Tungsten And Other Advanced Metals For Ulsi Applications In 1990 Volume 6
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Tungsten And Other Advanced Metals For Ulsi Applications In 1990 Volume 6
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Author : Gregory C. Smith
language : en
Publisher:
Release Date : 1991-03
Tungsten And Other Advanced Metals For Ulsi Applications In 1990 Volume 6 written by Gregory C. Smith and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1991-03 with Science categories.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Handbook Of Semiconductor Manufacturing Technology
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Author : Yoshio Nishi
language : en
Publisher: CRC Press
Release Date : 2017-12-19
Handbook Of Semiconductor Manufacturing Technology written by Yoshio Nishi and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-12-19 with Technology & Engineering categories.
Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.
Advanced Metallization For Ulsi Applications
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Author :
language : en
Publisher:
Release Date : 1992
Advanced Metallization For Ulsi Applications written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1992 with Electrochemical metallizing categories.
Advanced Techniques For Integrated Circuit Processing Ii
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Author : James Bondur
language : en
Publisher:
Release Date : 1993
Advanced Techniques For Integrated Circuit Processing Ii written by James Bondur and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1993 with Technology & Engineering categories.
Proceedings Of The Symposium On Fundamental Gas Phase And Surface Chemistry Of Vapor Phase Materials Synthesis
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Author : Mark Donald Allendorf
language : en
Publisher: The Electrochemical Society
Release Date : 1999
Proceedings Of The Symposium On Fundamental Gas Phase And Surface Chemistry Of Vapor Phase Materials Synthesis written by Mark Donald Allendorf and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 1999 with Science categories.
Materials Reliability In Microelectronics Vi Volume 428
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Author : William F. Filter
language : en
Publisher:
Release Date : 1996-11-18
Materials Reliability In Microelectronics Vi Volume 428 written by William F. Filter and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1996-11-18 with Technology & Engineering categories.
MRS books on materials reliability in microelectronics have become the snapshot of progress in this field. Reduced feature size, increased speed, and larger area are all factors contributing to the continual performance and functionality improvements in integrated circuit technology. These same factors place demands on the reliability of the individual components that make up the IC. Achieving increased reliability requires an improved understanding of both thin-film and patterned-feature materials properties and their degradation mechanisms, how materials and processes used to fabricate ICs interact, and how they may be tailored to enable reliability improvements. This book focuses on the physics and materials science of microelectronics reliability problems rather than the traditional statistical, accelerated electrical testing aspects. Studies are grouped into three large sections covering electromigration, gate oxide reliability and mechanical stress behavior. Topics include: historical summary; reliability issues for Cu metallization; characterization of electromigration phenomena; modelling; microstructural evolution and influences; oxide and device reliability; thin oxynitride dielectrics; noncontact diagnostics; stress effects in thin films and interconnects and microbeam X-ray techniques for stress measurements.
Proceedings Of The Symposium Om Process Control Diagnostics And Modeling In Semiconductor Manufacturing
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Author : M. Meyyappan
language : en
Publisher: The Electrochemical Society
Release Date : 1995
Proceedings Of The Symposium Om Process Control Diagnostics And Modeling In Semiconductor Manufacturing written by M. Meyyappan and has been published by The Electrochemical Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995 with Technology & Engineering categories.
Advanced Metallizations In Microelectronics Volume 181
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Author : Avishay Katz
language : en
Publisher:
Release Date : 1990-09-12
Advanced Metallizations In Microelectronics Volume 181 written by Avishay Katz and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1990-09-12 with Technology & Engineering categories.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Cvd Xi
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Author : Karl E. Spear
language : en
Publisher:
Release Date : 1990
Cvd Xi written by Karl E. Spear and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1990 with Vapor-plating categories.
Journal Of The Institution Of Electronics And Telecommunication Engineers
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Author :
language : en
Publisher:
Release Date : 1991
Journal Of The Institution Of Electronics And Telecommunication Engineers written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1991 with Electronics categories.