Surface Metrology For Micro And Nanofabrication
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Surface Metrology For Micro And Nanofabrication
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Author : Wei Gao
language : en
Publisher: Elsevier
Release Date : 2020-10-30
Surface Metrology For Micro And Nanofabrication written by Wei Gao and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-10-30 with Technology & Engineering categories.
Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. - Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology - Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components - Assesses the best techniques for repairing micro-defects
Optical Metrology For Precision Engineering
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Author : Wei Gao
language : en
Publisher: Walter de Gruyter GmbH & Co KG
Release Date : 2021-11-22
Optical Metrology For Precision Engineering written by Wei Gao and has been published by Walter de Gruyter GmbH & Co KG this book supported file pdf, txt, epub, kindle and other format this book has been release on 2021-11-22 with Technology & Engineering categories.
This book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields. • Introduces fundamental theories and techniques • Combines theories with practical applications • Presents technologies in an easy-to-understand way
Microfabrication And Nanofabrication
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Author : Kanak Kalita
language : en
Publisher: Walter de Gruyter GmbH & Co KG
Release Date : 2024-06-04
Microfabrication And Nanofabrication written by Kanak Kalita and has been published by Walter de Gruyter GmbH & Co KG this book supported file pdf, txt, epub, kindle and other format this book has been release on 2024-06-04 with Technology & Engineering categories.
This book unravels the intriguing interplay between macroscopic manufacturing processes and microscopic fabrication techniques. It dives into the sophisticated world of precision manufacturing, where high accuracy, controlled processes enable the production of complex components and products. It covers micro and nano fabrication, which revolutionizes conventional manufacturing by creating minuscule yet highly functional parts, some even smaller than the width of a human hair. This book explores various topics, from precise machining techniques to nanoimprint technology, reflecting the vast breadth and depth of this field. The aim is to provide readers with a comprehensive understanding of how these micro and macro scales intertwine, opening new frontiers in manufacturing. By showcasing the latest research findings and their practical applications, this book elucidates the enormous potential and implications of this burgeoning field. The contents are laid out in a user-friendly manner to communicate complex ideas in an accessible, engaging way, making it a valuable resource for anyone curious about the next big leap in manufacturing technology.
Microfabrication And Nanomanufacturing
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Author : Mark J. Jackson
language : en
Publisher: CRC Press
Release Date : 2005-11-10
Microfabrication And Nanomanufacturing written by Mark J. Jackson and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005-11-10 with Technology & Engineering categories.
Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.
Ultraprecision Machining And Metrology
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Author : Jiwang Yan
language : en
Publisher: CRC Press
Release Date : 2025-09-23
Ultraprecision Machining And Metrology written by Jiwang Yan and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2025-09-23 with Technology & Engineering categories.
This comprehensive introduction to ultraprecision machining and metrology provides an essential foundation for students and engineers, offering an in-depth analysis of key methods, technologies, and practical applications. Ultraprecision machining is a critical enabling technology for producing high-value mechanical, optical, optoelectronic, and biomedical components with complex geometries and extreme precision. This book delivers a structured exploration of ultraprecision machining and metrology, covering essential topics such as system configuration, tooling, machining mechanism modeling, and surface characterization. Dedicated chapters on surface and subsurface metrology, as well as the machinability of both ductile and brittle materials, make it an indispensable resource for understanding machine design, manufacturing processes, and related materials science. Ideal for students and researchers, this book serves as a vital reference for those working in precision machining, MEMS, advanced manufacturing, and precision metrology.
Micro And Nano Fabrication
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Author : Hans H. Gatzen
language : en
Publisher: Springer
Release Date : 2015-01-02
Micro And Nano Fabrication written by Hans H. Gatzen and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2015-01-02 with Technology & Engineering categories.
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Nanoscale Calibration Standards And Methods
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Author : Günter Wilkening
language : en
Publisher: John Wiley & Sons
Release Date : 2006-05-12
Nanoscale Calibration Standards And Methods written by Günter Wilkening and has been published by John Wiley & Sons this book supported file pdf, txt, epub, kindle and other format this book has been release on 2006-05-12 with Technology & Engineering categories.
The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods. The seminar "NanoScale 2004" (6th Seminar on Quantitative Microscopy and 2nd Seminar on Nanoscale Calibration Standards and Methods) at the National Metrology Institute (Physikalisch-Technische Bundesanstalt PTB), Braunschweig, Germany, continues the series of seminars on Quantitative Microscopy. The series stimulates the exchange of information between manufacturers of relevant hard- and software and the users in science and industry. Topics addressed in these proceedings are a) the application of quantitative measurements and measurement problems in: microelectronics, microsystems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, materials science, surface processing b) calibration & correction methods: calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncertainty of measurements c) instrumentation and methods: novel/improved instruments and methods, reproducible probe/sample positioning, position-measuring systems, novel/improved probe/detector systems, linearization methods, image processing
Manufacturing Techniques For Microfabrication And Nanotechnology
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Author : Marc J. Madou
language : en
Publisher: CRC Press
Release Date : 2011-06-13
Manufacturing Techniques For Microfabrication And Nanotechnology written by Marc J. Madou and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011-06-13 with Technology & Engineering categories.
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
The Physics Of Micro Nano Fabrication
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Author : Ivor Brodie
language : en
Publisher: Springer Science & Business Media
Release Date : 1992
The Physics Of Micro Nano Fabrication written by Ivor Brodie and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 1992 with Science categories.
In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
Introduction To Nanoscience And Nanotechnology
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Author : Gabor L. Hornyak
language : en
Publisher: CRC Press
Release Date : 2008-12-22
Introduction To Nanoscience And Nanotechnology written by Gabor L. Hornyak and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2008-12-22 with Science categories.
The maturation of nanotechnology has revealed it to be a unique and distinct discipline rather than a specialization within a larger field. Its textbook cannot afford to be a chemistry, physics, or engineering text focused on nano. It must be an integrated, multidisciplinary, and specifically nano textbook. The archetype of the modern nano textbook