Silicon Carbide Microelectromechanical Systems For Harsh Environments
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Silicon Carbide Microelectromechanical Systems For Harsh Environments
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Author : Rebecca Cheung
language : en
Publisher: World Scientific
Release Date : 2006
Silicon Carbide Microelectromechanical Systems For Harsh Environments written by Rebecca Cheung and has been published by World Scientific this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006 with Technology & Engineering categories.
This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS.This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product.
Silicon Carbide Microelectromechanical Systems For Harsh Environments
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Author : Rebecca Cheung
language : en
Publisher: World Scientific
Release Date : 2006-06-29
Silicon Carbide Microelectromechanical Systems For Harsh Environments written by Rebecca Cheung and has been published by World Scientific this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-06-29 with Technology & Engineering categories.
This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS.This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product./a
Silicon Carbide Microsystems For Harsh Environments
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Author : Muthu Wijesundara
language : en
Publisher: Springer Science & Business Media
Release Date : 2011-05-17
Silicon Carbide Microsystems For Harsh Environments written by Muthu Wijesundara and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-05-17 with Technology & Engineering categories.
Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments, technological readiness of the system components, key issues when integrating these components into systems, and other hurdles in harsh environment operation. The authors use the SiC technology platform suite the model platform for developing harsh environment microsystems and then detail the current status of the specific individual technologies (electronics, MEMS, packaging). Additionally, methods towards system level integration of components and key challenges are evaluated and discussed based on the current state of SiC materials processing and device technology. Issues such as temperature mismatch, process compatibility and temperature stability of individual components and how these issues manifest when building the system receive thorough investigation. The material covered not only reviews the state-of-the-art MEMS devices, provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules.
Silicon Carbide Micro Electromechanical Systems For Harsh Environments
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Author :
language : en
Publisher:
Release Date : 2006
Silicon Carbide Micro Electromechanical Systems For Harsh Environments written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006 with Electronic books categories.
Mems Materials And Processes Handbook
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Author : Reza Ghodssi
language : en
Publisher: Springer Science & Business Media
Release Date : 2011-03-18
Mems Materials And Processes Handbook written by Reza Ghodssi and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-03-18 with Technology & Engineering categories.
MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.
Mems And Nanotechnology Volume 6
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Author : Gordon A. Shaw
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-09-06
Mems And Nanotechnology Volume 6 written by Gordon A. Shaw and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-09-06 with Technology & Engineering categories.
MEMS and Nanotechnology, Volume 6: Proceedings of the 2012 Annual Conference on Experimental and Applied Mechanics represents one of seven volumes of technical papers presented at the Society for Experimental Mechanics SEM 12th International Congress & Exposition on Experimental and Applied Mechanics, held at Costa Mesa, California, June 11-14, 2012. The full set of proceedings also includes volumes on Dynamic Behavior of Materials, Challenges in Mechanics of Time-Dependent Materials and Processes in Conventional and Multifunctional Materials, Imaging Methods for Novel Materials and Challenging Applications, Experimental and Applied Mechanics, Mechanics of Biological Systems and Materials and, Composite Materials and Joining Technologies for Composites.
Micro Electro Mechanical System Design
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Author : James J. Allen
language : en
Publisher: CRC Press
Release Date : 2005-07-08
Micro Electro Mechanical System Design written by James J. Allen and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-07-08 with Technology & Engineering categories.
It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved, how they are interrelated, and how they can be quickly and accurately addressed. The materials are presented in logical order relative to the manner a MEMS designer needs to apply them. For example, in order for a project to be completed correctly, on time, and within budget, the following diverse yet correlated issues must be attended to during the initial stages of design and development: Understanding the fabrication technologies that are available Recognizing the relevant physics involved for micron scale devices Considering implementation issues applicable to computer aided design Focusing on the engineering details and the subsequent evaluation testing Maintaining an eye for detail regarding both reliability and packaging These issues are fully addressed in this book, along with questions and problems at the end of each chapter that promote review and further contemplation of each topic. In addition, the appendices offer information that complement each stage of project design and development.
An Introduction To Microelectromechanical Systems Engineering
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Author : Nadim Maluf
language : en
Publisher: Artech House
Release Date : 2004
An Introduction To Microelectromechanical Systems Engineering written by Nadim Maluf and has been published by Artech House this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with Technology & Engineering categories.
Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.
Chemical Sensors 7 And Mems Nems 7
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Author : Peter J. Hesketh
language : en
Publisher: The Electrochemical Society
Release Date : 2006
Chemical Sensors 7 And Mems Nems 7 written by Peter J. Hesketh and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006 with Technology & Engineering categories.
The latest developments in chemical and biological sensor research and development. Topics include: 1. new selective species recognition surfaces and materials; 2. molecular recognition materials and approaches to minimize non-specific binding; 3. semi-selective species recognition materials; 4. novel methods for signal processing, signal amplification, and detection; 5. detection systems for multiple analytes in complex samples; 6. sensor arrays; and 7. analytical systems and approaches.