinear chaos dynamics and control. Stability and durability aspects of the dynamical microsystems are considered in detail and recent advances in in microsystem dynamics are also presented. Microsystem Dynamics: Principles and Applications is a comprehensive reference for engineers, academics and students who wish to have a systematic understanding of microsystem dynamics.
Dynamics Of Microelectromechanical Systems
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Author : Nicolae Lobontiu
language : en
Publisher: Springer Science & Business Media
Release Date : 2014-07-08
Dynamics Of Microelectromechanical Systems written by Nicolae Lobontiu and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-07-08 with Technology & Engineering categories.
Here is a textbook for senior undergraduate and graduate level students that offers a novel and systematic look into the dynamics of MEMS. It includes numerous solved examples together with the proposed problems. The material to be found here will also be of interest to researchers with a non-mechanical background. The book focuses on the mechanical domain, specifically the dynamic sub-domain, and provides an in-depth treatment of problems that involve reliable modeling, analysis and design.
Microsystem Technology And Microrobotics
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Author : Sergej Fatikow
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-04-17
Microsystem Technology And Microrobotics written by Sergej Fatikow and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-04-17 with Computers categories.
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
Microsystem Design
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Author : Stephen D. Senturia
language : en
Publisher: Springer Science & Business Media
Release Date : 2005-12-20
Microsystem Design written by Stephen D. Senturia and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-12-20 with Technology & Engineering categories.
It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.
Introduction To Microsystem Technology
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Author : Gerald Gerlach
language : en
Publisher: John Wiley & Sons
Release Date : 2008-04-30
Introduction To Microsystem Technology written by Gerald Gerlach and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-04-30 with Technology & Engineering categories.
Over half a century after the discovery of the piezoresistive effect, microsystem technology has experienced considerable developments. Expanding the opportunities of microelectronics to non-electronic systems, its number of application fields continues to increase. Microsensors are one of the most important fields, used in medical applications and micromechanics. Microfluidic systems are also a significant area, most commonly used in ink-jet printer heads. This textbook focuses on the essentials of microsystems technology, providing a knowledgeable grounding and a clear path through this well-established scientific dicipline. With a methodical, student-orientated approach, Introduction to Microsystem Technology covers the following: microsystem materials (including silicon, polymers and thin films), and the scaling effects of going micro; fabrication techniques based on different material properties, descriptions of their limitations and functional and shape elements produced by these techniques; sensors and actuators based on elements such as mechanical, fluidic, and thermal (yaw rate sensor components are described); the influence of technology parameters on microsystem properties, asking, for example, when is the function of a microsystem device robust and safe? The book presents problems at the end of each chapter so that you may test your understanding of the key concepts (full solutions for these are given on an accompanying website). Practical examples are included also, as well as case studies that enable a better understanding of the technology as a whole. With its extensive treatment on the fundamentals of microsystem technology, this book also serves as a compendium for engineers and technicians working with microsystem technology.
Microsystem Technology
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Author : Wolfgang Menz
language : en
Publisher: John Wiley & Sons
Release Date : 2001-03-13
Microsystem Technology written by Wolfgang Menz and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001-03-13 with Science categories.
This concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. Completely revised, this edition has expanded chapters on silicium and LIGA technology as well as new topics.
Microsystems Mechanical Design
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Author : Francesco De Bona
language : en
Publisher: Springer Science & Business Media
Release Date : 2007-03-23
Microsystems Mechanical Design written by Francesco De Bona and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007-03-23 with Technology & Engineering categories.
This book introduces the basic tools used in the mechanical design of microsystems, the fabrication methods for these systems, and several applications of this technology. The links between micro- and nanotechnologies are also discussed and light is shed on the potential applications of microsystems to nano-scale manipulation of matter. The book is a systematic, updated and quite complete treatise of its subject.
Microcells For Metastructures An Application Of Microsystem Technology To Distributed Space Structures
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Author :
language : en
Publisher:
Release Date : 2006
Microcells For Metastructures An Application Of Microsystem Technology To Distributed Space Structures written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006 with categories.
In this thesis, a new concept of space systems called metastructures is studied. Applications are in very large space structures (1 km) that can take many shapes and be reconfigured during operations. This concept is explored by defining it from a systems engineering perspective, characterising the system dynamics and technical baseline, and assessing its interest with respect to proposed missions and to alternatives. Metastructures are defined as assemblies of microcells linked rigidly. Microcells are themselves defined as Nanosatellites with reduced functionalities, and are referenced locally or globally for active position control within the metastructure. Two reference missions are considered, a centimetric interferometer and a Solar concentrator as part of Solar Power systems. The methods used to analyse these missions and achieve the research objectives are based on strategy analysis, standard practices in mission and system design, and a simplified system dynamics simulation implemented in a custom simulator. The analysis of dynamics demonstrates the controllability of such structures, and their ability to maintain and keep shape in most orbits to good accuracy. It also shows that the design of the distributed controller is important. From this, subsystem requirements are derived for the microcells which are studied as highly integrated microsystems. Mass of the microcells is around 500 g, much of which is propellant. The baseline system configuration for reference missions is derived, including costing. For these missions masses are less than a ton, with costs less that 500 Million Euros. Metastructures do not perform well in terms of lifetime given the simplistic controller used. Appropriate research of decentralised controllers may remedy to this, but a weak point of the concept is that of stowing and launching. Finally, a preliminary analysis of the concept with respect to its alternatives tends to show that it is worthy of further investigation.
Mechanics Of Microsystems
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Author : Alberto Corigliano
language : en
Publisher: John Wiley & Sons
Release Date : 2018-04-02
Mechanics Of Microsystems written by Alberto Corigliano and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-04-02 with Technology & Engineering categories.
Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.