Submicron Three Dimensional Single Crystal Electro Mechanical Structures And Actuators Integrated With Field Emitters For Micro Machined Vacuum Electronics Applications
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Submicron Three Dimensional Single Crystal Electro Mechanical Structures And Actuators Integrated With Field Emitters For Micro Machined Vacuum Electronics Applications
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Author : Zuoying Lisa Zhang
language : en
Publisher:
Release Date : 1993
Submicron Three Dimensional Single Crystal Electro Mechanical Structures And Actuators Integrated With Field Emitters For Micro Machined Vacuum Electronics Applications written by Zuoying Lisa Zhang and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1993 with categories.
Three Dimensional Single Crystal Silicon Micromachining
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Author : Wolfgang Maximilian Josef Hofmann
language : en
Publisher:
Release Date : 1999
Three Dimensional Single Crystal Silicon Micromachining written by Wolfgang Maximilian Josef Hofmann and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999 with Micromachining categories.
Integrated Three Dimensional Processing For Novel Micro Electro Mechanical Systems
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Author : Liang-Yuh Chen
language : en
Publisher:
Release Date : 1995
Integrated Three Dimensional Processing For Novel Micro Electro Mechanical Systems written by Liang-Yuh Chen and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with categories.
Microlithography And Metrology In Micromachining
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Author :
language : en
Publisher:
Release Date : 1995
Microlithography And Metrology In Micromachining written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Microlithography categories.
Optimal Design And Fabrication Of Micro Electro Mechanical Structures With Applications To Comb Drives
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Author : Wenjing Ye
language : en
Publisher:
Release Date : 1998
Optimal Design And Fabrication Of Micro Electro Mechanical Structures With Applications To Comb Drives written by Wenjing Ye and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998 with Electronic apparatus and appliances categories.
Micro Optics Micromechanics And Laser Scanning And Shaping
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Author : M. Edward Motamedi
language : en
Publisher:
Release Date : 1995
Micro Optics Micromechanics And Laser Scanning And Shaping written by M. Edward Motamedi and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Computers categories.
Single Mask Multiple Level Single Crystal Silicon Processes
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Author : Kanakasabapathi Subramanian
language : en
Publisher:
Release Date : 2003
Single Mask Multiple Level Single Crystal Silicon Processes written by Kanakasabapathi Subramanian and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003 with categories.
Wavelength Tunable Fiber Optic Mems Scanning Fabry P Rot Interferometer
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Author : Ali Jazairy
language : en
Publisher:
Release Date : 2000
Wavelength Tunable Fiber Optic Mems Scanning Fabry P Rot Interferometer written by Ali Jazairy and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with Microelectromechanical systems categories.
Nanofabrication
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Author : Ampere A. Tseng
language : en
Publisher: World Scientific
Release Date : 2008
Nanofabrication written by Ampere A. Tseng and has been published by World Scientific this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008 with Science categories.
Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students.Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices.
Reliability Of Mems
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Author : Osamu Tabata
language : en
Publisher: John Wiley & Sons
Release Date : 2008-02-04
Reliability Of Mems written by Osamu Tabata and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-02-04 with Technology & Engineering categories.
This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.