Surface Metrology For Micro And Nanofabrication
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Surface Metrology For Micro And Nanofabrication
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Author : Wei Gao
language : en
Publisher: Elsevier
Release Date : 2020-10-30
Surface Metrology For Micro And Nanofabrication written by Wei Gao and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-10-30 with Technology & Engineering categories.
Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components Assesses the best techniques for repairing micro-defects
Handbook Of Surface And Nanometrology
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Author : David J. Whitehouse
language : en
Publisher: Taylor & Francis
Release Date : 2002-12-01
Handbook Of Surface And Nanometrology written by David J. Whitehouse and has been published by Taylor & Francis this book supported file pdf, txt, epub, kindle and other format this book has been release on 2002-12-01 with Science categories.
The Handbook of Surface and Nanometrology explains and challenges current concepts in nanotechnology. It covers in great detail surface metrology and nanometrology and more importantly the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. Trends and mechanisms are explained with numerous practical examples. Bringing engineering and physics together at the nanoscale reveals some astonishing effects: geometric features such as shape change meaning; roughness can disappear altogether; signals from instruments have to be dealt with differently depending on scale. These and other aspects are dealt with for the first time in this book. It is relevant not only for today's technology but also for future advances. Many aspects of nanotechnology and precision engineering are considered in chapters on manufacture, characterization, standardization, performance and instrumentation. There is a special chapter on nanometrology and this subject permeates the whole book. The Handbook of Surface and Nanometrology is the only book that covers these subject areas and is the definitive work in this field. This book is indispensable for firms making, trading, and researching semiconductor devices, MEMS, and micro-optics, as well as tradition precision engineering products. It will also be useful in quality control as well as for research scientists, development engineers, and production managers.
Fundamental Principles Of Engineering Nanometrology
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Author : Richard Leach
language : en
Publisher: William Andrew
Release Date : 2009-09-03
Fundamental Principles Of Engineering Nanometrology written by Richard Leach and has been published by William Andrew this book supported file pdf, txt, epub, kindle and other format this book has been release on 2009-09-03 with Technology & Engineering categories.
Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. Provides a basic introduction to measurement and instruments Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal , variable focus, and scattering instruments) Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge
Fundamental Principles Of Engineering Nanometrology
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Author : Richard Leach
language : en
Publisher: Elsevier
Release Date : 2014-05-17
Fundamental Principles Of Engineering Nanometrology written by Richard Leach and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-05-17 with Science categories.
Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach introduces these techniques to a broad audience of engineers and scientists involved in nanotechnology and manufacturing applications and research. He also provides a routemap and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale. Starting from the fundamentals of precision measurement, the author progresses into different measurement and characterization techniques. The focus on nanometrology in engineering contexts makes this book an essential guide for the emerging nanomanufacturing / nanofabrication sector, where measurement and standardization requirements are paramount both in product specification and quality assurance. This book provides engineers and scientists with the methods and understanding needed to design and produce high-performance, long-lived products while ensuring that compliance and public health requirements are met. Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections, e.g. new technologies in scanning probe and e-beam microscopy, recent developments in interferometry and advances in co-ordinate metrology. Demystifies nanometrology for a wide audience of engineers, scientists, and students involved in nanotech and advanced manufacturing applications and research Introduces metrologists to the specific techniques and equipment involved in measuring at the nano-scale or to nano-scale uncertainty Fully updated to cover the latest technological developments, standards, and regulations
Handbook Of Surface And Nanometrology Second Edition
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Author : David J. Whitehouse
language : en
Publisher: CRC Press
Release Date : 2010-12-20
Handbook Of Surface And Nanometrology Second Edition written by David J. Whitehouse and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010-12-20 with Science categories.
Since the publication of the first edition, miniaturization and nanotechnology have become inextricably linked to traditional surface geometry and metrology. This interdependence of scales has had profound practical implications. Updated and expanded to reflect many new developments, Handbook of Surface and Nanometrology, Second Edition determines how the reduction in scale of size from macro to nano has affected all aspects of surface use and measurement. The book discusses how this shift has extended through characterization, standardization, manufacture, and performance. With nanotechnology now permeating the text, this edition covers new methods of production and measurement as well as new performance requirements. Described as the father of digital metrology by the American Society for Precision Engineering, author David J. Whitehouse explores the range of surface size scales—macro, micro, nano, atomic, and combinations of these. He examines traditional, structured, patterned, and free-form surfaces, emphasizing the growing need to understand the behavior of multiple surfaces. Still the definitive reference in the field, the second edition of this handbook continues to provide in-depth, extensive coverage of the engineering, physics, materials, mathematics, and computing involved in surface metrology and nanometrology. Nothing concerning current surface geometry escapes inclusion or scrutiny in this book.
Precision Nanometrology
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Author : Wei Gao
language : en
Publisher: Springer Science & Business Media
Release Date : 2010-06-14
Precision Nanometrology written by Wei Gao and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2010-06-14 with Technology & Engineering categories.
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and systems for measurement of straightness and roundness, • the measurement of micro-aspherics, • systems based on scanning probe microscopy, and • scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing.
Signal Measurement And Estimation Techniques For Micro And Nanotechnology
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Author : Cédric Clévy
language : en
Publisher: Springer Science & Business Media
Release Date : 2011-07-25
Signal Measurement And Estimation Techniques For Micro And Nanotechnology written by Cédric Clévy and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-07-25 with Technology & Engineering categories.
Signal Measurement and Estimation Techniques for Micro and Nanotechnology discusses micro, nano and robotic cells and gives a state-of-the-art presentation of the different techniques and solutions to measure and estimate signals at the micro and nano scale. New technologies and applications such as micromanipulation (artificial components, biological objects), micro-assembly (MEMS, MOEMS, NEMS) and material and surface force characterization are covered. The importance of sensing at the micro and nano scale is presented as a key issue in control systems, as well as for understanding the physical phenomena of these systems. The book also: Explains issues that make signal measurement and estimation techniques difficult at the micro-nano-scale and offers solutions Discusses automated micro-assembly, and control of micro-nano robotic devices Presents and links signal measurement and estimation techniques for micro-nano scale systems with microfabrication methods, sensors integration and control schemes Signal Measurement and Estimation Techniques for Micro and Nanotechnology is a must-read for researchers and engineers working in MEMS and control systems.
Optical Metrology For Precision Engineering
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Author : Wei Gao
language : en
Publisher: Walter de Gruyter GmbH & Co KG
Release Date : 2021-11-22
Optical Metrology For Precision Engineering written by Wei Gao and has been published by Walter de Gruyter GmbH & Co KG this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021-11-22 with Technology & Engineering categories.
This book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields. • Introduces fundamental theories and techniques • Combines theories with practical applications • Presents technologies in an easy-to-understand way
Micro And Nanomanufacturing
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Author : Mark J. Jackson
language : en
Publisher: Springer Science & Business Media
Release Date : 2007-06-19
Micro And Nanomanufacturing written by Mark J. Jackson and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007-06-19 with Technology & Engineering categories.
This, the corrected second printing of Jackson’s authoritative volume on the subject, provides a comprehensive treatment of established micro and nanofabrication techniques. It addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials. Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems. The book provides up-to-date information on a number of subjects of interest to engineers who are seeking more knowledge of how nano and micro devices are designed and fabricated. They will learn about manufacturing and fabrication techniques at the micro and nanoscales; using bulk and surface micromachining techniques, and LiGA, and deep x-ray lithography to manufacture semiconductors. Also covered are subjects including producing master molds with micromachining, the deposition of thin films, pulsed water drop machining, and nanomachining.
Measurement Technology For Micro Nanometer Devices
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Author : Wendong Zhang
language : en
Publisher: John Wiley & Sons
Release Date : 2017-01-17
Measurement Technology For Micro Nanometer Devices written by Wendong Zhang and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-01-17 with Technology & Engineering categories.
A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices