Optical Microlithography

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Optical Imaging In Projection Microlithography

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Author : Alfred Kwok-Kit Wong
language : en
Publisher: SPIE Press
Release Date : 2005

Optical Imaging In Projection Microlithography written by Alfred Kwok-Kit Wong and has been published by SPIE Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005 with Technology & Engineering categories.

Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system level view of the parameter tolerances required in manufacturing. Readers with a good working knowledge of calculus can follow the step-by-step development, and technologists can gather general concepts and the key equations that result. Even the casual reader will gain a perspective on the key concepts, which will likely help facilitate dialog among technologists.

Handbook Of Microlithography Micromachining And Microfabrication Micromachining And Microfabrication

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Author : P. Rai-Choudhury
language : en
Publisher: SPIE Press
Release Date : 1997

Handbook Of Microlithography Micromachining And Microfabrication Micromachining And Microfabrication written by P. Rai-Choudhury and has been published by SPIE Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997 with Technology & Engineering categories.

Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.

Optical Microlithography

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Author :
language : en
Publisher:
Release Date : 2000

Optical Microlithography written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with Integrated circuits categories.

Fundamental Principles Of Optical Lithography

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Author : Chris Mack
language : en
Publisher: John Wiley & Sons
Release Date : 2008-03-11

Fundamental Principles Of Optical Lithography written by Chris Mack and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-03-11 with Technology & Engineering categories.

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.

Handbook Of Microlithography Micromachining And Microfabrication Microlithography

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Author : P. Rai-Choudhury
language : en
Publisher: IET
Release Date : 1997

Handbook Of Microlithography Micromachining And Microfabrication Microlithography written by P. Rai-Choudhury and has been published by IET this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997 with Technology & Engineering categories.

Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.

Microlithography

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Author : Bruce W. Smith
language : en
Publisher: CRC Press
Release Date : 2018-10-03

Microlithography written by Bruce W. Smith and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-10-03 with Technology & Engineering categories.

This new edition of the bestselling Microlithography: Science and Technology provides a balanced treatment of theoretical and operational considerations, from elementary concepts to advanced aspects of modern submicron microlithography. Each chapter reflects the current research and practices from the world's leading academic and industrial laboratories detailed by a stellar panel of international experts. New in the Second Edition In addition to updated information on existing material, this new edition features coverage of technologies developed over the last decade since the first edition appeared, including: Immersion Lithography 157nm Lithography Electron Projection Lithography (EPL) Extreme Ultraviolet (EUV) Lithography Imprint Lithography Photoresists for 193nm and Immersion Lithography Scatterometry Microlithography: Science and Technology, Second Edition authoritatively covers the physics, chemistry, optics, metrology tools and techniques, resist processing and materials, and fabrication methods involved in the latest generations of microlithography such as immersion lithography and extreme ultraviolet (EUV) lithography. It also looks ahead to the possible future systems and technologies that will bring the next generations to fruition. Loaded with illustrations, equations, tables, and time-saving references to the most current literature, this book is the most comprehensive and reliable source for anyone, from student to seasoned professional, looking to achieve robust, accurate, and cost-effective microlithography processes and systems.

Optical Microlithography

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Author : Society of Photo-optical Instrumentation Engineers
language : en
Publisher:
Release Date : 1982

Optical Microlithography written by Society of Photo-optical Instrumentation Engineers and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1982 with Technology & Engineering categories.

Optical Microlithography Iii

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Author : Harry L. Stover
language : en
Publisher:
Release Date : 1984

Optical Microlithography Iii written by Harry L. Stover and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1984 with Science categories.

Optical Microlithography Vi

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Author : Society of Photo-optical Instrumentation Engineers
language : en
Publisher:
Release Date : 1987

Optical Microlithography Vi written by Society of Photo-optical Instrumentation Engineers and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1987 with Technology & Engineering categories.

Optical Microlithography V

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Author : Harry L. Stover
language : en
Publisher:
Release Date : 1986

Optical Microlithography V written by Harry L. Stover and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1986 with Technology & Engineering categories.