Electron Beam Interactions With Solids

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Electron Beam Interactions With Solids

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Author : Maurizio Dapor
language : en
Publisher:
Release Date : 2014-01-15

Electron Beam Interactions With Solids written by Maurizio Dapor and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-01-15 with categories.

Electron Beam Interactions With Solids

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Author : Maurizio Dapor
language : en
Publisher: Springer Science & Business Media
Release Date : 2003-04-23

Electron Beam Interactions With Solids written by Maurizio Dapor and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2003-04-23 with Mathematics categories.

The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book aims to investigate selected aspects of the interaction of electrons with matter (backscattering coefficient for bulk targets, absorption, backscattering and transmission for supported and unsupported thin films, implantation profiles, secondary electron emission and so on); to study the probabilistic laws of interaction of the individual electrons with the atoms (elastic and inelastic cross sections); to introduce the Monte Carlo method and its use for computing the macroscopic characteristics of the interaction processes. Each chapter compares theory, simulations and experimental data.

Electron Beam Interactions With Solids For Microscopy Microanalysis Microlithography

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Author : David F. Kyser
language : en
Publisher: Scanning Electron Microscopy
Release Date : 1984

Electron Beam Interactions With Solids For Microscopy Microanalysis Microlithography written by David F. Kyser and has been published by Scanning Electron Microscopy this book supported file pdf, txt, epub, kindle and other format this book has been release on 1984 with Science categories.

Practical Scanning Electron Microscopy

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Author : Joseph Goldstein
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06

Practical Scanning Electron Microscopy written by Joseph Goldstein and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Technology & Engineering categories.

In the spring of 1963, a well-known research institute made a market survey to assess how many scanning electron microscopes might be sold in the United States. They predicted that three to five might be sold in the first year a commercial SEM was available, and that ten instruments would saturate the marketplace. In 1964, the Cambridge Instruments Stereoscan was introduced into the United States and, in the following decade, over 1200 scanning electron microscopes were sold in the U. S. alone, representing an investment conservatively estimated at $50,000- $100,000 each. Why were the market surveyers wrongil Perhaps because they asked the wrong persons, such as electron microscopists who were using the highly developed transmission electron microscopes of the day, with resolutions from 5-10 A. These scientists could see little application for a microscope that was useful for looking at surfaces with a resolution of only (then) about 200 A. Since that time, many scientists have learned to appreciate that information content in an image may be of more importance than resolution per se. The SEM, with its large depth of field and easily that often require little or no sample prepara interpreted images of samples tion for viewing, is capable of providing significant information about rough samples at magnifications ranging from 50 X to 100,000 X. This range overlaps considerably with the light microscope at the low end, and with the electron microscope at the high end.

Introduction To Focused Ion Beams

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Author : Lucille A. Giannuzzi
language : en
Publisher: Springer Science & Business Media
Release Date : 2006-05-18

Introduction To Focused Ion Beams written by Lucille A. Giannuzzi and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-05-18 with Science categories.

Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.

Vlsi Science And Technology 1982

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Author : Conrad J. Dell'Oca
language : en
Publisher:
Release Date : 1982

Vlsi Science And Technology 1982 written by Conrad J. Dell'Oca and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1982 with Integrated circuits categories.

Surface Modification And Alloying

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Author : J.M. Poate
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-11-21

Surface Modification And Alloying written by J.M. Poate and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-11-21 with Science categories.

This book is an outcome of the NATO institute on surface modification which was held in Trevi, 1981. Surface modification and alloying by ion, electron or laser beams is proving to be one of the most burgeoning areas of materials science. The field covers such diverse areas as integrated circuit processing to fabricating wear and corrosion resistant surfaces on mechanical components. The common scientific questions of interest are the microstructures by the different energy deposition techniques. and associated physical properties produced The chapters constitute a critical review of the various subjects covered at Trevi. Each chapter author took responsibility for the overall review and used contributions from the many papers presented at the meeting; each participant gave a presentation. The contributors are listed at the start of each chapter. We took this approach to get some order in a large and diverse field. We are indebted to all the contributors, in particular the chapter authors for working the many papers into coherent packages; to Jim Mayer for hosting a workshop of chapter authors at Cornell and to Ian Bubb who did a sterling job in working over some of the manuscripts. Our special thanks are due to the text processing center at Bell Labs who took on the task of assembling the book. In particular Karen Lieb and Beverly Heravi typed the whole manuscript and had the entire book phototypeset using the Bell Laboratories UNIXTM system.

Nanofabrication Using Focused Ion And Electron Beams

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Author : Ivo Utke
language : en
Publisher: OUP USA
Release Date : 2012-05

Nanofabrication Using Focused Ion And Electron Beams written by Ivo Utke and has been published by OUP USA this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-05 with Science categories.

This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.

Silicon Integrated Circuits

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Author : Dawon Kahng
language : en
Publisher: Academic Press
Release Date : 2013-10-22

Silicon Integrated Circuits written by Dawon Kahng and has been published by Academic Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-10-22 with Technology & Engineering categories.

Silicon Integrated Circuits, Part 2 covers some of the most promising approaches along with the new understanding of processing-related areas of physics and chemistry. The first chapter is about the transient thermal processing of silicon, including annealing with directed-energy beams and rapid isothermal annealing; adiabatic annealing with laser and electron beams; pulsed melting; thermal flux annealing; rapid isothermal annealing; and several applications stemming from rapid annealing and semiconductor processing with directed-energy beams. The second chapter is concerned with the use of electron cyclotron resonance plasmas in two important materials processing techniques: reactive ion-beam etching and plasma deposition. The last chapter of the book deals with the exploding area of very large scale integration processing and process simulation. Physicists, chemists, and engineers involved in silicon integrated circuits will find the book invaluable.

Microbeam And Nanobeam Analysis

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Author : Daniele Benoit
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06

Microbeam And Nanobeam Analysis written by Daniele Benoit and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Science categories.

The European Microanalysis Society held its Fourth Workshop in Saint Malo in May 1995. This volume includes the revised presentations, 10 tutorial chapters and 50 brief articles, from leading experts in electron probe microanalysis, secondary mass spectroscopy, analytical electron microscopy, and related fields.