Mems Aluminum Nitride Technology For Inertial Sensors
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Mems Aluminum Nitride Technology For Inertial Sensors
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Author : Gabriele Vigevani
language : en
Publisher:
Release Date : 2011
Mems Aluminum Nitride Technology For Inertial Sensors written by Gabriele Vigevani and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2011 with categories.
The design and fabrication of MEMS Inertial Sensors (both accelerometers and gyroscopes) made of Aluminum Nitride (AlN) is described in this dissertation. The goal of this work is to design and fabricate inertial sensors based on c-axis oriented AlN polycrystalline thin films. AlN is a post-CMOS compatible piezoelectric material widely used for acoustic resonators, such Bulk Acoustic Wave (BAW) and Lamb Wave Resonators (LWR). In this work we develop the design techniques necessary to obtain inertial sensors with AlN thin film technology. Being able to use AlN as structural material for both acoustic wave resonator and sensing elements is key to achieve the three level integration of RF-MEMS components, sensing elements and CMOS in the same chip. Using AlN as integration platform is particularly suitable for large consumer emerging markets where production costs are the major factor that determine a product success. In order to achieve a platform integration, the first part of this work focuses on the fabrication process: starting from the fabrication technology used for LWR devices, this work shows that by slightly modifying some of the fabrication steps it is possible to obtain MEMS accelerometers and gyroscopes with the same structural layers used for LWR. In the second part of this work, an extensive analysis, performed with analytical and Finite Element Models (FEM), is developed for beam and ring based structures. These models are of great importance as they provide tools to understand the physics of lateral piezoelectric beam actuation and the major limitations of this technology. Based on the models developed for beam based resonators, we propose two designs for Double Ended Tuning Fork (DETF) based accelerometers. In the last part of the dissertation, we show the experimental results and the measurements performed on actual devices. As this work shows analytically and experimentally, there are some fundamental constraints that limit the ultimate sensitivity of piezoelectric sensors based on resonating beam structures. Although the limitations of the structures here considered cannot achieve tactical grade sensitivities, this research proves that it is possible to achieve performances close to those required by large consumer electronics. This work proves that AlN based platforms can be a great opportunity for future developments in IMU and in general for MEMS integrated solutions.
Piezoelectric Mems
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Author : Ulrich Schmid
language : en
Publisher: MDPI
Release Date : 2018-07-10
Piezoelectric Mems written by Ulrich Schmid and has been published by MDPI this book supported file pdf, txt, epub, kindle and other format this book has been release on 2018-07-10 with categories.
This book is a printed edition of the Special Issue "Piezoelectric MEMS" that was published in Micromachines
Mems Mechanical Sensors
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Author : Stephen Beeby
language : en
Publisher: Artech House
Release Date : 2004
Mems Mechanical Sensors written by Stephen Beeby and has been published by Artech House this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with Technology & Engineering categories.
Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.
Handbook Of Silicon Based Mems Materials And Technologies
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Author : Markku Tilli
language : en
Publisher: Elsevier
Release Date : 2020-04-17
Handbook Of Silicon Based Mems Materials And Technologies written by Markku Tilli and has been published by Elsevier this book supported file pdf, txt, epub, kindle and other format this book has been release on 2020-04-17 with Technology & Engineering categories.
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
Cmoset 2013 Vol 2 Materials Interfaces And Mems Track
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Author : CMOS Emerging Technologies Research
language : en
Publisher: CMOS Emerging Technologies
Release Date : 2014-06-23
Cmoset 2013 Vol 2 Materials Interfaces And Mems Track written by CMOS Emerging Technologies Research and has been published by CMOS Emerging Technologies this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-06-23 with categories.
Presentation slides from the 2013 CMOS Emerging Technologies Research symposium in Whistler, Canada.
Novel Architectures For Mems Inertial Sensors And Resonators Targeting Above Ic Integration
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Author : Mohannad Elsayed
language : en
Publisher:
Release Date : 2016
Novel Architectures For Mems Inertial Sensors And Resonators Targeting Above Ic Integration written by Mohannad Elsayed and has been published by this book supported file pdf, txt, epub, kindle and other format this book has been release on 2016 with categories.
"The importance of micromachined sensors and resonators is continuously increasing as they get more widespread in a broad variety of applications ranging from handheld consumer electronics to more sophisticated applications as robotics and space applications. This is pushing research in all aspects of microsystems to produce higher performance lower cost devices to cope with the increasing demand. In this work, architectures for improving the performance of different types of MEMS inertial, magnetic sensors (targeting inertial combos) and resonators (targeting MEMS oscillators) are presented. Also, a low temperature surface micromachining technology featuring independently controlled lateral and vertical gaps targeted for the fabrication of capacitive sensors and resonators above-IC is illustrated.A novel method for enhancing the sensitivity of bulk mode gyroscopes and resonators is presented. It is based on adding parallel plate comb drives with tuned stiffness to the points of maximum vibration amplitude for optimal driving and sensing of the disk's vibrational modes. Fabricated Prototypes were measured to operate at frequencies of ~1.5 MHz, with quality factors of up to ~33,000, and exhibit a rate sensitivity of 0.43 aF/°/s/electrode, two orders of magnitude higher than a similar design without combs that was also fabricated in the same technology. A combined magnetometer / accelerometer design based on the Lorentz force is introduced, where an electrical current is switched between two orthogonal directions on the device structure to achieve a 2D in-plane magnetic field measurement. The device can concurrently serve as a 1D accelerometer for out-of-plane acceleration, when the current is switched off. The device is fabricated using a low temperature SiC surface micromachining technology, which is fully adapted for above-IC integration on standard CMOS substrates. Measurement results from the fabricated device show a magnetic field sensitivity of 1.57 pF/T and an acceleration sensitivity of 1.02 fF/g. A wine-glass bulk mode disk resonator based on a novel transverse piezoelectric actuation technique, which does not require any DC voltage for operation, to achieve bulk mode resonance of the single crystalline silicon disk structure is presented. The device is fabricated in a commercial MEMS process and thus combines reasonable quality factor and superior motional resistance in a low-cost technology. External capacitive electrodes are used for optional electrostatic tuning of the frequency. Fabricated devices were measured to have resonance frequencies of ~15 MHz and quality factors as high as ~5,000. The first surface micromachining technology based on amorphous silicon carbide (a-SiC) for above-IC integration of capacitive devices featuring independently controlled submicron lateral and vertical transduction gaps is presented. Processing is optimized for full compatibility with commercial CMOS processes, with the lowest reported fabrication temperature (
An Introduction To Microelectromechanical Systems Engineering
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Author : Nadim Maluf
language : en
Publisher: Artech House
Release Date : 2004
An Introduction To Microelectromechanical Systems Engineering written by Nadim Maluf and has been published by Artech House this book supported file pdf, txt, epub, kindle and other format this book has been release on 2004 with Technology & Engineering categories.
Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.
Mechanical Microsensors
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Author : M. Elwenspoek
language : en
Publisher: Springer Science & Business Media
Release Date : 2012-12-06
Mechanical Microsensors written by M. Elwenspoek and has been published by Springer Science & Business Media this book supported file pdf, txt, epub, kindle and other format this book has been release on 2012-12-06 with Technology & Engineering categories.
This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).
Piezoelectric Mems Resonators
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Author : Harmeet Bhugra
language : en
Publisher: Springer
Release Date : 2017-01-09
Piezoelectric Mems Resonators written by Harmeet Bhugra and has been published by Springer this book supported file pdf, txt, epub, kindle and other format this book has been release on 2017-01-09 with Technology & Engineering categories.
This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
Mems Pressure Sensors Fabrication And Process Optimization
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Author : Parvej Ahmad Alvi
language : en
Publisher: Lulu.com
Release Date : 2014-07-14
Mems Pressure Sensors Fabrication And Process Optimization written by Parvej Ahmad Alvi and has been published by Lulu.com this book supported file pdf, txt, epub, kindle and other format this book has been release on 2014-07-14 with Technology & Engineering categories.
MEMS Pressure Sensors: Fabrication and Process Optimization - describs the step by step fabrication process sequence along with flow chart for fabrication of micro pressure sensors taking into account various aspects of fabrication and designing of the pressure sensors as well as fabrication process optimization. A complete experimental detail before and after each step of fabrication of the sensor has also been discussed. This leads to the uniqueness of the book. MEMS Pressure Sensors: Fabrication and Process Optimization will greatly benefit undergraduate and postgraduate students of MEMS and NEMS courses. Process engineers and technologists in the microelectronics industry including MEMS-based sensors manufacturers.