Micro And Nanofabrication For Beginners
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Micro And Nanofabrication For Beginners
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Author : Eiichi Kondoh
language : en
Publisher: CRC Press
Release Date : 2022-06-13
Micro And Nanofabrication For Beginners written by Eiichi Kondoh and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2022-06-13 with Science categories.
In this book, the fundamentals of micro- and nanofabrication are described on the basis of the concept of “using gases as a fabrication tool.” Unlike other books available on the subject, this volume assumes only entry-level mathematics, physics, and chemistry of undergraduates or high-school students in science and engineering courses. Necessary theories are plainly explained to help the reader learn about this new attractive field and enable further reading of specialized books. The book is an attractive guide for students, young engineers, and anyone getting involved in micro- and nanofabrication from various fields including physics, electronics, chemistry, and materials sciences.
Micro And Nano Fabrication
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Author : Hans H. Gatzen
language : en
Publisher: Springer
Release Date : 2015-01-02
Micro And Nano Fabrication written by Hans H. Gatzen and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-01-02 with Technology & Engineering categories.
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Manufacturing Techniques For Microfabrication And Nanotechnology
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Author : Marc J. Madou
language : en
Publisher: CRC Press
Release Date : 2011-06-13
Manufacturing Techniques For Microfabrication And Nanotechnology written by Marc J. Madou and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-06-13 with Technology & Engineering categories.
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
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Author : 崔铮
language : en
Publisher:
Release Date : 2005
written by 崔铮 and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005 with Microtechnology categories.
Talks about the developments in micro-nanofabrication technologies. This book gives an introduction on the basics of micro-nanofabrication, including optical lithography, electron beam lithography, focused ion beam technique, X-ray lithography, various etching and replication techniques. It serves as a reference book for engineering professionals.
Micro And Nano Fabrication Technology
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Author : Jiwang Yan
language : en
Publisher: Springer
Release Date : 2018-07-16
Micro And Nano Fabrication Technology written by Jiwang Yan and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-07-16 with Technology & Engineering categories.
This volume focuses on the state-of-the-art micro/nanofabrication technologies for creating miniature structures with high precision. These multidisciplinary technologies include mechanical, electrical, optical, physical, and chemical methods, as well as hybrid processes, covering subtractive and additive material manufacturing, as well as net-shape manufacturing. The materials the volume deals with include metals, alloys, semiconductors, polymers, crystals, glass, ceramics, composites, and nanomaterials. The volume is composed of 30 chapters, which are grouped into five parts. Engaging with the latest research in the field, these chapters provide important perspectives on key topics, from process developments at the shop level to scientific investigations at the academic level, offering both experimental work and theoretical analysis. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only manufacturing technology but also mechanical/material science, optics, physics, chemistry, and more.
Micro Nanofabrication
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Author : Zheng Cui
language : en
Publisher: Springer
Release Date : 2010-10-14
Micro Nanofabrication written by Zheng Cui and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010-10-14 with Technology & Engineering categories.
The book is a collection of the author’s years of experience and research findings, as well as the latest development, in micro-nanofabrication technologies. It gives a detailed introduction on the basics of micro-nanofabrication, including optical lithography, electron beam lithography, focused ion beam technique, X-ray lithography, various etching and replication techniques. For each of the fabrication technology it introduces, the emphasis is on clear explanation of the basic principle, the essential steps in the processes, various process conditions and typical process parameters. The advantages and disadvantages of each technique are also analysed. The applications of micro-nanofabrication technologies focus on manufacturing of very large scale integrated circuits (VLSI), nanoelectronics, optoelectronics, high density magnetic storage, micro-electro-mechanical system or MEMS, biochip or lab-on-chip and nanotechnology. Each of the applications is accompanied by practical examples to demonstrate how particular fabrication techniques are applied. There is an extensive list of references following each chapter for readers to explore further. The book is not only a good supplementary reading material for university undergraduates or postgraduates who are novices in this field, but also a good reference book for experienced engineering professionals who wish to know other fabrication techniques outside their own field.
Micromanufacturing And Nanotechnology
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Author : Nitaigour P. Mahalik
language : en
Publisher: Springer Science & Business Media
Release Date : 2006-01-16
Micromanufacturing And Nanotechnology written by Nitaigour P. Mahalik and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-01-16 with Technology & Engineering categories.
Micromanufacturing and Nanotechnology is an emerging technological infrastructure and process that involves manufacturing of products and systems at the micro and nano scale levels. Development of micro and nano scale products and systems are underway due to the reason that they are faster, accurate and less expensive. Moreover, the basic functional units of such systems possesses remarkable mechanical, electronic and chemical properties compared to the macro-scale counterparts. Since this infrastructure has already become the prefered choice for the design and development of next generation products and systems it is now necessary to disseminate the conceptual and practical phenomenological know-how in a broader context. This book incorporates a selection of research and development papers. Its scope is the history and background, underlynig design methodology, application domains and recent developments.
Introduction To Microfabrication
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Author : Sami Franssila
language : en
Publisher: John Wiley & Sons
Release Date : 2005-01-28
Introduction To Microfabrication written by Sami Franssila and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-01-28 with Technology & Engineering categories.
Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.
Nanofabrication
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Author : Maria Stepanova
language : en
Publisher: Springer Science & Business Media
Release Date : 2011-11-08
Nanofabrication written by Maria Stepanova and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-11-08 with Technology & Engineering categories.
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.
Micro And Nanomanufacturing Volume Ii
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Author : Mark J. Jackson
language : en
Publisher: Springer
Release Date : 2017-10-28
Micro And Nanomanufacturing Volume Ii written by Mark J. Jackson and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-10-28 with Technology & Engineering categories.
This book is a comprehensive treatment of micro and nanofabrication techniques, and applies established and research laboratory manufacturing techniques to a wide variety of materials. It is a companion volume to “Micro and Nanomanufacturing” (2007) and covers new topics such as aligned nanowire growth, molecular dynamics simulation of nanomaterials, atomic force microscopy for microbial cell surfaces, 3D printing of pharmaceuticals, microvascular coaptation methods, and more. The chapters also cover a wide variety of applications in areas such as surgery, auto components, living cell detection, dentistry, nanoparticles in medicine, and aerospace components. This is an ideal text for professionals working in the field, and for graduate students in micro and nanomanufacturing courses.