Ellipsometry
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Spectroscopic Ellipsometry
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Author : Hiroyuki Fujiwara
language : en
Publisher: John Wiley & Sons
Release Date : 2007-09-27
Spectroscopic Ellipsometry written by Hiroyuki Fujiwara and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007-09-27 with Technology & Engineering categories.
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
Ellipsometry
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Author : Faustino Wahaia
language : en
Publisher: BoD – Books on Demand
Release Date : 2017-11-29
Ellipsometry written by Faustino Wahaia and has been published by BoD – Books on Demand this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-11-29 with Technology & Engineering categories.
Ellipsometry is rapidly emerging as a popular solution addressed to new materials science challenges and technological pitfalls hindering its effective application on modern problems. Amid the nowadays active development of materials of top notch, ellipsometry is also evolving rapidly both in the academic and industry sectors. The global industry strategies, introduce the latest scientific advances at manufacturing new, more accurate, and reliable ellipsometry systems to tackle emerging challenges. The book provides a comprehensive overview on the principles and technical capabilities of the modern ellipsometry highlighting its versatility in materials characterization.
Ellipsometry And Polarized Light
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Author : R. M. A. Azzam
language : en
Publisher: North Holland
Release Date : 1987
Ellipsometry And Polarized Light written by R. M. A. Azzam and has been published by North Holland this book supported file pdf, txt, epub, kindle and other format this book has been release on 1987 with Science categories.
Ellipsometry is a unique optical technique of great sensitivity for in situ non-destructive characterization of surface (inter-facial) phenomena (reactions) utilizing the change in the state of polarization of a light-wave probe. Although known for almost a century, the use of ellipsometry has increased rapidly in the last two decades. Among the most significant recent developments are new applications, novel and automated instrumentation and techniques for error-free data analysis. This book provides the necessary analytical and experimental tools needed for competent understanding and use of these developments. It is directed to those who are already working in the field and, more importantly, to the newcomer who would otherwise have to sift through several hundred published papers. The authors first present a comprehensive study of the different mathematical representations of polarized light and how such light is processed by optical systems, going on to show how these tools are applied to the analysis of ellipsometer systems. To relate ellipsometric measurements to surface properties, use is then made of electromagnetic theory. Experimental techniques and apparatus are described and the many interesting applications of ellipsometry to surface and thin-film phenomena are reviewed. This reference work is addressed to researchers and students with a strong interest in surface and thin-film physics and optics and their applications. It is a must for libraries in the fields of solid state physics, physical chemistry, electro-chemistry, metallurgy and optical engineering.
Spectroscopic Ellipsometry
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Author : Harland G. Tompkins
language : en
Publisher:
Release Date : 2015-12-16
Spectroscopic Ellipsometry written by Harland G. Tompkins and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-12-16 with Ellipsometry categories.
Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from subnanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical coating stacks, biological and medical coatings, protective layers, and more. While several scholarly books exist on the topic, this book provides a good introduction to the basic theory of the technique and its common applications. It follows in the footsteps of two previous books written by one of the authors with important updates to emphasize modern instrumentation and applications. The target audience is not the ellipsometry scholar, but process engineers and students of materials science who are experts in their own fields and wish to use ellipsometry to measure thin film properties without becoming an expert in ellipsometry itself.
A User S Guide To Ellipsometry
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Author : Harland G. Tompkins
language : en
Publisher: Courier Corporation
Release Date : 2006-07-07
A User S Guide To Ellipsometry written by Harland G. Tompkins and has been published by Courier Corporation this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-07-07 with Technology & Engineering categories.
This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry — particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth. A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.
Handbook Of Ellipsometry
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Author : Harland Tompkins
language : en
Publisher: William Andrew
Release Date : 2005-01-06
Handbook Of Ellipsometry written by Harland Tompkins and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-01-06 with Science categories.
The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.
Infrared Ellipsometry On Semiconductor Layer Structures
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Author : Mathias Schubert
language : en
Publisher: Springer Science & Business Media
Release Date : 2004-11-26
Infrared Ellipsometry On Semiconductor Layer Structures written by Mathias Schubert and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004-11-26 with Science categories.
The study of semiconductor-layer structures using infrared ellipsometry is a rapidly growing field within optical spectroscopy. This book offers basic insights into the concepts of phonons, plasmons and polaritons, and the infrared dielectric function of semiconductors in layered structures. It describes how strain, composition, and the state of the atomic order within complex layer structures of multinary alloys can be determined from an infrared ellipsometry examination. Special emphasis is given to free-charge-carrier properties, and magneto-optical effects. A broad range of experimental examples are described, including multinary alloys of zincblende and wurtzite structure semiconductor materials, and future applications such as organic layer structures and highly correlated electron systems are proposed.
Ellipsometry For Industrial Applications
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Author : Karl Riedling
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
Ellipsometry For Industrial Applications written by Karl Riedling and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Science categories.
During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. The potential users of such instruments are, however, frequently aware neither of the inherent possibilities of this technique, nor of its accuracy limitations. This book endeavors to point out some of the less obvious features and possibilities of ellipsometry, particularly of dynamic "in situ" measurements, and reviews its applications in research and manufacturing of semiconductor and thin film devices. A comprehensive discussion of various error effects typical particularly for simple ellipsometers and of their impact on measured sample parameters is provided. Error correction or (numerical) calibration procedures are given wherever possible, and design and operation guidelines for high-speed instruments suitable for dynamic "in situ" measurements are suggested.
Advances In Polarimetry And Ellipsometry Fundamentals And Applications
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Author : Haofeng Hu
language : en
Publisher: Frontiers Media SA
Release Date : 2022-10-17
Advances In Polarimetry And Ellipsometry Fundamentals And Applications written by Haofeng Hu and has been published by Frontiers Media SA this book supported file pdf, txt, epub, kindle and other format this book has been release on 2022-10-17 with Science categories.
Ellipsometry At The Nanoscale
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Author : Maria Losurdo
language : en
Publisher: Springer Science & Business Media
Release Date : 2013-03-12
Ellipsometry At The Nanoscale written by Maria Losurdo and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2013-03-12 with Technology & Engineering categories.
This book presents and introduces ellipsometry in nanoscience and nanotechnology making a bridge between the classical and nanoscale optical behaviour of materials. It delineates the role of the non-destructive and non-invasive optical diagnostics of ellipsometry in improving science and technology of nanomaterials and related processes by illustrating its exploitation, ranging from fundamental studies of the physics and chemistry of nanostructures to the ultimate goal of turnkey manufacturing control. This book is written for a broad readership: materials scientists, researchers, engineers, as well as students and nanotechnology operators who want to deepen their knowledge about both basics and applications of ellipsometry to nanoscale phenomena. It starts as a general introduction for people curious to enter the fields of ellipsometry and polarimetry applied to nanomaterials and progresses to articles by experts on specific fields that span from plasmonics, optics, to semiconductors and flexible electronics. The core belief reflected in this book is that ellipsometry applied at the nanoscale offers new ways of addressing many current needs. The book also explores forward-looking potential applications.