Three Dimensional Single Crystal Silicon Micromachining
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Three Dimensional Single Crystal Silicon Micromachining
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Author : Wolfgang Maximilian Josef Hofmann
language : en
Publisher:
Release Date : 1999
Three Dimensional Single Crystal Silicon Micromachining written by Wolfgang Maximilian Josef Hofmann and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999 with Micromachining categories.
Submicron Three Dimensional Single Crystal Electro Mechanical Structures And Actuators Integrated With Field Emitters For Micro Machined Vacuum Electronics Applications
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Author : Zuoying Lisa Zhang
language : en
Publisher:
Release Date : 1993
Submicron Three Dimensional Single Crystal Electro Mechanical Structures And Actuators Integrated With Field Emitters For Micro Machined Vacuum Electronics Applications written by Zuoying Lisa Zhang and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1993 with categories.
Microsystem Technology And Microrobotics
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Author : Sergej Fatikow
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-04-17
Microsystem Technology And Microrobotics written by Sergej Fatikow and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-04-17 with Computers categories.
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
Mems And Nems
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Author : Sergey Edward Lyshevski
language : en
Publisher: CRC Press
Release Date : 2018-10-03
Mems And Nems written by Sergey Edward Lyshevski and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-10-03 with Technology & Engineering categories.
The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors. MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization. The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.
Light Driven Micromachines
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Author : George K. Knopf
language : en
Publisher: CRC Press
Release Date : 2018-03-29
Light Driven Micromachines written by George K. Knopf and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-03-29 with Technology & Engineering categories.
In Light Driven Micromachines, the fundamental principles and unique characteristics of light driven material structures, simple mechanisms and integrated machines are explored. Very small light driven systems provide a number of interesting features and unique design opportunities because streams of photons deliver energy into the system and provide the control signal used to regulate the response of the micron sized device. Through innovative material design and clever component fabrication, these optically powered tiny machines can be created to perform mechanical work when exposed to varying light intensity, wavelength, phase, and/or polarization. The book begins with the scientific background necessary to understand the nature of light and how light can initiate physical movement by inducing material deformation or altering the surrounding environment to impose micro-forces on the actuating mechanisms. The impact of physical size on the performance of light driven mechanisms and machines is discussed, and the nature of light–material interactions is reviewed. These interactions enable very small objects and mechanical components to be trapped and manipulated by a focused light beam, or produce local temperature gradients that force certain materials to undergo shape transformation. Advanced phase transition gels, polymers, carbon-based films and piezoelectric ceramics that exhibit direct light-to-mechanical energy conversion are examined from the perspective of designing optically driven actuators and mechanical systems. The ability of light to create photothermal effects that drive microfluidic processes and initiate the phase transformation of temperature sensitive shape memory materials are also explored in the book. This compendium seeks to inspire the next generation of scientists and engineers by presenting the fundamental principles of this emerging interdisciplinary technology and exploring how the properties of light can be exploited for microfluidic, microrobotic, biomedical and space applications.
Nano And Micro Electromechanical Systems
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Author : Sergey Edward Lyshevski
language : en
Publisher: CRC Press
Release Date : 2018-10-03
Nano And Micro Electromechanical Systems written by Sergey Edward Lyshevski and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-10-03 with Technology & Engineering categories.
Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality references that capture the multidisciplinary and multifaceted nature of the science. Presenting cutting-edge information that is applicable to many fields, Nano- and Micro-Electromechanical Systems: Fundamentals of Nano and Microengineering, Second Edition builds the theoretical foundation for understanding, modeling, controlling, simulating, and designing nano- and microsystems. The book focuses on the fundamentals of nano- and microengineering and nano- and microtechnology. It emphasizes the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development. Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in a textbook style and now includes homework problems, examples, and reference lists in every chapter, as well as a separate solutions manual. It is designed to satisfy the growing demands of undergraduate and graduate students, researchers, and professionals in the fields of nano- and microengineering, and to enable them to contribute to the nanotechnology revolution.
Modern Inertial Sensors And Systems
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Author : BOSE, AMITAVA
language : en
Publisher: PHI Learning Pvt. Ltd.
Release Date : 2008-03-09
Modern Inertial Sensors And Systems written by BOSE, AMITAVA and has been published by PHI Learning Pvt. Ltd. this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-03-09 with Technology & Engineering categories.
Modern inertial sensors and systems cover more than five decades of continuous research and development involving various branches of science and engineering. Various technologies have emerged in an evolutionary manner surpassing the earlier ones in performance and reliability. The subject is still growing with proliferation in newer cost effec-tive applications, while its wider usage in aerospace systems continues. This book exposes the readers to the subject of inertial navigation, the inertial sensors and inertial systems in a unified manner while emphasizing the growth areas in emerging technologies such as micro-electromechanical inertial sensors, satellite navigation, satellite navigation integrated inertial navigation, hemispherical resonator gyro, vibrating beam accelerometer, interferometric fibre optic gyro, inertial sensor signal processing, redundant inertial systems and the quite recent emergence of cold atom interferometer based inertial sensors. The contents are imaginatively designed that will of interest to a wide spectrum of readers. The book has been written with utmost lucidity and clarity and explanations provided with a large number of illustrative figures. Besides being an ideal introduction to the principles of inertial sensors and systems for undergraduate and postgraduate students of aerospace engineering, the topics dealt with will also be of benefit to practising engineers and can assist the researchers to locate excellent references for research work. The authors have had three decades of design and application research experience in premier research institutions and have made use of their experience in giving a user-friendly shape to the book.
Non Linear Electromagnetic Systems
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Author : Volkmar Kose
language : en
Publisher: IOS Press
Release Date : 1998
Non Linear Electromagnetic Systems written by Volkmar Kose and has been published by IOS Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 1998 with Science categories.
The contents is dominated by the latest problems of applied electrical engineering, micro electromechanics, biosensor technology and biomagnetism. The book covers the numerical calculation methods for the design and optimization of sensors, actuators and electric machines, as well as the treatment of inverse problems, in materials testing and in the field of medicine in particular. Other central topics are the material properties and their simulation and much consideration is given to micro-electromechanics.
Fundamentals Of Microfabrication And Nanotechnology Three Volume Set
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Author : Marc J. Madou
language : en
Publisher: CRC Press
Release Date : 2018-12-14
Fundamentals Of Microfabrication And Nanotechnology Three Volume Set written by Marc J. Madou and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-12-14 with Technology & Engineering categories.
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
Integrated Three Dimensional Processing For Novel Micro Electro Mechanical Systems
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Author : Liang-Yuh Chen
language : en
Publisher:
Release Date : 1995
Integrated Three Dimensional Processing For Novel Micro Electro Mechanical Systems written by Liang-Yuh Chen and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with categories.