Advanced Metallization For Ulsi Applications In 1993
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Advanced Metallization For Ulsi Applications In 1993
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Author : David P. Favreau
language : en
Publisher: Materials Research Society
Release Date : 1994-02-01
Advanced Metallization For Ulsi Applications In 1993 written by David P. Favreau and has been published by Materials Research Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 1994-02-01 with Technology & Engineering categories.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Advanced Metallization For Ulsi Applications
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Author :
language : en
Publisher:
Release Date : 1992
Advanced Metallization For Ulsi Applications written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1992 with Electrochemical metallizing categories.
Handbook Of Semiconductor Manufacturing Technology
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Author : Yoshio Nishi
language : en
Publisher: CRC Press
Release Date : 2017-12-19
Handbook Of Semiconductor Manufacturing Technology written by Yoshio Nishi and has been published by CRC Press this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-12-19 with Technology & Engineering categories.
Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.
Advanced Metallization And Interconnect Systems For Ulsi Applications In 1996 Volume 12
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Author : Robert Havemann
language : en
Publisher: Mrs Conference Proceedings
Release Date : 1997
Advanced Metallization And Interconnect Systems For Ulsi Applications In 1996 Volume 12 written by Robert Havemann and has been published by Mrs Conference Proceedings this book supported file pdf, txt, epub, kindle and other format this book has been release on 1997 with Computers categories.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Advanced Metallization And Interconnect Systems For Ulsi Applications In 1995
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Author : Russell C. Ellwanger
language : en
Publisher: Materials Research Society
Release Date : 2000-02-01
Advanced Metallization And Interconnect Systems For Ulsi Applications In 1995 written by Russell C. Ellwanger and has been published by Materials Research Society this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000-02-01 with Technology & Engineering categories.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Advanced Metallization Conference In
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Author :
language : en
Publisher:
Release Date : 2007
Advanced Metallization Conference In written by and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2007 with Integrated circuits categories.
Advanced Metallization Conference 1999 Amc 1999 Volume 15
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Author : Mihal E. Gross
language : en
Publisher: Mrs Conference Proceedings
Release Date : 2000
Advanced Metallization Conference 1999 Amc 1999 Volume 15 written by Mihal E. Gross and has been published by Mrs Conference Proceedings this book supported file pdf, txt, epub, kindle and other format this book has been release on 2000 with Technology & Engineering categories.
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Advanced Metallization For Ulsi Applications For 1994
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Author : Roc Blumenthal
language : en
Publisher:
Release Date : 1995-01-01
Advanced Metallization For Ulsi Applications For 1994 written by Roc Blumenthal and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1995-01-01 with Technology & Engineering categories.
Advanced Metallization For Future Ulsi Volume 427
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Author : Materials Research Society. Meeting
language : en
Publisher:
Release Date : 1996-11-08
Advanced Metallization For Future Ulsi Volume 427 written by Materials Research Society. Meeting and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 1996-11-08 with Computers categories.
The feature sizes of microelectronic devices have entered the deep submicron regime. The process integration and structure-properties control of the multilevel metal circuitry demand an interdisciplinary interaction and understanding between manufacturing and research. To realize the vision presented in the national technology road map, material and technological challenges will need to be overcome. For example Cu conductor and its barrier metals and low-dielectric constant insulators are at issue. For materials processing, chemical-mechanical planarization and low-temperature filling of high-aspect ratio vias are challenges. For materials examination, the metrology of submicron structures is nontrivial and for materials reliability, the interplay among multiple driving forces and the response in small-dimension microstructures are intriguing. These issues are the focus of this book from MRS. Topics include: road map, technology and metrology of submicron device structures; reliability issues for Cu metallization; Al interconnects and vias; barrier metal; interlevel low-K dielectrics and contact to Si and compound semiconductors.
Advanced Metallization Conference 2004 Amc 2004
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Author : Darrell Erb
language : en
Publisher:
Release Date : 2005
Advanced Metallization Conference 2004 Amc 2004 written by Darrell Erb and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2005 with Technology & Engineering categories.