Handbook Of Thin Film Process Technology 99 1 Substrate Preparation For Thin Film Deposition
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Handbook Of Thin Film Process Technology 99 1 Substrate Preparation For Thin Film Deposition
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Author : D Glocker
language : en
Publisher: CRC Press
Release Date : 2000-01-01
Handbook Of Thin Film Process Technology 99 1 Substrate Preparation For Thin Film Deposition written by D Glocker and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000-01-01 with Technology & Engineering categories.
The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. The main work is regularly updated with new material, and this volume is a special issue on substrate cleaning which will be of interest to industrial and academic researchers in the semiconductor and optics industry in addition to owners of the main Handbook. This supplement includes recipes which give precise instructions for the cleaning of specific substrates, for specific film depositions, or using specific techniques. In addition, general articles evaluate the cleaning procedure, covering the usual contaminants, handling and storage of substrates, chemicals (for instance the importance of the pH of solution, particle deposition), DI quality (level of contamination, water drops), what is removed, drying (e.g. the Marangoni effect), and the surface of the substrate before deposition (composition, morphology, hydrophilic, hydrophobic).
Handbook Of Thin Film Technology
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Author : Hartmut Frey
language : en
Publisher: Springer Science & Business Media
Release Date : 2015-05-06
Handbook Of Thin Film Technology written by Hartmut Frey and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-05-06 with Technology & Engineering categories.
“Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.
Handbook Of Deposition Technologies For Films And Coatings
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Author : Rointan Framroze Bunshah
language : en
Publisher: William Andrew
Release Date : 1994
Handbook Of Deposition Technologies For Films And Coatings written by Rointan Framroze Bunshah and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994 with Science categories.
This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.
Handbook Of Thin Film Process Technology
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Author : David A Glocker
language : en
Publisher: CRC Press
Release Date : 2018-01-18
Handbook Of Thin Film Process Technology written by David A Glocker and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-01-18 with Science categories.
The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and academic researchers in addition to owners of the main Handbook. Some recent developments in the reactive sputtering field are covered, including unbalanced magnetron sputtering and pulsed reactive sputtering. The articles contain a wealth of practical information relating to applications, practice and manufacturing techniques.
Handbook Of Thin Film Deposition Processes And Techniques
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Author : Krishna Seshan
language : en
Publisher: William Andrew
Release Date : 2001-02-01
Handbook Of Thin Film Deposition Processes And Techniques written by Krishna Seshan and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2001-02-01 with Technology & Engineering categories.
New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. The book includes much cutting-edge material. Entirely new chapters on contamination and contamination control describe the basics and the issues—as feature sizes shrink to sub-micron dimensions, cleanliness and particle elimination has to keep pace. A new chapter on metrology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together all the physical vapor deposition techniques. Two entirely new areas receive full treatment: chemical mechanical polishing which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.
Handbook Of Thin Film Deposition
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Author : Krishna Seshan
language : en
Publisher: William Andrew
Release Date : 2012-06-27
Handbook Of Thin Film Deposition written by Krishna Seshan and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-06-27 with Science categories.
Resumen: The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together physical vapor deposition techniques. Two entirely new areas are focused on: chemical mechanical polishing, which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.
Handbook Of Thin Film Deposition Processes And Techniques
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Author : Klaus K. Schuegraf
language : en
Publisher: William Andrew
Release Date : 1988
Handbook Of Thin Film Deposition Processes And Techniques written by Klaus K. Schuegraf and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 1988 with Technology & Engineering categories.
The most recent developments and techniques in thin film deposition for high technology applications are described by 23 authorities in the field.
Handbook Of Deposition Technologies For Films And Coatings
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Author : Peter M. Martin
language : en
Publisher: William Andrew
Release Date : 2009-12-01
Handbook Of Deposition Technologies For Films And Coatings written by Peter M. Martin and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009-12-01 with Technology & Engineering categories.
This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications.
Thin Film Processes
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Author : John L. Vossen
language : en
Publisher: Elsevier
Release Date : 2012-12-02
Thin Film Processes written by John L. Vossen and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-02 with Technology & Engineering categories.
Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process.
Handbook Of Sputter Deposition Technology
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Author : Kiyotaka Wasa
language : en
Publisher: William Andrew
Release Date : 2012-12-31
Handbook Of Sputter Deposition Technology written by Kiyotaka Wasa and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-31 with Technology & Engineering categories.
This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere