Photonic Mems Devices
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Photonic Mems Devices
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Author : Ai-Qun Liu
language : en
Publisher: CRC Press
Release Date : 2018-10-08
Photonic Mems Devices written by Ai-Qun Liu and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-10-08 with Technology & Engineering categories.
Photonic MEMS devices represent the next major breakthrough in the silicon revolution. While many quality resources exist on the optic and photonic aspect of device physics, today’s researchers are in need of a reference that goes beyond to include all aspects of engineering innovation. An extension on traditional design and analysis, Photonic MEMS Devices: Design, Fabrication, and Control describes a broad range of optical and photonic devices, from MEMS optical switches and bandgap crystal switches to optical variable attenuators (VOA) and injection locked tunable lasers. It deals rigorously with all these technologies at a fundamental level, systematically introducing critical nomenclature. Each chapter also provides analysis techniques, equations, and experimental results. The book focuses not only on traditional design analysis, but also provides extensive background on realistic simulation and fabrication processes. With a clear attention to experimental relevance, this book provides the fundamental knowledge needed to take the next-step in integrating photonic MEMS devices into commercial products and technology.
Photonic Microsystems
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Author : Olav Solgaard
language : en
Publisher: Springer Science & Business Media
Release Date : 2009-04-05
Photonic Microsystems written by Olav Solgaard and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009-04-05 with Science categories.
This book describes Microelectromechanical systems (MEMS) technology and demonstrates how MEMS allow miniaturization, parallel fabrication, and efficient packaging of optics, as well as integration of optics and electronics. The book shows how the characteristics of MEMS enable practical implementations of a variety of applications, including projection displays, fiber switches, interferometers, and spectrometers. The authors conclude with an up-to-date discussion of the need for the combination of MEMS and Photonic crystals.
Nanofabrication Approaches For Group Iv Photonic Mems Devices
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Author : Parashara Panduranga
language : en
Publisher:
Release Date : 2020
Nanofabrication Approaches For Group Iv Photonic Mems Devices written by Parashara Panduranga and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020 with categories.
Optical Mems Nanophotonics And Their Applications
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Author : Guangya Zhou
language : en
Publisher: CRC Press
Release Date : 2017-12-14
Optical Mems Nanophotonics And Their Applications written by Guangya Zhou and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-12-14 with Science categories.
This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems. Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration. Showcases the integration of MEMS and optical/photonic devices into real commercial products. Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems. Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore. Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.
Single Crystalline Silicon Optical Mems With Photonic Crystal Mirrors
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Author : Yu-Po Wong
language : en
Publisher:
Release Date : 2018
Single Crystalline Silicon Optical Mems With Photonic Crystal Mirrors written by Yu-Po Wong and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018 with categories.
Microelectromechanical systems (MEMS) and silicon photonics are two emerging fields in the semiconductor industry. This dissertation studies the intersection of these two fields: optical MEMS with silicon photonics. Our work is focused on using single crystalline silicon to make monolithic optical MEMS devices with integrated photonic crystal sensing mirrors. To learn more about photonic crystals, we studied novel optical properties on photonic crystal mirrors in the first part of this work. Two optical effects based on the phase of complex reflectivity: effective thickness and Goos-Hanchen shift (GHS) were thoroughly studied. Effective thickness, related to group delay, is the gradient of reflected phase over wavenumber. GHS is the gradient of reflected phase over incident angle. Both were studied with temporal coupled mode theory, simulated with numerical methods, and demonstrated experimentally on photonic crystal mirrors. Both negative effective thickness and negative GHS are anomalous that are demonstrated on low-loss material for the first time. Furthermore, the fundamental limitations of these effects and the link between them were theoretically studied. Applications of these novel effects are discussed. Effective thickness can be useful for Fabry-Perot sensing with broadband light sources, and negative GHS on low-loss material can be the key to demonstrating optical rainbow trapping. Next, we combined photonic crystal mirrors with optical MEMS to make two types of sensors: acoustic sensors and pressure sensors. These sensors use the mechanical properties of MEMS structures for sensing and the optical properties of silicon photonics for readout. The sensor readout is based on a Fabry-Perot interferometer between an integrated photonic crystal mirror on MEMS diaphragm as the movable sensing mirror and a metal-coated fiber-tip as the stationary mirror. They are assembled into fiber-tip sensors for remote sensing with a small footprint. New fabrication process flows were also developed to make the sensing devices in a single crystalline form on standard bulk silicon wafers. For the acoustic sensor, a new fabrication process flow and a new simplified assembly process are presented. Optical, mechanical, and acoustic properties of the sensor are studied. The assembled sensors are tested and demonstrated minimum detectable pressure (MDP) close to the thermal-mechanical noise limit. Additionally, the limitations of clamped diaphragm-based sensors are studied. A new type of sensor with MEMS springs are studied, and new advanced process flows are designed. For the pressure sensor, we developed a new process flow called GOPhER silicon-on-nothing (SON) process based on the standard SON process. This new process extended the design space of a single crystalline SON structure, which is a sealed near-vacuum cavity inside a silicon device. Furthermore, it has the capability to add integrated ellipsoidal void photonic crystal onto the top diaphragm of a SON structure. At the end, a fiber-tip pressure sensor is assembled and characterized. The sensor demonstrated good dynamic range and sensitivity.
Micro And Nanophotonics For Semiconductor Infrared Detectors
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Author : Zoran Jakšić
language : en
Publisher: Springer
Release Date : 2014-09-25
Micro And Nanophotonics For Semiconductor Infrared Detectors written by Zoran Jakšić and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-09-25 with Technology & Engineering categories.
The advent of microelectromechanic system (MEMS) technologies and nanotechnologies has resulted in a multitude of structures and devices with ultra compact dimensions and with vastly enhanced or even completely novel properties. In the field of photonics it resulted in the appearance of new paradigms, including photonic crystals that exhibit photonic bandgap and represent an optical analog of semiconductors and metamaterials that have subwavelength features and may have almost arbitrary values of effective refractive index, including those below zero. In addition to that, a whole new field of plasmonics appeared, dedicated to the manipulation with evanescent, surface-bound electromagnetic waves and offering an opportunity to merge nanoelectronics with all-optical circuitry. In the field of infrared technologies MEMS and nanotechnologies ensured the appearance of a new generation of silicon-based thermal detectors with properties vastly surpassing the conventional thermal devices. However, another family of infrared detectors, photonic devices based on narrow-bandgap semiconductors, has traditionally been superior to thermal detectors. Literature about their micro and nanophotonic enhancement has been scarce and scattered through journals. This book offers the first systematic approach to numerous different MEMS and nanotechnology-based methods available for the improvement of photonic infrared detectors and points out to a path towards uncooled operation with the performance of cryogenically cooled devices. It is shown that a vast area for enhancement does exists and that photonic devices can readily keep their leading position in infrared detection. The various methods and approaches described in the book are also directly applicable to different other types of photodetectors like solar cells, often with little or no modification.
Physiology And Pharmacology Of Bone
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Author : Gregory R. Mundy
language : en
Publisher: Springer Verlag
Release Date : 1993
Physiology And Pharmacology Of Bone written by Gregory R. Mundy and has been published by Springer Verlag this book supported file pdf, txt, epub, kindle and other format this book has been release on 1993 with Medical categories.
Micromechanical Photonics
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Author : Hiroo Ukita
language : en
Publisher: Springer Science & Business Media
Release Date : 2007-04-14
Micromechanical Photonics written by Hiroo Ukita and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007-04-14 with Science categories.
This is the most comprehensive book on the basics, realization and applications of micromechanical photonics. Its purpose is to give the engineering student and the practical engineer a systematic introduction to optical MEMS (Micro electro mechanical systems) and micromechanical photonics. It does this not only through theoretical and experimental results, but also by describing various products and their fields of application.
Computational Photonic Sensors
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Author : Mohamed Farhat O. Hameed
language : en
Publisher: Springer
Release Date : 2018-06-13
Computational Photonic Sensors written by Mohamed Farhat O. Hameed and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-06-13 with Technology & Engineering categories.
This book provides a comprehensive overview of the photonic sensing field by covering plasmonics, photonic crystal, and SOI techniques from theory to real sensing applications. A literature review of ultra-sensitive photonic sensors, including their design and application in industry, makes this a self-contained and comprehensive resource for different types of sensors, with high value to the biosensor sector in particular. The book is organized into four parts: Part I covers the basic theory of wave propagation, basic principles of sensing, surface plasmon resonance, and silicon photonics; Part II details the computational modeling techniques for the analysis and prediction of photonic sensors; Part III and Part IV cover the various mechanisms and light matter interaction scenarios behind the design of photonic sensors including photonic crystal fiber sensors and SOI sensors. This book is appropriate for academics and researchers specializing in photonic sensors; graduate students in the early and intermediate stages working in the areas of photonics, sensors, biophysics, and biomedical engineering; and to biomedical, environmental, and chemical engineers.
Mems And Nanotechnology Based Sensors And Devices For Communications Medical And Aerospace Applications
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Author : A. R. Jha
language : en
Publisher: CRC Press
Release Date : 2008-04-08
Mems And Nanotechnology Based Sensors And Devices For Communications Medical And Aerospace Applications written by A. R. Jha and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-04-08 with Technology & Engineering categories.
The integration of microelectromechanical systems (MEMS) and nanotechnology (NT) in sensors and devices significantly reduces their weight, size, power consumption, and production costs. These sensors and devices can then play greater roles in defense operations, wireless communication, the diagnosis and treatment of disease, and many more applications. MEMS and Nanotechnology-Based Sensors and Devices for Communications, Medical and Aerospace Applications presents the latest performance parameters and experimental data of state-of-the-art sensors and devices. It describes packaging details, materials and their properties, and fabrication requirements vital for design, development, and testing. Some of the cutting-edge materials covered include quantum dots, nanoparticles, photonic crystals, and carbon nanotubes (CNTs). This comprehensive work encompasses various types of MEMS- and NT-based sensors and devices, such as micropumps, accelerometers, photonic bandgap devices, acoustic sensors, CNT-based transistors, photovoltaic cells, and smart sensors. It also discusses how these sensors and devices are used in a number of applications, including weapons’ health, battlefield monitoring, cancer research, stealth technology, chemical detection, and drug delivery.