Microsystems Metrology And Inspection
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Optical Inspection Of Microsystems
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Author : Wolfgang Osten
language : en
Publisher: CRC Press
Release Date : 2018-10-03
Optical Inspection Of Microsystems written by Wolfgang Osten and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-10-03 with Science categories.
Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.
Microsystems Engineering
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Author :
language : en
Publisher:
Release Date : 2001
Microsystems Engineering written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001 with categories.
Microsystems Metrology And Inspection
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Author : Christophe Gorecki
language : en
Publisher: SPIE-International Society for Optical Engineering
Release Date : 1999
Microsystems Metrology And Inspection written by Christophe Gorecki and has been published by SPIE-International Society for Optical Engineering this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999 with Science categories.
Microsystems Engineering
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Author :
language : en
Publisher:
Release Date : 2001
Microsystems Engineering written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001 with Interferometry categories.
Optical Inspection Of Microsystems Second Edition
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Author : Wolfgang Osten
language : en
Publisher: CRC Press
Release Date : 2019-06-21
Optical Inspection Of Microsystems Second Edition written by Wolfgang Osten and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2019-06-21 with Technology & Engineering categories.
Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques Offers numerous practical examples and illustrations Includes calibration of optical measurement systems for the inspection of MEMS Presents the characterization of dynamics of MEMS
Microsystems Engineering
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Author : Christophe Gorecki
language : en
Publisher: Society of Photo Optical
Release Date : 2003
Microsystems Engineering written by Christophe Gorecki and has been published by Society of Photo Optical this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003 with Technology & Engineering categories.
Microsystems Engineering
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Author : Christophe Gorecki
language : en
Publisher:
Release Date : 2001
Microsystems Engineering written by Christophe Gorecki and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001 with Interferometry categories.
Microsystems Engineering
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Author :
language : en
Publisher:
Release Date : 2003
Microsystems Engineering written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003 with categories.
Digital Holography For Mems And Microsystem Metrology
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Author : Anand Asundi
language : en
Publisher: Wiley
Release Date : 2011-08-15
Digital Holography For Mems And Microsystem Metrology written by Anand Asundi and has been published by Wiley this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-08-15 with Technology & Engineering categories.
Approaching the topic of digital holography from the practical perspective of industrial inspection, Digital Holography for MEMS and Microsystem Metrology describes the process of digital holography and its growing applications for MEMS characterization, residual stress measurement, design and evaluation, and device testing and inspection. Asundi also provides a thorough theoretical grounding that enables the reader to understand basic concepts and thus identify areas where this technique can be adopted. This combination of both practical and theoretical approach will ensure the book's relevance and appeal to both researchers and engineers keen to evaluate the potential of digital holography for integration into their existing machines and processes. Addresses particle characterization where digital holography has proven capability for dynamic measurement of particles in 3D for sizing and shape characterization, with applications in microfluidics as well as crystallization and aerosol detection studies. Discusses digital reflection holography, digital transmission holography, digital in-line holography, and digital holographic tomography and applications. Covers other applications including micro-optical and diffractive optical systems and the testing of these components, and bio-imaging.
Integrated Circuit Metrology Inspection And Process Control
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Author : Kevin M. Monahan
language : en
Publisher:
Release Date : 1987
Integrated Circuit Metrology Inspection And Process Control written by Kevin M. Monahan and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1987 with Technology & Engineering categories.